{"id":8884,"date":"2026-05-14T14:49:25","date_gmt":"2026-05-14T06:49:25","guid":{"rendered":"https:\/\/www.sic-wafers.com\/?p=8884"},"modified":"2026-05-15T11:19:56","modified_gmt":"2026-05-15T03:19:56","slug":"common-defects-in-sic-wafers-and-inspection-methods","status":"publish","type":"post","link":"https:\/\/www.sic-wafers.com\/ar\/common-defects-in-sic-wafers-and-inspection-methods\/","title":{"rendered":"\u0627\u0644\u0639\u064a\u0648\u0628 \u0627\u0644\u0634\u0627\u0626\u0639\u0629 \u0641\u064a \u0631\u0642\u0627\u0642\u0627\u062a SiC \u0648\u0637\u0631\u0642 \u0627\u0644\u0641\u062d\u0635"},"content":{"rendered":"
<\/div>\n

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\u0648\u0645\u0639 \u0630\u0644\u0643\u060c \u0641\u0625\u0646 \u0645\u0632\u0627\u064a\u0627 SiC \u062a\u0623\u062a\u064a \u0645\u0639 \u062a\u062d\u062f\u064a\u0627\u062a \u062a\u0635\u0646\u064a\u0639 \u0643\u0628\u064a\u0631\u0629. \u0646\u0638\u0631\u064b\u0627 \u0644\u062f\u0631\u062c\u0627\u062a \u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0646\u0645\u0648 \u0627\u0644\u0628\u0644\u0648\u0631\u064a \u0627\u0644\u0645\u0631\u062a\u0641\u0639\u0629 \u0644\u0644\u063a\u0627\u064a\u0629 \u0648\u0627\u0644\u0628\u0646\u064a\u0629 \u0627\u0644\u0634\u0628\u0643\u064a\u0629 \u0627\u0644\u0645\u0639\u0642\u062f\u0629\u060c \u0641\u0625\u0646 \u0631\u0642\u0627\u0626\u0642 SiC \u0639\u0631\u0636\u0629 \u0644\u0639\u064a\u0648\u0628 \u0647\u064a\u0643\u0644\u064a\u0629 \u0648\u0633\u0637\u062d\u064a\u0629 \u0645\u062e\u062a\u0644\u0641\u0629 \u0623\u062b\u0646\u0627\u0621 \u0646\u0645\u0648 \u0627\u0644\u0628\u0644\u0648\u0631\u0627\u062a \u0648\u0627\u0644\u062a\u0642\u0637\u064a\u0639 \u0648\u0627\u0644\u062a\u0644\u0645\u064a\u0639 \u0648\u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0641\u0648\u0642\u064a\u0629. \u062a\u0624\u062b\u0631 \u0647\u0630\u0647 \u0627\u0644\u0639\u064a\u0648\u0628 \u062a\u0623\u062b\u064a\u0631\u0627\u064b \u0645\u0628\u0627\u0634\u0631\u0627\u064b \u0639\u0644\u0649 \u0645\u0648\u062b\u0648\u0642\u064a\u0629 \u0627\u0644\u062c\u0647\u0627\u0632 \u0648\u0627\u0644\u0639\u0627\u0626\u062f \u0648\u0627\u0644\u0623\u062f\u0627\u0621 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a.<\/p>\n\n\n\n

\u062a\u0642\u062f\u0645 \u0647\u0630\u0647 \u0627\u0644\u0645\u0642\u0627\u0644\u0629 \u0646\u0638\u0631\u0629 \u0639\u0627\u0645\u0629 \u0623\u0643\u0627\u062f\u064a\u0645\u064a\u0629 \u0639\u0644\u0649 \u0627\u0644\u0639\u064a\u0648\u0628 \u0627\u0644\u0634\u0627\u0626\u0639\u0629 \u0627\u0644\u0645\u0648\u062c\u0648\u062f\u0629 \u0641\u064a \u0631\u0642\u0627\u0626\u0642 SiC \u0648\u0637\u0631\u0642 \u0627\u0644\u0641\u062d\u0635 \u0627\u0644\u0645\u0633\u062a\u062e\u062f\u0645\u0629 \u0644\u062a\u062d\u062f\u064a\u062f\u0647\u0627 \u0648\u062a\u0648\u0635\u064a\u0641\u0647\u0627.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

\u0623\u0647\u0645\u064a\u0629 \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u0639\u064a\u0648\u0628 \u0641\u064a \u0631\u0642\u0627\u0642\u0627\u062a SiC<\/h2>\n\n\n\n

\u0639\u0627\u062f\u0629\u064b \u0645\u0627 \u064a\u062a\u0645 \u0625\u0646\u062a\u0627\u062c \u0628\u0644\u0648\u0631\u0627\u062a SiC \u0627\u0644\u0645\u0641\u0631\u062f\u0629 \u0628\u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0637\u0631\u064a\u0642\u0629 \u0627\u0644\u0646\u0642\u0644 \u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0626\u064a \u0644\u0644\u0628\u062e\u0627\u0631 (PVT). \u0623\u062b\u0646\u0627\u0621 \u0646\u0645\u0648 \u0627\u0644\u0628\u0644\u0648\u0631\u0627\u062a\u060c \u064a\u0645\u0643\u0646 \u0623\u0646 \u062a\u0624\u062f\u064a \u0627\u0644\u062a\u0642\u0644\u0628\u0627\u062a \u0641\u064a \u062a\u062f\u0631\u062c\u0627\u062a \u062f\u0631\u062c\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0648\u0627\u0644\u062a\u0634\u0628\u0639 \u0627\u0644\u0641\u0627\u0626\u0642 \u0648\u062a\u0648\u0632\u064a\u0639 \u0627\u0644\u0625\u062c\u0647\u0627\u062f \u0648\u062f\u0645\u062c \u0627\u0644\u0634\u0648\u0627\u0626\u0628 \u0625\u0644\u0649 \u062d\u062f\u0648\u062b \u0639\u064a\u0648\u0628 \u0628\u0644\u0648\u0631\u064a\u0629.<\/p>\n\n\n\n

\u062d\u062a\u0649 \u0643\u062b\u0627\u0641\u0629 \u0627\u0644\u0639\u064a\u0648\u0628 \u0627\u0644\u0645\u0646\u062e\u0641\u0636\u0629 \u0646\u0633\u0628\u064a\u064b\u0627 \u0642\u062f \u062a\u0633\u0628\u0628 \u0645\u0634\u0627\u0643\u0644 \u0643\u0628\u064a\u0631\u0629 \u0641\u064a \u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0637\u0627\u0642\u0629\u060c \u0628\u0645\u0627 \u0641\u064a \u0630\u0644\u0643:<\/p>\n\n\n\n

    \n
  • \u0632\u064a\u0627\u062f\u0629 \u062a\u064a\u0627\u0631 \u0627\u0644\u062a\u0633\u0631\u0628 \u0627\u0644\u0645\u062a\u0632\u0627\u064a\u062f<\/li>\n\n\n\n
  • \u0627\u0646\u062e\u0641\u0627\u0636 \u062c\u0647\u062f \u0627\u0644\u0627\u0646\u0647\u064a\u0627\u0631 \u0627\u0644\u0645\u0646\u062e\u0641\u0636<\/li>\n\n\n\n
  • \u0645\u0642\u0627\u0648\u0645\u0629 \u0645\u0631\u062a\u0641\u0639\u0629 \u0639\u0644\u0649 \u0627\u0644\u0645\u0642\u0627\u0648\u0645\u0629<\/li>\n\n\n\n
  • \u062a\u062f\u0647\u0648\u0631 \u0627\u0644\u062c\u0647\u0627\u0632 \u0623\u062b\u0646\u0627\u0621 \u0627\u0644\u062a\u0634\u063a\u064a\u0644<\/li>\n\n\n\n
  • \u0627\u0646\u062e\u0641\u0627\u0636 \u0639\u0627\u0626\u062f \u0627\u0644\u062a\u0635\u0646\u064a\u0639<\/li>\n<\/ul>\n\n\n\n

    \u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0630\u0627\u062a \u0627\u0644\u062c\u0647\u062f \u0627\u0644\u0639\u0627\u0644\u064a \u0648\u0627\u0644\u0637\u0627\u0642\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629\u060c \u0623\u0635\u0628\u062d\u062a \u0643\u062b\u0627\u0641\u0629 \u0627\u0644\u0639\u064a\u0648\u0628 \u0623\u062d\u062f \u0623\u0647\u0645 \u0627\u0644\u0645\u0639\u0627\u064a\u064a\u0631 \u0641\u064a \u062a\u0623\u0647\u064a\u0644 \u0631\u0643\u064a\u0632\u0629 SiC.<\/p>\n\n\n\n

    \u0627\u0644\u0639\u064a\u0648\u0628 \u0627\u0644\u0634\u0627\u0626\u0639\u0629 \u0641\u064a \u0631\u0642\u0627\u0626\u0642 SiC<\/h2>\n\n\n\n

    1. \u0627\u0644\u0623\u0646\u0627\u0628\u064a\u0628 \u0627\u0644\u062f\u0642\u064a\u0642\u0629<\/h3>\n\n\n\n

    \u0627\u0644\u0623\u0646\u0627\u0628\u064a\u0628 \u0627\u0644\u062f\u0642\u064a\u0642\u0629 \u0647\u064a \u0639\u064a\u0648\u0628 \u0628\u0644\u0648\u0631\u064a\u0629 \u0645\u062c\u0648\u0641\u0629 \u0627\u0644\u0646\u0648\u0627\u0629 \u0645\u0631\u062a\u0628\u0637\u0629 \u0628\u0627\u0644\u062e\u0644\u0639 \u0627\u0644\u0644\u0648\u0644\u0628\u064a \u0648\u0643\u0627\u0646\u062a \u062a\u0639\u062a\u0628\u0631 \u062a\u0627\u0631\u064a\u062e\u064a\u064b\u0627 \u0623\u062d\u062f \u0623\u0634\u062f \u0627\u0644\u0639\u064a\u0648\u0628 \u0641\u064a \u0631\u0643\u0627\u0626\u0632 SiC.<\/p>\n\n\n\n

    \u0627\u0644\u062e\u0635\u0627\u0626\u0635:<\/p>\n\n\n\n

      \n
    • \u0647\u064a\u0643\u0644 \u0645\u062c\u0648\u0641 \u064a\u0634\u0628\u0647 \u0627\u0644\u0623\u0646\u0628\u0648\u0628<\/li>\n\n\n\n
    • \u064a\u062a\u0631\u0627\u0648\u062d \u0627\u0644\u0642\u0637\u0631 \u0639\u0627\u062f\u0629\u064b \u0628\u064a\u0646 0.1-10 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631<\/li>\n\n\n\n
    • \u064a\u0645\u062a\u062f \u0639\u0628\u0631 \u0627\u062a\u062c\u0627\u0647 \u0646\u0645\u0648 \u0627\u0644\u0628\u0644\u0648\u0631\u0629<\/li>\n\n\n\n
    • \u062a\u0623\u062b\u064a\u0631 \u0642\u0648\u064a \u0639\u0644\u0649 \u0623\u062f\u0627\u0621 \u0627\u0644\u062c\u0647\u0627\u0632 \u0639\u0627\u0644\u064a \u0627\u0644\u062c\u0647\u062f<\/li>\n<\/ul>\n\n\n\n

      \u064a\u0645\u0643\u0646 \u0644\u0644\u0623\u0646\u0627\u0628\u064a\u0628 \u0627\u0644\u062f\u0642\u064a\u0642\u0629 \u0623\u0646 \u062a\u0642\u0644\u0644 \u0628\u0634\u0643\u0644 \u0643\u0628\u064a\u0631 \u0645\u0646 \u062c\u0647\u062f \u0627\u0644\u0627\u0646\u0647\u064a\u0627\u0631 \u0644\u0623\u0646\u0647\u0627 \u062a\u062e\u0644\u0642 \u062a\u0631\u0643\u064a\u0632\u064b\u0627 \u0645\u0648\u0636\u0639\u064a\u064b\u0627 \u0644\u0644\u0645\u062c\u0627\u0644 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a. \u0648\u0642\u062f \u062a\u0645 \u0625\u062d\u0631\u0627\u0632 \u062a\u0642\u062f\u0645 \u0643\u0628\u064a\u0631 \u0641\u064a \u062a\u0642\u0644\u064a\u0644 \u0643\u062b\u0627\u0641\u0629 \u0627\u0644\u0623\u0646\u0627\u0628\u064a\u0628 \u0627\u0644\u062f\u0642\u064a\u0642\u0629 \u0641\u064a \u0631\u0642\u0627\u0626\u0642 SiC \u0627\u0644\u062d\u062f\u064a\u062b\u0629 \u0645\u0642\u0627\u0633 4 \u0628\u0648\u0635\u0629 \u06486 \u0628\u0648\u0635\u0629\u060c \u0639\u0644\u0649 \u0627\u0644\u0631\u063a\u0645 \u0645\u0646 \u0623\u0646 \u0627\u0644\u062a\u062d\u0643\u0645 \u0627\u0644\u0635\u0627\u0631\u0645 \u0644\u0627 \u064a\u0632\u0627\u0644 \u0636\u0631\u0648\u0631\u064a\u064b\u0627 \u0644\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629.<\/p>\n\n\n\n

      2. \u0627\u0644\u062e\u0644\u0644 \u0627\u0644\u0644\u0648\u0644\u0628\u064a \u0627\u0644\u0644\u0648\u0644\u0628\u064a (TSD)<\/h3>\n\n\n\n

      \u062a\u0646\u062a\u0634\u0631 \u0627\u0644\u0627\u0636\u0637\u0631\u0627\u0628\u0627\u062a \u0627\u0644\u0644\u0648\u0644\u0628\u064a\u0629 \u0627\u0644\u0645\u062a\u0631\u0627\u0628\u0637\u0629 \u0639\u0644\u0649 \u0637\u0648\u0644 \u0645\u062d\u0648\u0631 \u0646\u0645\u0648 \u0627\u0644\u0628\u0644\u0648\u0631\u0629 \u0648\u062a\u0631\u062a\u0628\u0637 \u0628\u0622\u0644\u064a\u0627\u062a \u0627\u0644\u0646\u0645\u0648 \u0627\u0644\u062d\u0644\u0632\u0648\u0646\u064a.<\/p>\n\n\n\n

      \u062a\u0634\u0645\u0644 \u0627\u0644\u062a\u0623\u062b\u064a\u0631\u0627\u062a \u0627\u0644\u0645\u062d\u062a\u0645\u0644\u0629 \u0645\u0627 \u064a\u0644\u064a:<\/p>\n\n\n\n

        \n
      • \u0639\u062f\u0645 \u0627\u0646\u062a\u0638\u0627\u0645 \u0627\u0644\u062a\u0634\u0643\u0644 \u0627\u0644\u0633\u0637\u062d\u064a<\/li>\n\n\n\n
      • \u062a\u0634\u0648\u064a\u0647 \u0627\u0644\u062e\u0637\u0648\u0629 \u0641\u0648\u0642 \u0627\u0644\u0644\u0645\u0639\u0627\u0646<\/li>\n\n\n\n
      • \u0639\u062f\u0645 \u0627\u0644\u0627\u0646\u062a\u0638\u0627\u0645 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a \u0627\u0644\u0645\u062d\u0644\u064a<\/li>\n<\/ul>\n\n\n\n

        \u0642\u062f \u062a\u0624\u062b\u0631 \u0647\u0630\u0647 \u0627\u0644\u0639\u064a\u0648\u0628 \u0639\u0644\u0649 \u062c\u0648\u062f\u0629 \u0627\u0644\u0646\u0645\u0648 \u0627\u0644\u0641\u0648\u0642\u064a \u0648\u062a\u0624\u062f\u064a \u0625\u0644\u0649 \u062a\u0628\u0627\u064a\u0646 \u0641\u064a \u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u062c\u0647\u0627\u0632.<\/p>\n\n\n\n

        3. \u062e\u0644\u0639 \u0627\u0644\u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0642\u0627\u0639\u062f\u064a (BPD)<\/h3>\n\n\n\n

        \u062a\u0639\u062f \u062e\u0644\u0639 \u0627\u0644\u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0642\u0627\u0639\u062f\u064a \u0645\u0646 \u0628\u064a\u0646 \u0623\u0643\u062b\u0631 \u0627\u0644\u0639\u064a\u0648\u0628 \u0627\u0644\u062a\u064a \u062a\u0645\u062a \u062f\u0631\u0627\u0633\u062a\u0647\u0627 \u0639\u0644\u0649 \u0646\u0637\u0627\u0642 \u0648\u0627\u0633\u0639 \u0641\u064a \u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627 \u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0637\u0627\u0642\u0629 \u0645\u0646 SiC.<\/p>\n\n\n\n

        \u0627\u0644\u062e\u0635\u0627\u0626\u0635:<\/p>\n\n\n\n

          \n
        • \u0645\u0648\u062c\u0648\u062f\u0629 \u062f\u0627\u062e\u0644 \u0627\u0644\u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0642\u0627\u0639\u062f\u064a \u0644\u0644\u0628\u0644\u0648\u0631\u0629<\/li>\n\n\n\n
        • \u064a\u0645\u0643\u0646 \u0623\u0646 \u064a\u062a\u062d\u0648\u0644 \u0623\u062b\u0646\u0627\u0621 \u062a\u0634\u063a\u064a\u0644 \u0627\u0644\u062c\u0647\u0627\u0632<\/li>\n\n\n\n
        • \u0625\u0634\u0643\u0627\u0644\u064a\u0629 \u062e\u0627\u0635\u0629 \u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0644\u0623\u062c\u0647\u0632\u0629 \u062b\u0646\u0627\u0626\u064a\u0629 \u0627\u0644\u0642\u0637\u0628\u064a\u0646<\/li>\n<\/ul>\n\n\n\n

          \u0648\u062a\u0631\u062a\u0628\u0637 \u062d\u0627\u0644\u0627\u062a \u0627\u0644\u062a\u062d\u0644\u0644 \u062b\u0646\u0627\u0626\u064a \u0627\u0644\u0642\u0637\u0628 \u0628\u0638\u0627\u0647\u0631\u0629 \u062a\u064f\u0639\u0631\u0641 \u0628\u0627\u0644\u062a\u062f\u0647\u0648\u0631 \u062b\u0646\u0627\u0626\u064a \u0627\u0644\u0642\u0637\u0628\u060c \u062d\u064a\u062b \u064a\u0624\u062f\u064a \u062a\u0648\u0633\u0639 \u062e\u0637\u0623 \u0627\u0644\u062a\u0631\u0627\u0635 \u062a\u062d\u062a \u062d\u0642\u0646 \u0627\u0644\u0646\u0627\u0642\u0644 \u0625\u0644\u0649 \u062a\u0642\u0644\u064a\u0644 \u0623\u062f\u0627\u0621 \u0627\u0644\u062c\u0647\u0627\u0632 \u062a\u062f\u0631\u064a\u062c\u064a\u064b\u0627.<\/p>\n\n\n\n

          \u0642\u062f \u062a\u0634\u0645\u0644 \u0627\u0644\u0639\u0648\u0627\u0642\u0628 \u0645\u0627 \u064a\u0644\u064a:<\/p>\n\n\n\n

            \n
          • \u0627\u0646\u062c\u0631\u0627\u0641 \u0627\u0644\u062c\u0647\u062f \u0627\u0644\u0623\u0645\u0627\u0645\u064a<\/li>\n\n\n\n
          • \u0627\u0646\u062e\u0641\u0627\u0636 \u0639\u0645\u0631 \u0627\u0644\u062c\u0647\u0627\u0632<\/li>\n\n\n\n
          • \u0639\u062f\u0645 \u0627\u0633\u062a\u0642\u0631\u0627\u0631 \u0627\u0644\u0623\u062f\u0627\u0621<\/li>\n<\/ul>\n\n\n\n

            4. \u0623\u0639\u0637\u0627\u0644 \u0627\u0644\u062a\u0631\u0627\u0635<\/h3>\n\n\n\n

            \u062a\u0646\u0634\u0623 \u0623\u062e\u0637\u0627\u0621 \u0627\u0644\u062a\u0631\u0627\u0635 \u0639\u0646\u062f\u0645\u0627 \u064a\u062a\u0639\u0637\u0644 \u0627\u0644\u062a\u0633\u0644\u0633\u0644 \u0627\u0644\u0637\u0628\u064a\u0639\u064a \u0644\u062a\u0631\u0627\u0635 \u0627\u0644\u0637\u0628\u0642\u0627\u062a \u0627\u0644\u0630\u0631\u064a\u0629.<\/p>\n\n\n\n

            \u0641\u064a \u0645\u0648\u0627\u062f SiC\u060c \u0642\u062f \u062a\u0643\u0648\u0646 \u0639\u064a\u0648\u0628 \u0627\u0644\u062a\u0631\u0627\u0635:<\/p>\n\n\n\n

              \n
            • \u062a\u063a\u064a\u064a\u0631 \u0627\u0644\u0628\u0646\u0649 \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0629 \u0627\u0644\u0645\u062d\u0644\u064a\u0629<\/li>\n\n\n\n
            • \u062a\u0623\u062b\u064a\u0631 \u0627\u0644\u0646\u0642\u0644 \u0627\u0644\u0646\u0627\u0642\u0644 \u0627\u0644\u0645\u0624\u062b\u0631<\/li>\n\n\n\n
            • \u062a\u062f\u0647\u0648\u0631 \u0627\u0644\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0628\u0635\u0631\u064a\u0629 \u0623\u0648 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629<\/li>\n<\/ul>\n\n\n\n

              \u064a\u0645\u0643\u0646 \u0623\u0646 \u062a\u062a\u0648\u0633\u0639 \u0628\u0639\u0636 \u0623\u0639\u0637\u0627\u0644 \u0627\u0644\u062a\u0631\u0627\u0635 \u062a\u062d\u062a \u0627\u0644\u0636\u063a\u0637 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u060c \u0645\u0645\u0627 \u064a\u062c\u0639\u0644\u0647\u0627 \u0645\u0647\u0645\u0629 \u0628\u0634\u0643\u0644 \u062e\u0627\u0635 \u0644\u062f\u0631\u0627\u0633\u0627\u062a \u0627\u0644\u0645\u0648\u062b\u0648\u0642\u064a\u0629 \u0637\u0648\u064a\u0644\u0629 \u0627\u0644\u0623\u062c\u0644.<\/p>\n\n\n\n

              5. \u0627\u0644\u062e\u062f\u0648\u0634 \u0627\u0644\u0633\u0637\u062d\u064a\u0629<\/h3>\n\n\n\n

              \u064a\u0645\u0643\u0646 \u0623\u0646 \u062a\u0624\u062f\u064a \u062e\u0637\u0648\u0627\u062a \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a\u0629 \u0645\u062b\u0644 \u0627\u0644\u0637\u062d\u0646\u060c \u0648\u0627\u0644\u0635\u0642\u0644 \u0648\u0627\u0644\u0635\u0642\u0644 \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a (CMP)\u060c \u0648\u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0625\u0644\u0649 \u062d\u062f\u0648\u062b \u062e\u062f\u0648\u0634.<\/p>\n\n\n\n

              \u0627\u0644\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0646\u0645\u0648\u0630\u062c\u064a\u0629:<\/p>\n\n\n\n

                \n
              • \u0639\u0644\u0627\u0645\u0627\u062a \u0627\u0644\u0633\u0637\u062d \u0627\u0644\u062e\u0637\u064a\u0629<\/li>\n\n\n\n
              • \u062a\u0628\u0627\u064a\u0646 \u0627\u0644\u062e\u0634\u0648\u0646\u0629 \u0627\u0644\u0645\u062d\u0644\u064a\u0629<\/li>\n\n\n\n
              • \u0627\u062e\u062a\u0644\u0627\u0641\u0627\u062a \u0627\u0644\u0627\u0646\u0639\u0643\u0627\u0633\u064a\u0629 \u0627\u0644\u0633\u0637\u062d\u064a\u0629<\/li>\n<\/ul>\n\n\n\n

                \u062d\u062a\u0649 \u0627\u0644\u062e\u062f\u0648\u0634 \u0627\u0644\u0633\u0637\u062d\u064a\u0629 \u064a\u0645\u0643\u0646 \u0623\u0646 \u062a\u062a\u062f\u0627\u062e\u0644 \u0645\u0639 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u0644\u064a\u062b\u0648\u063a\u0631\u0627\u0641\u064a\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629 \u0648\u0627\u0644\u062a\u0648\u062d\u064a\u062f \u0627\u0644\u0641\u0648\u0642\u064a.<\/p>\n\n\n\n

                6. \u0627\u0644\u062a\u0644\u0648\u062b \u0628\u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a<\/h3>\n\n\n\n

                \u0642\u062f \u062a\u0646\u0634\u0623 \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a \u0645\u0646:<\/p>\n\n\n\n

                  \n
                • \u0628\u0642\u0627\u064a\u0627 \u0627\u0644\u062a\u0644\u0645\u064a\u0639<\/li>\n\n\n\n
                • \u0627\u0644\u062a\u0644\u0648\u062b \u0627\u0644\u0628\u064a\u0626\u064a<\/li>\n\n\n\n
                • \u062a\u0622\u0643\u0644 \u0627\u0644\u0645\u0639\u062f\u0627\u062a<\/li>\n\n\n\n
                • \u0639\u0645\u0644\u064a\u0627\u062a \u0646\u0642\u0644 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a<\/li>\n<\/ul>\n\n\n\n

                  \u0642\u062f \u062a\u0633\u0628\u0628 \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a \u0627\u0644\u0633\u0637\u062d\u064a\u0629:<\/p>\n\n\n\n

                    \n
                  • \u0639\u064a\u0648\u0628 \u0627\u0644\u0646\u0645\u0630\u062c\u0629<\/li>\n\n\n\n
                  • \u0627\u0644\u062a\u0634\u0648\u0647\u0627\u062a \u0627\u0644\u0638\u0647\u0627\u0631\u064a\u0629<\/li>\n\n\n\n
                  • \u062a\u062e\u0641\u064a\u0636 \u0627\u0644\u0639\u0627\u0626\u062f<\/li>\n<\/ul>\n\n\n\n

                    \u0648\u0628\u0633\u0628\u0628 \u0647\u0630\u0647 \u0627\u0644\u0645\u062e\u0627\u0637\u0631\u060c \u064a\u062a\u0637\u0644\u0628 \u0625\u0646\u062a\u0627\u062c \u0631\u0642\u0627\u0642\u0627\u062a SiC \u062a\u062d\u0643\u0645\u064b\u0627 \u0635\u0627\u0631\u0645\u064b\u0627 \u0641\u064a \u063a\u0631\u0641 \u0627\u0644\u062a\u0646\u0638\u064a\u0641.<\/p>\n\n\n\n

                    7. \u062a\u0642\u0637\u064a\u0639 \u0627\u0644\u062d\u0648\u0627\u0641 \u0648\u0627\u0644\u062a\u0634\u0642\u0642\u0627\u062a \u0627\u0644\u062f\u0642\u064a\u0642\u0629<\/h3>\n\n\n\n

                    \u0623\u062b\u0646\u0627\u0621 \u062a\u0642\u0637\u064a\u0639 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0623\u0648 \u0637\u062d\u0646 \u0627\u0644\u062d\u0627\u0641\u0629\u060c \u0642\u062f \u064a\u0624\u062f\u064a \u0627\u0644\u0625\u062c\u0647\u0627\u062f \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a \u0625\u0644\u0649 \u062a\u0644\u0641 \u0627\u0644\u062d\u0627\u0641\u0629.<\/p>\n\n\n\n

                    \u0648\u062a\u0634\u0645\u0644 \u0627\u0644\u0623\u0645\u062b\u0644\u0629 \u0639\u0644\u0649 \u0630\u0644\u0643:<\/p>\n\n\n\n

                      \n
                    • \u0643\u0633\u0648\u0631 \u0627\u0644\u062d\u0648\u0627\u0641<\/li>\n\n\n\n
                    • \u0627\u0644\u0631\u0642\u0627\u0626\u0642 \u0627\u0644\u0635\u063a\u064a\u0631\u0629<\/li>\n\n\n\n
                    • \u062a\u0643\u0648\u064a\u0646 \u0627\u0644\u0634\u0642\u0648\u0642 \u0627\u0644\u062f\u0642\u064a\u0642\u0629<\/li>\n<\/ul>\n\n\n\n

                      \u064a\u0645\u0643\u0646 \u0623\u0646 \u062a\u0642\u0644\u0644 \u0647\u0630\u0647 \u0627\u0644\u0639\u064a\u0648\u0628 \u0645\u0646 \u0627\u0644\u0642\u0648\u0629 \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a\u0629 \u0648\u062a\u0632\u064a\u062f \u0645\u0646 \u0645\u062e\u0627\u0637\u0631 \u0643\u0633\u0631 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0623\u062b\u0646\u0627\u0621 \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0622\u0644\u064a\u0629.<\/p>\n\n\n\n

                      \u0637\u0631\u0642 \u0641\u062d\u0635 \u0639\u064a\u0648\u0628 \u0631\u0642\u0627\u0642\u0629 SiC \u0627\u0644\u0631\u0642\u0627\u0642\u0629<\/h2>\n\n\n\n

                      \u0646\u0638\u0631\u064b\u0627 \u0644\u0623\u0646 \u0623\u0646\u0648\u0627\u0639 \u0627\u0644\u0639\u064a\u0648\u0628 \u0627\u0644\u0645\u062e\u062a\u0644\u0641\u0629 \u062a\u064f\u0638\u0647\u0631 \u062e\u0635\u0627\u0626\u0635 \u0641\u064a\u0632\u064a\u0627\u0626\u064a\u0629 \u0645\u062e\u062a\u0644\u0641\u0629\u060c \u063a\u0627\u0644\u0628\u064b\u0627 \u0645\u0627 \u064a\u062a\u0645 \u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u062a\u0642\u0646\u064a\u0627\u062a \u062a\u0648\u0635\u064a\u0641 \u0645\u062a\u0639\u062f\u062f\u0629 \u0645\u0639\u064b\u0627.<\/p>\n\n\n\n

                      \u0637\u0631\u064a\u0642\u0629 \u0627\u0644\u0641\u062d\u0635<\/th>\u0627\u0644\u0648\u0638\u064a\u0641\u0629 \u0627\u0644\u0623\u0633\u0627\u0633\u064a\u0629<\/th>\u0627\u0644\u0639\u064a\u0648\u0628 \u0627\u0644\u0646\u0645\u0648\u0630\u062c\u064a\u0629 \u0627\u0644\u062a\u064a \u064a\u0645\u0643\u0646 \u0627\u0643\u062a\u0634\u0627\u0641\u0647\u0627<\/th><\/tr><\/thead>
                      \u0627\u0644\u0641\u062d\u0635 \u0627\u0644\u0645\u062c\u0647\u0631\u064a \u0627\u0644\u0628\u0635\u0631\u064a<\/td>\u0645\u0631\u0627\u0642\u0628\u0629 \u0627\u0644\u0633\u0637\u062d<\/td>\u0627\u0644\u062e\u062f\u0648\u0634\u060c \u0648\u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a\u060c \u0648\u0639\u064a\u0648\u0628 \u0627\u0644\u062d\u0648\u0627\u0641<\/td><\/tr>
                      \u0645\u062c\u0647\u0631 \u0627\u0644\u0642\u0648\u0629 \u0627\u0644\u0630\u0631\u064a\u0629 (AFM)<\/td>\u0637\u0628\u0648\u063a\u0631\u0627\u0641\u064a\u0627 \u0628\u0645\u0642\u064a\u0627\u0633 \u0627\u0644\u0646\u0627\u0646\u0648\u0645\u062a\u0631<\/td>\u062e\u0634\u0648\u0646\u0629 \u0627\u0644\u0633\u0637\u062d<\/td><\/tr>
                      \u062d\u064a\u0648\u062f \u0627\u0644\u0623\u0634\u0639\u0629 \u0627\u0644\u0633\u064a\u0646\u064a\u0629 (XRD)<\/td>\u062a\u062d\u0644\u064a\u0644 \u0627\u0644\u062a\u0631\u0643\u064a\u0628 \u0627\u0644\u0628\u0644\u0648\u0631\u064a<\/td>\u062a\u0634\u0648\u064a\u0647 \u0634\u0628\u0643\u064a<\/td><\/tr>
                      \u0646\u0642\u0634 KOH<\/td>\u0627\u0644\u0643\u0634\u0641 \u0639\u0646 \u0645\u0648\u0627\u0642\u0639 \u0627\u0644\u062e\u0644\u0639<\/td>BPD\u060c TSD<\/td><\/tr>
                      \u0631\u0633\u0645 \u062e\u0631\u0627\u0626\u0637 \u0627\u0644\u062a\u0644\u0623\u0644\u0624 \u0627\u0644\u0636\u0648\u0626\u064a (PL)<\/td>\u062a\u0635\u0648\u064a\u0631 \u0627\u0644\u0639\u064a\u0648\u0628<\/td>\u0627\u0644\u0627\u0636\u0637\u0631\u0627\u0628\u0627\u062a\u060c \u0627\u0644\u0623\u0646\u0627\u0628\u064a\u0628 \u0627\u0644\u062f\u0642\u064a\u0642\u0629<\/td><\/tr>
                      \u0637\u0648\u0628\u0648\u063a\u0631\u0627\u0641\u064a\u0627 \u0627\u0644\u0623\u0634\u0639\u0629 \u0627\u0644\u0633\u064a\u0646\u064a\u0629 (XRT)<\/td>\u0641\u062d\u0635 \u0627\u0644\u0643\u0631\u064a\u0633\u062a\u0627\u0644 \u0627\u0644\u062f\u0627\u062e\u0644\u064a<\/td>\u0627\u0644\u0623\u0646\u0627\u0628\u064a\u0628 \u0627\u0644\u062f\u0642\u064a\u0642\u0629\u060c \u0648\u0623\u062e\u0637\u0627\u0621 \u0627\u0644\u062a\u0631\u0627\u0635<\/td><\/tr>
                      \u062a\u062d\u0644\u064a\u0644 \u0637\u064a\u0641 \u0631\u0627\u0645\u0627\u0646 \u0627\u0644\u0637\u064a\u0641\u064a<\/td>\u062a\u0642\u064a\u064a\u0645 \u0627\u0644\u0625\u062c\u0647\u0627\u062f \u0648\u0627\u0644\u0634\u0628\u0643\u064a\u0629<\/td>\u0627\u0644\u062a\u0634\u0648\u0647\u0627\u062a \u0627\u0644\u0647\u064a\u0643\u0644\u064a\u0629<\/td><\/tr>
                      \u0627\u0644\u0641\u062d\u0635 \u0627\u0644\u0628\u0635\u0631\u064a \u0627\u0644\u0622\u0644\u064a (AOI)<\/td>\u0627\u0644\u0641\u062d\u0635 \u0627\u0644\u0633\u0637\u062d\u064a \u0648\u0627\u0633\u0639 \u0627\u0644\u0646\u0637\u0627\u0642<\/td>\u0639\u064a\u0648\u0628 \u0627\u0644\u0633\u0637\u062d<\/td><\/tr>
                      \u0641\u062d\u0635 \u0627\u0644\u062a\u0634\u062a\u062a \u0628\u0627\u0644\u0644\u064a\u0632\u0631<\/td>\u0627\u0644\u0643\u0634\u0641 \u0639\u0646 \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a<\/td>\u062a\u0644\u0648\u062b \u0627\u0644\u0633\u0637\u062d<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

                      \u0648\u0645\u0646 \u0628\u064a\u0646 \u0647\u0630\u0647 \u0627\u0644\u062a\u0642\u0646\u064a\u0627\u062a\u060c \u0623\u0635\u0628\u062d \u0631\u0633\u0645 \u062e\u0631\u0627\u0626\u0637 \u0628\u064a \u0625\u0644 \u0648\u0637\u0628\u0648\u063a\u0631\u0627\u0641\u064a\u0627 \u0627\u0644\u0623\u0634\u0639\u0629 \u0627\u0644\u0633\u064a\u0646\u064a\u0629 \u0645\u0646 \u0627\u0644\u0623\u0633\u0627\u0644\u064a\u0628 \u0627\u0644\u0642\u064a\u0627\u0633\u064a\u0629 \u0641\u064a \u0627\u0644\u0635\u0646\u0627\u0639\u0629 \u0644\u062a\u0642\u064a\u064a\u0645 \u0627\u0644\u0639\u064a\u0648\u0628 \u0641\u064a \u0645\u0646\u0627\u0637\u0642 \u0648\u0627\u0633\u0639\u0629.<\/p>\n\n\n\n

                      \u0633\u064a\u0631 \u0627\u0644\u0639\u0645\u0644 \u0627\u0644\u0646\u0645\u0648\u0630\u062c\u064a \u0644\u0641\u062d\u0635 \u0631\u0642\u0627\u0642\u0629 SiC \u0627\u0644\u0646\u0645\u0648\u0630\u062c\u064a\u0629<\/h2>\n\n\n\n

                      \u0639\u0627\u062f\u0629\u064b \u0645\u0627 \u062a\u062a\u0636\u0645\u0646 \u0639\u0645\u0644\u064a\u0629 \u0645\u0631\u0627\u0642\u0628\u0629 \u062c\u0648\u062f\u0629 SiC \u0627\u0644\u0634\u0627\u0645\u0644\u0629 \u0639\u062f\u0629 \u0645\u0631\u0627\u062d\u0644 \u0641\u062d\u0635:<\/p>\n\n\n\n

                      \u0641\u062d\u0635 \u0627\u0644\u0631\u0643\u064a\u0632\u0629 \u0627\u0644\u0648\u0627\u0631\u062f\u0629 \u2190 \u062a\u0648\u0635\u064a\u0641 \u0627\u0644\u0633\u0637\u062d \u2190 \u062a\u0648\u0635\u064a\u0641 \u0627\u0644\u0633\u0637\u062d \u2190 \u062a\u062d\u0644\u064a\u0644 \u062c\u0648\u062f\u0629 \u0627\u0644\u0628\u0644\u0648\u0631\u0627\u062a \u2190 \u062a\u062d\u0644\u064a\u0644 \u0627\u0644\u0639\u064a\u0648\u0628 \u2190 \u062a\u062d\u0644\u064a\u0644 \u062c\u0648\u062f\u0629 \u0627\u0644\u0628\u0644\u0648\u0631\u0627\u062a \u2190 \u062a\u0623\u0647\u064a\u0644 \u0627\u0644\u0628\u062b\u0642 \u2190 \u0627\u0644\u0641\u062d\u0635 \u0627\u0644\u0646\u0647\u0627\u0626\u064a<\/p>\n\n\n\n

                      \u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629\u060c \u0642\u062f \u062a\u0634\u0645\u0644 \u0627\u0644\u062a\u0642\u064a\u064a\u0645\u0627\u062a \u0627\u0644\u0625\u0636\u0627\u0641\u064a\u0629 \u0645\u0627 \u064a\u0644\u064a:<\/p>\n\n\n\n

                        \n
                      • \u062a\u062e\u0637\u064a\u0637 PL \u0631\u0642\u0627\u0642\u0629 \u0643\u0627\u0645\u0644\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0629<\/li>\n\n\n\n
                      • \u0625\u062d\u0635\u0627\u0626\u064a\u0627\u062a \u0643\u062b\u0627\u0641\u0629 \u0627\u0644\u0639\u064a\u0648\u0628<\/li>\n\n\n\n
                      • \u062a\u062d\u0644\u064a\u0644 \u0627\u0644\u0627\u062a\u062c\u0627\u0647 \u0627\u0644\u0628\u0644\u0648\u0631\u064a<\/li>\n\n\n\n
                      • \u0627\u0644\u062a\u0635\u0646\u064a\u0641 \u0627\u0644\u0622\u0644\u064a \u0644\u0644\u0639\u064a\u0648\u0628<\/li>\n<\/ul>\n\n\n\n

                        \u062a\u0633\u0627\u0639\u062f \u0647\u0630\u0647 \u0627\u0644\u062e\u0637\u0648\u0627\u062a \u0639\u0644\u0649 \u062a\u062d\u0633\u064a\u0646 \u0627\u062a\u0633\u0627\u0642 \u0627\u0644\u0639\u0645\u0644\u064a\u0629 \u0648\u062a\u062d\u0633\u064a\u0646 \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0646\u0647\u0627\u0626\u064a.<\/p>\n\n\n\n

                        \u0627\u0644\u0627\u062a\u062c\u0627\u0647\u0627\u062a \u0627\u0644\u0646\u0627\u0634\u0626\u0629: \u062a\u062d\u0644\u064a\u0644 \u0627\u0644\u0639\u064a\u0648\u0628 \u0627\u0644\u0642\u0627\u0626\u0645 \u0639\u0644\u0649 \u0627\u0644\u0630\u0643\u0627\u0621 \u0627\u0644\u0627\u0635\u0637\u0646\u0627\u0639\u064a<\/h2>\n\n\n\n

                        \u0645\u0639 \u062a\u062d\u0631\u0643 \u062a\u0642\u0646\u064a\u0629 SiC \u0646\u062d\u0648 \u0623\u0642\u0637\u0627\u0631 \u0631\u0642\u0627\u0642\u0627\u062a \u0623\u0643\u0628\u0631 \u0645\u062b\u0644 \u0627\u0644\u0631\u0643\u0627\u0626\u0632 \u0645\u0642\u0627\u0633 8 \u0628\u0648\u0635\u0627\u062a\u060c \u062a\u0648\u0627\u062c\u0647 \u0623\u0633\u0627\u0644\u064a\u0628 \u0627\u0644\u0641\u062d\u0635 \u0627\u0644\u062a\u0642\u0644\u064a\u062f\u064a\u0629 \u0642\u064a\u0648\u062f\u064b\u0627 \u0641\u064a \u0627\u0644\u0625\u0646\u062a\u0627\u062c\u064a\u0629 \u0648\u0627\u0644\u062a\u0639\u0642\u064a\u062f.<\/p>\n\n\n\n

                        \u062a\u062a\u0643\u0627\u0645\u0644 \u0627\u0644\u062a\u0637\u0648\u0631\u0627\u062a \u0627\u0644\u0623\u062e\u064a\u0631\u0629 \u0628\u0634\u0643\u0644 \u0645\u062a\u0632\u0627\u064a\u062f:<\/p>\n\n\n\n

                          \n
                        • \u0627\u0644\u062a\u0639\u0631\u0641 \u0639\u0644\u0649 \u0627\u0644\u0635\u0648\u0631 \u0628\u0627\u0644\u0630\u0643\u0627\u0621 \u0627\u0644\u0627\u0635\u0637\u0646\u0627\u0639\u064a<\/li>\n\n\n\n
                        • \u062a\u0635\u0646\u064a\u0641 \u0639\u064a\u0648\u0628 \u0627\u0644\u062a\u0639\u0644\u0645 \u0627\u0644\u0622\u0644\u064a<\/li>\n\n\n\n
                        • \u0627\u0644\u062a\u0646\u0628\u0624 \u0627\u0644\u0622\u0644\u064a \u0628\u0627\u0644\u0639\u064a\u0648\u0628<\/li>\n\n\n\n
                        • \u0623\u0646\u0638\u0645\u0629 \u0631\u0628\u0637 \u0627\u0644\u0628\u064a\u0627\u0646\u0627\u062a \u0643\u0627\u0645\u0644\u0629 \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629<\/li>\n<\/ul>\n\n\n\n

                          \u0645\u0646 \u0627\u0644\u0645\u062a\u0648\u0642\u0639 \u0623\u0646 \u062a\u062a\u0637\u0648\u0631 \u0627\u0633\u062a\u0631\u0627\u062a\u064a\u062c\u064a\u0627\u062a \u0627\u0644\u0641\u062d\u0635 \u0627\u0644\u0645\u0633\u062a\u0642\u0628\u0644\u064a\u0629 \u0645\u0646 \u0627\u0643\u062a\u0634\u0627\u0641 \u0627\u0644\u0639\u064a\u0648\u0628 \u0625\u0644\u0649 \u0645\u0631\u0627\u0642\u0628\u0629 \u0627\u0644\u062c\u0648\u062f\u0629 \u0627\u0644\u062a\u0646\u0628\u0624\u064a\u0629.<\/p>\n\n\n\n

                          \u0627\u0644\u062e\u0627\u062a\u0645\u0629<\/h2>\n\n\n\n

                          \u064a\u0638\u0644 \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u0639\u064a\u0648\u0628 \u0623\u062d\u062f \u0627\u0644\u062a\u062d\u062f\u064a\u0627\u062a \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629 \u0641\u064a \u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627 \u0631\u0642\u0627\u0642\u0629 SiC. \u0648\u062a\u0624\u062b\u0631 \u0627\u0644\u0639\u064a\u0648\u0628 \u0627\u0644\u0647\u064a\u0643\u0644\u064a\u0629 \u0645\u062b\u0644 \u0627\u0644\u0623\u0646\u0627\u0628\u064a\u0628 \u0627\u0644\u062f\u0642\u064a\u0642\u0629 \u0648\u0627\u0644\u062e\u0644\u0639 \u0627\u0644\u0645\u062a\u0631\u0627\u0628\u0637 \u0648\u062e\u0644\u0639 \u0627\u0644\u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0642\u0627\u0639\u062f\u064a \u0648\u0639\u064a\u0648\u0628 \u0627\u0644\u062a\u0631\u0627\u0635\u060c \u0625\u0644\u0649 \u062c\u0627\u0646\u0628 \u0639\u064a\u0648\u0628 \u0627\u0644\u0633\u0637\u062d \u0648\u0627\u0644\u062a\u0644\u0648\u062b\u060c \u0628\u0634\u0643\u0644 \u0643\u0628\u064a\u0631 \u0639\u0644\u0649 \u0623\u062f\u0627\u0621 \u0623\u062c\u0647\u0632\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a.<\/p>\n\n\n\n

                          \u0645\u0646 \u062e\u0644\u0627\u0644 \u062a\u0642\u0646\u064a\u0627\u062a \u0627\u0644\u062a\u0648\u0635\u064a\u0641 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u0645\u062b\u0644 \u0631\u0633\u0645 \u062e\u0631\u0627\u0626\u0637 PL\u060c \u0648\u0637\u0648\u0628\u0648\u063a\u0631\u0627\u0641\u064a\u0627 \u0627\u0644\u0623\u0634\u0639\u0629 \u0627\u0644\u0633\u064a\u0646\u064a\u0629\u060c \u0648\u0646\u0642\u0634 KOH\u060c \u0648\u0627\u0644\u0641\u062d\u0635 \u0627\u0644\u0628\u0635\u0631\u064a \u0627\u0644\u0622\u0644\u064a\u060c \u064a\u0645\u0643\u0646 \u0644\u0644\u0645\u0635\u0646\u0639\u064a\u0646 \u062a\u0642\u064a\u064a\u0645 \u062c\u0648\u062f\u0629 \u0627\u0644\u0631\u0643\u064a\u0632\u0629 \u0628\u0634\u0643\u0644 \u0623\u0641\u0636\u0644 \u0648\u062a\u062d\u0633\u064a\u0646 \u0625\u0646\u062a\u0627\u062c\u064a\u0629 \u0627\u0644\u062c\u0647\u0627\u0632. \u0645\u0639 \u0627\u0633\u062a\u0645\u0631\u0627\u0631 \u062a\u0648\u0633\u0639 SiC \u0641\u064a \u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0637\u0627\u0642\u0629 \u0648\u0627\u0644\u0645\u0648\u062b\u0648\u0642\u064a\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629\u060c \u0633\u062a\u0644\u0639\u0628 \u062a\u0642\u0646\u064a\u0627\u062a \u0627\u0644\u0641\u062d\u0635 \u0627\u0644\u0623\u0643\u062b\u0631 \u0630\u0643\u0627\u0621\u064b \u0648\u062f\u0642\u0629 \u062f\u0648\u0631\u064b\u0627 \u0645\u062a\u0632\u0627\u064a\u062f \u0627\u0644\u0623\u0647\u0645\u064a\u0629 \u0641\u064a \u0635\u0646\u0627\u0639\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a.<\/p>","protected":false},"excerpt":{"rendered":"

                          As the demand for high-efficiency power electronics continues to grow, Silicon Carbide (SiC) wafers have become a foundational material for next-generation semiconductor devices. Compared with conventional silicon substrates, SiC offers a wider bandgap, higher critical electric field strength, superior thermal conductivity, and better high-temperature performance. These characteristics make SiC indispensable in electric vehicles, renewable energy […]<\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_uag_custom_page_level_css":"","footnotes":""},"categories":[12,27],"tags":[1663],"class_list":["post-8884","post","type-post","status-publish","format-standard","hentry","category-news","category-companynews","tag-sic-wafers"],"acf":[],"uagb_featured_image_src":{"full":false,"thumbnail":false,"medium":false,"medium_large":false,"large":false,"1536x1536":false,"2048x2048":false,"trp-custom-language-flag":false,"woocommerce_thumbnail":false,"woocommerce_single":false,"woocommerce_gallery_thumbnail":false},"uagb_author_info":{"display_name":"lydia","author_link":"https:\/\/www.sic-wafers.com\/ar\/author\/lydia\/"},"uagb_comment_info":3,"uagb_excerpt":"As the demand for high-efficiency power electronics continues to grow, Silicon Carbide (SiC) wafers have become a foundational material for next-generation semiconductor devices. Compared with conventional silicon substrates, SiC offers a wider bandgap, higher critical electric field strength, superior thermal conductivity, and better high-temperature performance. These characteristics make SiC indispensable in electric vehicles, renewable energy…","_links":{"self":[{"href":"https:\/\/www.sic-wafers.com\/ar\/wp-json\/wp\/v2\/posts\/8884","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sic-wafers.com\/ar\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sic-wafers.com\/ar\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ar\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ar\/wp-json\/wp\/v2\/comments?post=8884"}],"version-history":[{"count":1,"href":"https:\/\/www.sic-wafers.com\/ar\/wp-json\/wp\/v2\/posts\/8884\/revisions"}],"predecessor-version":[{"id":8886,"href":"https:\/\/www.sic-wafers.com\/ar\/wp-json\/wp\/v2\/posts\/8884\/revisions\/8886"}],"wp:attachment":[{"href":"https:\/\/www.sic-wafers.com\/ar\/wp-json\/wp\/v2\/media?parent=8884"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ar\/wp-json\/wp\/v2\/categories?post=8884"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ar\/wp-json\/wp\/v2\/tags?post=8884"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}