{"id":8762,"date":"2026-03-20T16:01:07","date_gmt":"2026-03-20T08:01:07","guid":{"rendered":"https:\/\/www.sic-wafers.com\/?p=8762"},"modified":"2026-03-20T16:05:52","modified_gmt":"2026-03-20T08:05:52","slug":"%e7%82%ad%e5%8c%96%e3%82%b1%e3%82%a4%e7%b4%a0%e3%82%a6%e3%82%a7%e3%83%8f%e3%83%bc%e3%81%ae%e6%96%b0%e8%a6%8fhf%e3%83%95%e3%83%aa%e3%83%bc%e6%b4%97%e6%b5%84%e6%b3%95%e3%81%ae%e3%83%a1%e3%82%ab%e3%83%8b","status":"publish","type":"post","link":"https:\/\/www.sic-wafers.com\/ja\/a-novel-hf-free-cleaning-method-for-silicon-carbide-wafers-mechanism-and-performance-evaluation\/","title":{"rendered":"\u70ad\u5316\u30b1\u30a4\u7d20\u30a6\u30a7\u30cf\u30fc\u306e\u65b0\u3057\u3044HF\u30d5\u30ea\u30fc\u6d17\u6d44\u6cd5\uff1a\u305d\u306e\u30e1\u30ab\u30cb\u30ba\u30e0\u3068\u6027\u80fd\u8a55\u4fa1"},"content":{"rendered":"<div style=\"margin-top: 0px; margin-bottom: 0px;\" class=\"sharethis-inline-share-buttons\" ><\/div>\n<p>\u30d1\u30ef\u30fc\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u306e\u6025\u901f\u306a\u767a\u5c55\u3068\u3068\u3082\u306b\u3001, <strong>\u70ad\u5316\u30b1\u30a4\u7d20<\/strong> SiC\u306f\u3001\u305d\u306e\u5e83\u3044\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u3001\u9ad8\u3044\u71b1\u4f1d\u5c0e\u6027\u3001\u512a\u308c\u305f\u96fb\u6c17\u7684\u6027\u80fd\u306b\u3088\u308a\u3001\u6b21\u4e16\u4ee3\u30c7\u30d0\u30a4\u30b9\u306e\u6709\u671b\u306a\u6750\u6599\u3068\u3057\u3066\u6d6e\u4e0a\u3057\u3066\u3044\u308b\u3002\u5f93\u6765\u306e\u30b7\u30ea\u30b3\u30f3\u3068\u6bd4\u8f03\u3057\u3066\u3001SiC\u306f\u3088\u308a\u9ad8\u3044\u8010\u96fb\u5727\u6027\u3001\u3088\u308a\u4f4e\u3044\u30b9\u30a4\u30c3\u30c1\u30f3\u30b0\u640d\u5931\u3001\u3088\u308a\u512a\u308c\u305f\u9ad8\u6e29\u5b89\u5b9a\u6027\u3092\u6301\u3064\u30c7\u30d0\u30a4\u30b9\u3092\u53ef\u80fd\u306b\u3059\u308b\u3002.<\/p>\n\n\n\n<p>\u3057\u304b\u3057<a href=\"https:\/\/www.sic-wafers.com\/ja\/product-category\/%e3%82%b7%e3%83%83%e3%82%af%e3%82%a6%e3%82%a7%e3%83%8f%e3%83%bc\/\"> SiC\u30a6\u30a7\u30cf\u30fc<\/a> \u306f\u4f9d\u7136\u3068\u3057\u3066\u91cd\u8981\u306a\u8ab2\u984c\u3067\u3042\u308b\u3002\u5e83\u304f\u4f7f\u308f\u308c\u3066\u3044\u308bRCA\u6d17\u6d44\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u3082\u3068\u3082\u3068\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u7528\u306b\u958b\u767a\u3055\u308c\u305f\u3082\u306e\u3060\u304c\u3001\u8868\u9762\u5316\u5b66\u3084\u7d50\u5408\u69cb\u9020\u304c\u6839\u672c\u7684\u306b\u7570\u306a\u308b\u305f\u3081\u3001SiC\u306b\u306f\u76f4\u63a5\u9069\u7528\u3067\u304d\u306a\u3044\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/p>\n\n\n\n<p>\u672c\u7814\u7a76\u3067\u306f\u3001SiC\u306eRCA\u6d17\u6d44\u306e\u9650\u754c\u3092\u8abf\u67fb\u3057\u3001\u9077\u79fb\u91d1\u5c5e\u932f\u4f53\u6d3b\u6027\u5316\u904e\u9178\u5316\u6c34\u7d20\u306b\u57fa\u3065\u304f\u65b0\u3057\u3044HF\u30d5\u30ea\u30fc\u6d17\u6d44\u6cd5\u3092\u7d39\u4ecb\u3059\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>SiC\u306eRCA\u6d17\u6d44\u306e\u9650\u754c<\/strong><\/h2>\n\n\n\n<p>RCA\u6d17\u6d44\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u901a\u5e38\u3001\u30d5\u30c3\u5316\u6c34\u7d20\u9178\uff08HF\uff09\u3092\u4f7f\u7528\u3057\u3066\u30b7\u30ea\u30b3\u30f3\u8868\u9762\u306e\u30cd\u30a4\u30c6\u30a3\u30d6\u306a\u9178\u5316\u7269\u3084\u6c5a\u67d3\u7269\u8cea\u3092\u9664\u53bb\u3059\u308b\u3002\u3057\u304b\u3057\u3001SiC\u306b\u9069\u7528\u3059\u308b\u5834\u5408\u306f\u3001HF\u3092\u4f7f\u7528\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>X\u7dda\u5149\u96fb\u5b50\u5206\u5149\uff08XPS\uff09\u5206\u6790\u306b\u3088\u308a\u3001\u30d5\u30c3\u7d20\u304cSiC\u4e2d\u306e\u70ad\u7d20\u539f\u5b50\u3068\u53cd\u5fdc\u3057\u3001\u671b\u307e\u3057\u304f\u306a\u3044\u5316\u5b66\u7d50\u5408\u3092\u5f62\u6210\u3059\u308b\u3053\u3068\u304c\u660e\u3089\u304b\u306b\u306a\u3063\u305f\u3002.<\/li>\n\n\n\n<li>\u3055\u3089\u306b\u8a08\u7b97\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u306b\u3088\u308c\u3070\u3001\u3053\u306e\u3088\u3046\u306a\u76f8\u4e92\u4f5c\u7528\u306fSiC\u306e\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u3092\u72ed\u3081\u3001\u305d\u306e\u96fb\u5b50\u7279\u6027\u3092\u52a3\u5316\u3055\u305b\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u308c\u3089\u306e\u77e5\u898b\u306f\u3001\u9ad8\u5468\u6ce2\u3092\u30d9\u30fc\u30b9\u3068\u3057\u305f\u51e6\u7406\u304cSiC\u306e\u672c\u8cea\u7684\u306a\u7279\u6027\u306b\u30c0\u30e1\u30fc\u30b8\u3092\u4e0e\u3048\u3001\u5f93\u6765\u306eRCA\u6d17\u6d44\u3092\u9ad8\u6027\u80fd\u7528\u9014\u306b\u306f\u9069\u3055\u306a\u3044\u3082\u306e\u306b\u3057\u3066\u3044\u308b\u3053\u3068\u3092\u793a\u5506\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-large\"><img data-dominant-color=\"e5e5e5\" data-has-transparency=\"false\" style=\"--dominant-color: #e5e5e5;\" fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"476\" src=\"https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/compare-1024x476.webp\" alt=\"\" class=\"wp-image-8763 not-transparent\" srcset=\"https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/compare-1024x476.webp 1024w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/compare-300x139.webp 300w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/compare-768x357.webp 768w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/compare-18x8.webp 18w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/compare-600x279.webp 600w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/compare.webp 1080w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>\u65b0\u3057\u3044\u6d17\u6d44\u65b9\u6cd5\u306e\u958b\u767a<\/strong><\/h2>\n\n\n\n<p>\u3053\u308c\u3089\u306e\u9650\u754c\u306b\u5bfe\u51e6\u3059\u308b\u305f\u3081\u3001\u6b21\u306e\u3088\u3046\u306a\u7279\u5fb4\u3092\u6301\u3064\u65b0\u3057\u3044\u6d17\u6d44\u65b9\u6cd5\u304c\u958b\u767a\u3055\u308c\u305f\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>HF\u30d5\u30ea\u30fc\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308a\u3001\u30d5\u30c3\u7d20\u306b\u3088\u308b\u30c0\u30e1\u30fc\u30b8\u3092\u6392\u9664<\/li>\n\n\n\n<li>\u9077\u79fb\u91d1\u5c5e\u932f\u4f53\u306e\u4f7f\u7528\uff08\u9285\u932f\u4f53\u306a\u3069\uff09<\/li>\n\n\n\n<li>\u904e\u9178\u5316\u6c34\u7d20\uff08H\u2082O\u2082\uff09\u306e\u6d3b\u6027\u5316\u306b\u3088\u308b\u53cd\u5fdc\u6027\u30e9\u30b8\u30ab\u30eb\u306e\u751f\u6210<\/li>\n\n\n\n<li>\u6d17\u6d44\u5de5\u7a0b\u30923\u6bb5\u968e\u306b\u7c21\u7d20\u5316<\/li>\n<\/ul>\n\n\n\n<p>\u91d1\u5c5e\u3092\u907f\u3051\u308b\u5f93\u6765\u306e\u30a2\u30d7\u30ed\u30fc\u30c1\u3068\u306f\u7570\u306a\u308a\u3001\u3053\u306e\u65b9\u6cd5\u3067\u306f\u5236\u5fa1\u3055\u308c\u305f\u91d1\u5c5e\u932f\u4f53\u3092\u610f\u56f3\u7684\u306b\u5c0e\u5165\u3057\u3066\u30e9\u30b8\u30ab\u30eb\u5f62\u6210\u3092\u89e6\u5a92\u3057\u3001\u6c5a\u67d3\u7269\u8cea\u306e\u9664\u53bb\u52b9\u7387\u3092\u9ad8\u3081\u308b\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img data-dominant-color=\"9d815e\" data-has-transparency=\"false\" style=\"--dominant-color: #9d815e;\" decoding=\"async\" width=\"1024\" height=\"365\" src=\"https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation-1024x365.webp\" alt=\"\" class=\"wp-image-8764 not-transparent\" srcset=\"https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation-1024x365.webp 1024w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation-300x107.webp 300w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation-768x274.webp 768w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation-18x6.webp 18w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation-600x214.webp 600w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation.webp 1080w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>\u5b9f\u9a13\u7684\u8a55\u4fa1\u65b9\u6cd5<\/strong><\/h2>\n\n\n\n<p>\u6d17\u6d44\u6027\u80fd\u3092\u8a55\u4fa1\u3059\u308b\u305f\u3081\u306b\u3001\u8907\u6570\u306e\u7279\u6027\u8a55\u4fa1\u6280\u8853\u3092\u63a1\u7528\u3057\u305f\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u539f\u5b50\u9593\u529b\u9855\u5fae\u93e1\uff08AFM\uff09\uff1a<\/strong> \u8868\u9762\u5f62\u72b6\u3068\u7c92\u5b50\u691c\u51fa<\/li>\n\n\n\n<li><strong>\u6c34\u306e\u63a5\u89e6\u89d2\u6e2c\u5b9a\uff1a<\/strong> \u8868\u9762\u306e\u6fe1\u308c\u6027\u3068\u6709\u6a5f\u6b8b\u7559\u7269\u306e\u8a55\u4fa1<\/li>\n\n\n\n<li><strong>\u30ad\u30e3\u30f3\u30c7\u30e9\u8868\u9762\u691c\u67fb\u30b7\u30b9\u30c6\u30e0\uff1a<\/strong> 3\u30a4\u30f3\u30c1\u30a6\u30a7\u30fc\u30cf\u306e\u6b20\u9665\u691c\u67fb<\/li>\n\n\n\n<li><strong>\u5168\u53cd\u5c04\u86cd\u5149X\u7dda\uff08TXRF\uff09\uff1a<\/strong> \u5fae\u91cf\u91d1\u5c5e\u6c5a\u67d3\u5206\u6790<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>\u7d50\u679c\u3068\u8003\u5bdf<\/strong><\/h2>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>\u8868\u9762\u5f62\u72b6\u3068\u6e05\u6d44\u5ea6<\/strong><\/h3>\n\n\n\n<p>AFM\u753b\u50cf\u306f\u305d\u308c\u3092\u793a\u3057\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6d17\u6d44\u524d\u306eSiC\u8868\u9762\u306f\u3001\u591a\u6570\u306e\u7c92\u5b50\u3068\u6709\u6a5f\u6b8b\u7559\u7269\u3092\u542b\u3093\u3067\u3044\u308b\uff08\u63a5\u89e6\u89d2\uff5e70\u00b0\u3001\u758e\u6c34\u6027\u6c5a\u67d3\u3092\u793a\u3059\uff09\u3002.<\/li>\n\n\n\n<li>RCA\u6d17\u6d44\u5f8c\u3001\u8868\u9762\u306b\u6b8b\u7559\u7c92\u5b50\u304c\u6b8b\u308b\u3002.<\/li>\n\n\n\n<li>\u65b0\u3057\u3044\u6d17\u6d44\u65b9\u6cd5\u306e\u5f8c\u3001\u76ee\u306b\u898b\u3048\u308b\u7c92\u5b50\u306f\u691c\u51fa\u3055\u308c\u305a\u3001\u63a5\u89e6\u89d2\u306f\uff5e42\u00b0\u306b\u6e1b\u5c11\u3057\u3001\u8868\u9762\u306e\u89aa\u6c34\u6027\u304c\u6539\u5584\u3055\u308c\u305f\u3053\u3068\u3092\u793a\u3057\u3066\u3044\u308b\u3002.<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u308c\u3089\u306e\u7d50\u679c\u304b\u3089\u3001\u7c92\u5b50\u3068\u6709\u6a5f\u6c5a\u67d3\u7269\u8cea\uff08\u30ef\u30c3\u30af\u30b9\u6b8b\u6e23\u306a\u3069\uff09\u306e\u4e21\u65b9\u304c\u52b9\u679c\u7684\u306b\u9664\u53bb\u3055\u308c\u308b\u3053\u3068\u304c\u78ba\u8a8d\u3055\u308c\u305f\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>\u30a6\u30a7\u30cf\u4e0a\u306e\u6b20\u9665\u4f4e\u6e1b <\/strong><\/h3>\n\n\n\n<p>3\u30a4\u30f3\u30c1SiC\u30a6\u30a7\u30cf\u306e\u30ad\u30e3\u30f3\u30c7\u30e9\u691c\u67fb\u3067\u306f\u3001\u65b0\u624b\u6cd5\u306e\u9069\u7528\u5f8c\u3001\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u6570\u306e\u5927\u5e45\u306a\u6e1b\u5c11\u304c\u78ba\u8a8d\u3055\u308c\u305f\u3002\u3053\u306e\u89b3\u5bdf\u306fAFM\u306e\u7d50\u679c\u3068\u4e00\u81f4\u3057\u3066\u304a\u308a\u3001\u30a6\u30a7\u30fc\u30cf\u30b9\u30b1\u30fc\u30eb\u3067\u306e\u30d7\u30ed\u30bb\u30b9\u3092\u691c\u8a3c\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p>\u305d\u306e\u30e1\u30ab\u30cb\u30ba\u30e0\u306f\u6b21\u306e\u3088\u3046\u306a\u3082\u306e\u3060\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9285\u932f\u4f53\u306e\u89e6\u5a92\u4f5c\u7528<\/li>\n\n\n\n<li>\u904e\u9178\u5316\u6c34\u7d20\u304b\u3089\u306e\u6d3b\u6027\u9178\u7d20\u30e9\u30b8\u30ab\u30eb\u306e\u751f\u6210\u5236\u5fa1<\/li>\n\n\n\n<li>\u9178\u5316\u53cd\u5fdc\u306b\u3088\u308b\u8868\u9762\u7c92\u5b50\u306e\u9664\u53bb\u4fc3\u9032<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>\u91d1\u5c5e\u6c5a\u67d3\u5206\u6790<\/strong><\/h3>\n\n\n\n<p>\u9285\u932f\u4f53\u304c\u4f7f\u308f\u308c\u3066\u3044\u308b\u306b\u3082\u304b\u304b\u308f\u3089\u305a\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>TXRF\u5206\u6790\u306b\u3088\u308a\u3001\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306e\u6b8b\u7559\u9285\u306f\u691c\u51fa\u3055\u308c\u305a<\/li>\n\n\n\n<li>\u6d17\u6d44\u5f8c\u3001\u4ed6\u306e\u91d1\u5c5e\u6c5a\u67d3\u306f\u89b3\u5bdf\u3055\u308c\u306a\u3044<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u308c\u306f\u3001\u3053\u306e\u30d7\u30ed\u30bb\u30b9\u304c\u3001\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u91cd\u8981\u306a\u61f8\u5ff5\u4e8b\u9805\u3067\u3042\u308b\u4e8c\u6b21\u6c5a\u67d3\u3092\u5f15\u304d\u8d77\u3053\u3059\u3053\u3068\u306a\u304f\u3001\u9ad8\u3044\u6d17\u6d44\u52b9\u7387\u3092\u9054\u6210\u3057\u3066\u3044\u308b\u3053\u3068\u3092\u793a\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>\u65b0\u3057\u3044\u6d17\u6d44\u65b9\u6cd5\u306e\u5229\u70b9<\/strong><\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u5468\u6ce2\u306b\u3088\u308bSiC\u3078\u306e\u30c0\u30e1\u30fc\u30b8\u3092\u6392\u9664<\/li>\n\n\n\n<li>\u4f4e\u6b20\u9665\u5bc6\u5ea6\u3068\u9ad8\u3044\u8868\u9762\u6e05\u6d44\u5ea6\u3092\u5b9f\u73fe<\/li>\n\n\n\n<li>\u7c92\u5b50\u3068\u6709\u6a5f\u6b8b\u7559\u7269\u306e\u4e21\u65b9\u3092\u9664\u53bb<\/li>\n\n\n\n<li>\u30d7\u30ed\u30bb\u30b9\u306e\u8907\u96d1\u3055\u3092\u8efd\u6e1b\u3059\u308b\uff08\u30b9\u30c6\u30c3\u30d7\u6570\u3092\u6e1b\u3089\u3059\uff09<\/li>\n\n\n\n<li>\u6b8b\u7559\u91d1\u5c5e\u6c5a\u67d3\u306e\u56de\u907f<\/li>\n\n\n\n<li>\u7523\u696d\u7528\u30a6\u30a7\u30cf\u30fc\u30b9\u30b1\u30fc\u30eb\u30d7\u30ed\u30bb\u30b9\u306b\u5bfe\u5fdc<\/li>\n<\/ul>\n\n\n\n<figure class=\"wp-block-image size-large\"><img data-dominant-color=\"e6e5ef\" data-has-transparency=\"false\" style=\"--dominant-color: #e6e5ef;\" decoding=\"async\" width=\"1024\" height=\"499\" src=\"https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-1024x499.webp\" alt=\"\" class=\"wp-image-8765 not-transparent\" srcset=\"https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-1024x499.webp 1024w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-300x146.webp 300w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-768x374.webp 768w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-18x9.webp 18w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-600x292.webp 600w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3.webp 1080w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>\u7d50\u8ad6<\/strong><\/h2>\n\n\n\n<p>\u3053\u306e\u7814\u7a76\u306b\u3088\u308a\u3001\u5f93\u6765\u306eRCA\u6d17\u6d44\u306f\u3001\u9ad8\u5468\u6ce2\u304c\u6750\u6599\u306e\u8868\u9762\u3068\u96fb\u5b50\u7279\u6027\u306b\u4e0e\u3048\u308b\u30c0\u30e1\u30fc\u30b8\u306e\u305f\u3081\u3001SiC\u30a6\u30a7\u30cf\u30fc\u306b\u306f\u5b8c\u5168\u306b\u306f\u9069\u3055\u306a\u3044\u3053\u3068\u304c\u5b9f\u8a3c\u3055\u308c\u305f\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img data-dominant-color=\"f9f9f9\" data-has-transparency=\"false\" style=\"--dominant-color: #f9f9f9;\" loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"605\" src=\"https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/MBXY-CR-A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation-1024x605.webp\" alt=\"\" class=\"wp-image-8766 not-transparent\" srcset=\"https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/MBXY-CR-A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation-1024x605.webp 1024w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/MBXY-CR-A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation-300x177.webp 300w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/MBXY-CR-A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation-768x454.webp 768w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/MBXY-CR-A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation-18x12.webp 18w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/MBXY-CR-A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation-600x354.webp 600w, https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/MBXY-CR-A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation.webp 1080w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p>\u9077\u79fb\u91d1\u5c5e\u932f\u4f53\u6d3b\u6027\u5316\u904e\u9178\u5316\u6c34\u7d20\u3092\u30d9\u30fc\u30b9\u3068\u3057\u305fHF\u30d5\u30ea\u30fc\u6d17\u6d44\u6cd5\u306e\u63d0\u6848\u306f\u3001\u52b9\u679c\u7684\u306a\u4ee3\u66ff\u624b\u6bb5\u3092\u63d0\u4f9b\u3059\u308b\u3002\u3053\u308c\u306b\u3088\u308a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u52b9\u7387\u7684\u306a\u7c92\u5b50\u3068\u6c5a\u67d3\u7269\u8cea\u306e\u9664\u53bb<\/li>\n\n\n\n<li>SiC\u6750\u6599\u7279\u6027\u306e\u7dad\u6301<\/li>\n\n\n\n<li>\u8868\u9762\u306e\u6fe1\u308c\u6027\u3068\u6e05\u6d44\u5ea6\u306e\u5411\u4e0a<\/li>\n\n\n\n<li>\u534a\u5c0e\u4f53\u88fd\u9020\u306e\u305f\u3081\u306e\u30b9\u30b1\u30fc\u30e9\u30d6\u30eb\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u306e\u30a2\u30d7\u30ed\u30fc\u30c1\u306f\u3001\u5148\u9032\u7684\u306aSiC\u30a6\u30a7\u30cf\u30fc\u30d7\u30ed\u30bb\u30b9\u306b\u6709\u671b\u306a\u9053\u7b4b\u3092\u63d0\u4f9b\u3057\u3001\u9ad8\u6027\u80fd\u30d1\u30ef\u30fc\u304a\u3088\u3073RF\u30c7\u30d0\u30a4\u30b9\u306e\u7d99\u7d9a\u7684\u306a\u958b\u767a\u3092\u30b5\u30dd\u30fc\u30c8\u3059\u308b\u3002.<\/p>\n\n\n\n<p><\/p>","protected":false},"excerpt":{"rendered":"<p>With the rapid development of power electronics, silicon carbide (SiC) has emerged as a promising material for next-generation devices due to its wide bandgap, high thermal conductivity, and excellent electrical performance. Compared with traditional silicon, SiC enables devices with higher voltage tolerance, lower switching losses, and better high-temperature stability. However, the surface preparation of SiC wafers remains a critical challenge. The widely used RCA cleaning process, originally developed for silicon wafers, may not be directly applicable to SiC due to fundamental differences in surface chemistry and bonding structure. This study investigates the limitations of RCA cleaning for SiC and introduces a novel HF-free cleaning method based on transition metal complex-activated [&hellip;]<\/p>\n","protected":false},"author":2,"featured_media":8765,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_uag_custom_page_level_css":"","footnotes":""},"categories":[12,27],"tags":[2095,2090,2091,2093,2097,2092,2088,2094,2089,2096],"class_list":["post-8762","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news","category-companynews","tag-afm-wafer-analysis","tag-hf-free-cleaning","tag-rca-cleaning-sic","tag-semiconductor-wafer-cleaning","tag-sic-defect-reduction","tag-sic-surface-treatment","tag-sic-wafer-cleaning","tag-sic-wafer-process","tag-silicon-carbide-cleaning-method","tag-txrf-contamination-analysis"],"acf":[],"uagb_featured_image_src":{"full":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3.webp",1080,526,false],"thumbnail":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-150x150.webp",150,150,true],"medium":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-300x146.webp",300,146,true],"medium_large":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-768x374.webp",768,374,true],"large":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-1024x499.webp",800,390,true],"1536x1536":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3.webp",1080,526,false],"2048x2048":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3.webp",1080,526,false],"trp-custom-language-flag":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-18x9.webp",18,9,true],"woocommerce_thumbnail":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-300x300.webp",300,300,true],"woocommerce_single":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-600x292.webp",600,292,true],"woocommerce_gallery_thumbnail":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-100x100.webp",100,100,true]},"uagb_author_info":{"display_name":"lydia","author_link":"https:\/\/www.sic-wafers.com\/ja\/author\/lydia\/"},"uagb_comment_info":0,"uagb_excerpt":"With the rapid development of power electronics, silicon carbide (SiC) has emerged as a promising material for next-generation devices due to its wide bandgap, high thermal conductivity, and excellent electrical performance. Compared with traditional silicon, SiC enables devices with higher voltage tolerance, lower switching losses, and better high-temperature stability. However, the surface preparation of SiC&hellip;","_links":{"self":[{"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/posts\/8762","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/comments?post=8762"}],"version-history":[{"count":3,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/posts\/8762\/revisions"}],"predecessor-version":[{"id":8769,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/posts\/8762\/revisions\/8769"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/media\/8765"}],"wp:attachment":[{"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/media?parent=8762"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/categories?post=8762"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/tags?post=8762"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}