{"id":8802,"date":"2026-04-02T13:23:00","date_gmt":"2026-04-02T05:23:00","guid":{"rendered":"https:\/\/www.sic-wafers.com\/?p=8802"},"modified":"2026-04-09T10:01:43","modified_gmt":"2026-04-09T02:01:43","slug":"%e7%82%ad%e5%8c%96%e3%82%b1%e3%82%a4%e7%b4%a0%e3%83%91%e3%83%af%e3%83%bc%e3%83%87%e3%83%90%e3%82%a4%e3%82%b9%e8%a3%bd%e9%80%a0%e3%81%ae%e8%a9%b3%e7%b4%b0%e3%81%aa%e6%a6%82%e8%a6%81","status":"publish","type":"post","link":"https:\/\/www.sic-wafers.com\/ja\/detailed-overview-of-silicon-carbide-sic-power-device-fabrication\/","title":{"rendered":"\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u306e\u8a73\u7d30\u306a\u6982\u8981"},"content":{"rendered":"
<\/div>\n

\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09\u306f\u3001\u305d\u306e\u5e83\u3044\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u3001\u9ad8\u71b1\u4f1d\u5c0e\u6027\u3001\u9ad8\u30d6\u30ec\u30fc\u30af\u30c0\u30a6\u30f3\u78c1\u5834\u3001\u9ad8\u96fb\u5b50\u30c9\u30ea\u30d5\u30c8\u901f\u5ea6\u306b\u3088\u308a\u3001\u9ad8\u6027\u80fd\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u91cd\u8981\u306a\u6750\u6599\u3068\u3057\u3066\u6d6e\u4e0a\u3057\u3066\u304d\u305f\u3002\u3053\u308c\u3089\u306e\u7279\u6027\u306b\u3088\u308a\u3001SiC\u30d1\u30ef\u30fc\u30fb\u30c7\u30d0\u30a4\u30b9\u306f\u3001\u96fb\u6c17\u81ea\u52d5\u8eca\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u8caf\u8535\u30b7\u30b9\u30c6\u30e0\u3001\u518d\u751f\u53ef\u80fd\u30a8\u30cd\u30eb\u30ae\u30fc\u30fb\u30a4\u30f3\u30d0\u30fc\u30bf\u30fc\u306b\u3068\u3063\u3066\u7406\u60f3\u7684\u306a\u3082\u306e\u3068\u306a\u3063\u3066\u304a\u308a\u3001\u5f93\u6765\u306e\u30b7\u30ea\u30b3\u30f3\u30fb\u30c7\u30d0\u30a4\u30b9\u306b\u6bd4\u3079\u3066\u4f1d\u5c0e\u640d\u5931\u304c\u4f4e\u304f\u3001\u52b9\u7387\u304c\u9ad8\u304f\u306a\u3063\u3066\u3044\u308b\u3002\u3053\u306e\u8a18\u4e8b\u3067\u306f\u3001\u57fa\u677f\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u3001\u30c9\u30fc\u30d4\u30f3\u30b0\u5236\u5fa1\u3001\u6b20\u9665\u7ba1\u7406\u3001\u696d\u754c\u306e\u6700\u65b0\u52d5\u5411\u306b\u7126\u70b9\u3092\u5f53\u3066\u3001SiC\u30d1\u30ef\u30fc\u30fb\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u306e\u8a73\u7d30\u304b\u3064\u6280\u8853\u7684\u306a\u6982\u8981\u3092\u8aac\u660e\u3059\u308b\u3002.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

1.\u82af\u6750\uff1a 4H-SiC\u5358\u7d50\u6676\u57fa\u677f<\/a><\/h2>\n\n\n\n

4H-SiC\u306f\u3001\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u306b\u304a\u3044\u3066\u6700\u3082\u4e00\u822c\u7684\u306b\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u30dd\u30ea\u30bf\u30a4\u30d7\u3067\u3042\u308b\u30024H\u300d\u306f\u30014\u3064\u306eSi-C\u4e8c\u5c64\u304c1\u3064\u306e\u516d\u89d2\u5f62\u30e6\u30cb\u30c3\u30c8\u30bb\u30eb\uff08ABCB\u7a4d\u5c64\uff09\u3092\u5f62\u6210\u3059\u308b\u3001c\u8ef8\u306b\u6cbf\u3063\u305f\u7a4d\u5c64\u9806\u5e8f\u3092\u793a\u3059\u3002\u4e3b\u306a\u6750\u6599\u306e\u5229\u70b9\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n

\u30d7\u30ed\u30d1\u30c6\u30a3<\/th>\u4fa1\u5024<\/th>\u610f\u7fa9<\/th><\/tr><\/thead>
\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7<\/td>~3.3 eV<\/td>\u9ad8\u6e29\u52d5\u4f5c<\/td><\/tr>
\u30af\u30ea\u30c6\u30a3\u30ab\u30eb\u30fb\u30d6\u30ec\u30a4\u30af\u30c0\u30a6\u30f3\u30fb\u30d5\u30a3\u30fc\u30eb\u30c9<\/td>2-3 MV\/cm<\/td>\u9ad8\u96fb\u5727\u8010\u6027<\/td><\/tr>
\u71b1\u4f1d\u5c0e\u7387<\/td>~4.9 W\/cm-K<\/td>\u52b9\u7387\u7684\u306a\u653e\u71b1<\/td><\/tr>
\u96fb\u5b50\u30c9\u30ea\u30d5\u30c8\u901f\u5ea6<\/td>~2\u00d710\u2077 cm\/s<\/td>\u9ad8\u5468\u6ce2\u904b\u8ee2\u306b\u9069\u3057\u3066\u3044\u308b<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

\u3053\u308c\u3089\u306e\u7279\u6027\u306b\u3088\u308a\u30014H-SiC\u306f\u9ad8\u96fb\u5727\u3001\u5927\u96fb\u6d41\u3001\u9ad8\u6e29\u3001\u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9\u306e\u88fd\u9020\u306b\u7406\u60f3\u7684\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n

2.\u57fa\u677f\u306e\u5411\u304d\u3068\u8ef8\u5916\u8a2d\u8a08<\/h2>\n\n\n\n

SiC{0001}\u306e\u7d50\u6676\u9762\u306f\u6b21\u306e\u3088\u3046\u306b\u5206\u985e\u3067\u304d\u308b\uff1a<\/p>\n\n\n\n

    \n
  • Si\u30d5\u30a7\u30a4\u30b9 (0001)<\/strong>:\u6700\u8868\u9762\u306e\u539f\u5b50\u306f\u30b7\u30ea\u30b3\u30f3\u3002\u8868\u9762\u7279\u6027\u306f\u3001\u5236\u5fa1\u3055\u308c\u305f\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u3068\u4f4e\u6b20\u9665\u5bc6\u5ea6\u3092\u597d\u3080\u3002.<\/li>\n\n\n\n
  • C\u30d5\u30a7\u30a4\u30b9\uff08000-1\uff09<\/strong>:\u6700\u4e0a\u90e8\u306e\u539f\u5b50\u306f\u70ad\u7d20\u3067\u3042\u308b\u3002\u5316\u5b66\u7684\u6d3b\u6027\u304c\u9ad8\u3044\u3068\u6210\u9577\u304c\u901f\u304f\u306a\u308b\u304c\u3001\u6b20\u9665\u5f62\u6210\u304c\u5897\u52a0\u3057\u3001\u30c9\u30fc\u30d4\u30f3\u30b0\u5236\u5fa1\u304c\u96e3\u3057\u304f\u306a\u308b\u3002.<\/li>\n<\/ul>\n\n\n\n

    \u5e02\u8ca9\u306e\u30d1\u30ef\u30fc\u30fb\u30c7\u30d0\u30a4\u30b9\u306f\u3001\u307b\u307c\u72ec\u5360\u7684\u306b\u3001\u901a\u5e38\u65b9\u5411\u306b\u5bfe\u3057\u30663.5\u00b0\uff5e4\u00b0\u50be\u3044\u305fSi\u9762\u30aa\u30d5\u30a2\u30af\u30b7\u30b9\u57fa\u677f\u3092\u4f7f\u7528\u3057\u3066\u3044\u308b\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u30b9\u30c6\u30c3\u30d7\u30d5\u30ed\u30fc\u6210\u9577\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u3001\u4e8c\u6b21\u5143\u6838\u767a\u751f\u3092\u6291\u5236\u3057\u3001\u6b20\u9665\u3092\u6e1b\u3089\u3057\u3001\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u5e73\u5766\u306a\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u5c64\u3092\u3082\u305f\u3089\u3059\u539f\u5b50\u30ec\u30d9\u30eb\u306e\u6bb5\u5dee\u304c\u5f62\u6210\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n

    3.SiC\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u30d7\u30ed\u30bb\u30b9<\/h2>\n\n\n\n

    \u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u3068\u306f\u3001\u5358\u7d50\u6676\u57fa\u677f\u4e0a\u306b\u540c\u3058\u7d50\u6676\u69cb\u9020\u3092\u7dad\u6301\u3057\u305f\u307e\u307e\u5358\u7d50\u6676SiC\u5c64\u3092\u5806\u7a4d\u3055\u305b\u308b\u3053\u3068\u3067\u3042\u308b\u3002MOSFET\u306e\u30c9\u30ea\u30d5\u30c8\u5c64\u3084P+\u5c64\u306a\u3069\u306e\u30c7\u30d0\u30a4\u30b9\u306e\u6d3b\u6027\u9818\u57df\u3092\u5f62\u6210\u3059\u308b\u3002\u6a19\u6e96\u7684\u306a\u65b9\u6cd5\u306f \u5316\u5b66\u6c17\u76f8\u6210\u9577\u6cd5\uff08CVD\uff09<\/strong>.<\/p>\n\n\n\n

    3.1 \u57fa\u677f\u306e\u6e96\u5099<\/h3>\n\n\n\n
    \u30b9\u30c6\u30c3\u30d7<\/th>\u76ee\u7684<\/th>\u4ee3\u8868\u7684\u306a\u30d1\u30e9\u30e1\u30fc\u30bf<\/th><\/tr><\/thead>
    \u6c34\u7d20\u30a8\u30c3\u30c1\u30f3\u30b0<\/td>\u30b9\u30af\u30e9\u30c3\u30c1\u3001\u30cd\u30a4\u30c6\u30a3\u30d6\u9178\u5316\u7269\u3001\u6c5a\u67d3\u3001\u539f\u5b50\u30b9\u30c6\u30c3\u30d7\u3092\u5f62\u6210\u3059\u308b\u9664\u53bb<\/td>1500\uff5e1650\u2103\u3001\u6570\u5206\u9593<\/td><\/tr>
    \u30af\u30ea\u30fc\u30cb\u30f3\u30b0<\/td>\u7c92\u5b50\u3068\u91d1\u5c5e\u30a4\u30aa\u30f3\u3092\u9664\u53bb\u3059\u308b<\/td>RCA\u30af\u30ea\u30fc\u30f3\uff08SC1\u3001SC2\u3001DHF\uff09<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

    3.2 \u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc<\/h3>\n\n\n\n
    \u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\u5178\u578b\u7684\u306a\u7bc4\u56f2<\/th>\u5099\u8003<\/th><\/tr><\/thead>
    \u6e29\u5ea6<\/td>1500-1650\u00b0C<\/td>\u9ad8\u6e29\u306f\u524d\u99c6\u4f53\u306e\u5206\u89e3\u3068\u539f\u5b50\u8868\u9762\u306e\u62e1\u6563\u3092\u4fc3\u9032\u3059\u308b<\/td><\/tr>
    \u5727\u529b<\/td>100-300 mbar<\/td>\u5727\u529b\u304c\u4f4e\u3044\u305f\u3081\u3001\u539a\u307f\u306e\u5747\u4e00\u6027\u304c\u5411\u4e0a\u3057\u3001\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u304c\u6291\u3048\u3089\u308c\u308b\u3002<\/td><\/tr>
    \u30b7\u30ea\u30b3\u30f3\u30fb\u30bd\u30fc\u30b9<\/td>SiH\u2084\u307e\u305f\u306f SiH\u2082Cl\u2082<\/td>SiH\u2082Cl\u2082\u306f\u30013C-SiC\u30dd\u30ea\u30bf\u30a4\u30d7\u304a\u3088\u3073\u4e09\u89d2\u6b20\u9665\u3092\u6291\u5236\u3059\u308b\u305f\u3081\u306b\u597d\u307e\u3057\u3044<\/td><\/tr>
    \u70ad\u7d20\u6e90<\/td>C\u2083\u2088\uff08\u30d7\u30ed\u30d1\u30f3\uff09\u307e\u305f\u306fC\u2082\u2084\uff08\u30a8\u30c1\u30ec\u30f3\uff09<\/td>\u6700\u3082\u4e00\u822c\u7684\u306a\u306e\u306f\u30d7\u30ed\u30d1\u30f3\u3001\u4f4e\u6e29\u6210\u9577\u307e\u305f\u306f\u5747\u4e00\u6027\u5411\u4e0a\u306b\u306f\u30a8\u30c1\u30ec\u30f3\u3092\u4f7f\u7528<\/td><\/tr>
    Si\/C\u6bd4<\/td>0.7-1.0<\/td>Si\u30c9\u30ed\u30c3\u30d7\u30ec\u30c3\u30c8\u3084\u30dd\u30ea\u30bf\u30a4\u30d7\u306e\u30a4\u30f3\u30af\u30eb\u30fc\u30b8\u30e7\u30f3\u3092\u907f\u3051\u308b\u305f\u3081\u3001\u308f\u305a\u304b\u306bC\u30ea\u30c3\u30c1\u3002<\/td><\/tr>
    \u30c9\u30fc\u30d4\u30f3\u30b0\uff08N\u578b\uff09<\/td>N\u2082\u307e\u305f\u306fNH\u2083<\/td>NH\u2083\u306f\u52b9\u7387\u304c\u9ad8\u304f\u3001\u5fc5\u8981\u306a\u30d7\u30ea\u30ab\u30fc\u30b5\u30fc\u304c\u5c11\u306a\u3044<\/td><\/tr>
    \u30c9\u30fc\u30d4\u30f3\u30b0\uff08P\u30bf\u30a4\u30d7\uff09<\/td>TMA\u307e\u305f\u306fTEA<\/td>\u52b9\u7387\u304c\u4f4e\u304f\u3001Al-C\u8907\u5408\u4f53\u306e\u5f62\u6210\u3092\u9632\u3050\u305f\u3081\u306b\u7cbe\u5bc6\u306a\u5236\u5fa1\u304c\u5fc5\u8981<\/td><\/tr>
    \u6210\u9577\u7387<\/td>5-20 \u00b5m\/h<\/td>\u751f\u7523\u52b9\u7387\u3068\u6b20\u9665\u7ba1\u7406\u306e\u30d0\u30e9\u30f3\u30b9<\/td><\/tr>
    \u30b9\u30c6\u30c3\u30d7\u30fb\u30d5\u30ed\u30fc\u6210\u9577<\/td>\u30aa\u30d5\u30a2\u30af\u30b7\u30b9\u57fa\u677f\u3068\u5236\u5fa1\u3055\u308c\u305f\u6e29\u5ea6\u3001\u5727\u529b\u3001Si\/C\u6bd4\u306b\u3088\u308a\u5b9f\u73fe<\/td>2\u6b21\u5143\u6838\u751f\u6210\u306e\u6291\u5236\u3001\u6b20\u9665\u306e\u4f4e\u6e1b\u3001\u539f\u5b50\u306e\u5e73\u5766\u6027\u306e\u78ba\u4fdd<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

    \u6210\u9577\u4e2d\u3001\u30a2\u30c9\u30a2\u30c8\u30e0\u306f\u6bb5\u5dee\u306e\u7aef\u306b\u512a\u5148\u7684\u306b\u53d6\u308a\u8fbc\u307e\u308c\u3001\u6bb5\u5dee\u306f\u6bb5\u5dee\u3092\u6a2a\u5207\u3063\u3066\u4f1d\u64ad\u3057\u3001\u5e73\u6ed1\u3067\u6b20\u9665\u306e\u5c11\u306a\u3044\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u5c64\u3092\u5f62\u6210\u3059\u308b\u3002.<\/p>\n\n\n\n

    3.3 \u51b7\u5374\u3068\u8377\u964d\u308d\u3057<\/h3>\n\n\n\n

    \u6210\u9577\u5f8c\u3001\u30a6\u30a7\u30fc\u30cf\u306fH\u2082\u307e\u305f\u306f\u4e0d\u6d3b\u6027\u30ac\u30b9\u4e0b\u3067\u51b7\u5374\u3055\u308c\u3001\u71b1\u5fdc\u529b\u3068\u30a6\u30a7\u30fc\u30cf\u306e\u5272\u308c\u3092\u9632\u3050\u3002\u5b89\u5168\u306a\u6e29\u5ea6\u306b\u9054\u3057\u305f\u5f8c\u306e\u307f\u3001\u30a6\u30a7\u30cf\u306f\u30ea\u30a2\u30af\u30bf\u30fc\u304b\u3089\u53d6\u308a\u51fa\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n

    4.\u6b20\u9665\u306e\u7a2e\u985e\u3068\u8ab2\u984c<\/h2>\n\n\n\n

    SiC\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u306f\u3001\u6b20\u9665\u5236\u5fa1\u306b\u304a\u3044\u3066\u3044\u304f\u3064\u304b\u306e\u91cd\u5927\u306a\u8ab2\u984c\u306b\u76f4\u9762\u3057\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n

    \u6b20\u9665\u306e\u7a2e\u985e<\/th>\u539f\u56e0<\/th>\u30c7\u30d0\u30a4\u30b9\u3078\u306e\u5f71\u97ff<\/th><\/tr><\/thead>
    \u4e09\u89d2\u5f62\u306e\u6b20\u9665<\/td>\u57fa\u677f\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u3001\u30b9\u30af\u30e9\u30c3\u30c1\u30013C-SiC\u30a4\u30f3\u30af\u30eb\u30fc\u30b8\u30e7\u30f3<\/td>\u6b69\u7559\u307e\u308a\u3068\u4fe1\u983c\u6027\u306e\u4f4e\u4e0b<\/td><\/tr>
    \u30cb\u30f3\u30b8\u30f3\u306e\u6b20\u9665<\/td>\u30ab\u30fc\u30dc\u30f3\u30fb\u30a4\u30f3\u30af\u30eb\u30fc\u30b8\u30e7\u30f3\u307e\u305f\u306f\u57fa\u677f\u306e\u6b20\u9665<\/td>\u8868\u9762\u7c97\u3055\u3001\u5c40\u6240\u7684\u6b20\u9665<\/td><\/tr>
    \u30dd\u30ea\u30bf\u30a4\u30d7\u30fb\u30a4\u30f3\u30af\u30eb\u30fc\u30b8\u30e7\u30f3<\/td>3C-SiC\u7c92<\/td>\u5358\u7d50\u6676\u306e\u5b8c\u5168\u6027\u3092\u7834\u58ca\u3059\u308b<\/td><\/tr>
    \u57fa\u677f\u56fa\u6709\u306e\u6b20\u9665<\/td>\u57fa\u5e95\u9762\u8ee2\u4f4d\uff08BPD\uff09\u3001\u30b9\u30ec\u30c3\u30c7\u30a3\u30f3\u30b0\u30a8\u30c3\u30b8\u8ee2\u4f4d\uff08TED\uff09<\/td>BPD\u306f\u9ad8\u78c1\u5834\u4e0b\u3067\u7a4d\u5c64\u6b20\u9665\u306b\u5909\u5316\u3057\u3001\u30aa\u30f3\u62b5\u6297\u3092\u5897\u52a0\u3055\u305b\u308b\u3002<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

    \u6700\u9069\u5316\u3055\u308c\u305f\u30b9\u30c6\u30c3\u30d7\u30d5\u30ed\u30fc\u6210\u9577\u3068\u5165\u5ff5\u306a\u57fa\u677f\u6e96\u5099\u306b\u3088\u308a\u3001BPD\u306e\u4f1d\u64ad\u3092\u90e8\u5206\u7684\u306b\u30d6\u30ed\u30c3\u30af\u3057\u3001\u305d\u306e\u5f71\u97ff\u3092\u8efd\u6e1b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002.<\/p>\n\n\n\n

    5.\u696d\u754c\u52d5\u5411<\/h2>\n\n\n\n
      \n
    1. \u3088\u308a\u5927\u304d\u306a\u30a6\u30a7\u30cf\u30fc\u30b5\u30a4\u30ba<\/strong>:\u5358\u7d50\u6676\u5229\u7528\u7387\u5411\u4e0a\u306e\u305f\u3081\u3001100mm\u30a6\u30a7\u30fc\u30cf\u304b\u3089150mm\u3001200mm\u30a6\u30a7\u30fc\u30cf\u3078\u79fb\u884c\u3002.<\/li>\n\n\n\n
    2. \u6b20\u9665\u5bc6\u5ea6\u306e\u4f4e\u4e0b<\/strong>:BPD\u3068\u4e09\u89d2\u6b20\u9665\u3092\u6700\u5c0f\u5316\u3059\u308b\u305f\u3081\u306e\u6e29\u5ea6\u3001\u5727\u529b\u3001Si\/C\u6bd4\u3001\u524d\u99c6\u4f53\u306e\u9078\u629e\u306e\u6700\u9069\u5316\u3002.<\/li>\n\n\n\n
    3. \u30c9\u30fc\u30d4\u30f3\u30b0\u30fb\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u306e\u6539\u5584<\/strong>:\u7279\u306b\u3001\u5747\u4e00\u6027\u3068\u52b9\u7387\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306eP\u578b\u30c9\u30fc\u30d4\u30f3\u30b0\u7528\u3002.<\/li>\n\n\n\n
    4. \u9ad8\u3044\u6210\u9577\u7387<\/strong>:SiHCl\u2083(TCS)\u306e\u3088\u3046\u306a\u5148\u9032\u7684\u306a\u524d\u99c6\u4f53\u3092\u7528\u3044\u3066\u3001\u54c1\u8cea\u3092\u7dad\u6301\u3057\u306a\u304c\u308930\u03bcm\/h\u4ee5\u4e0a\u306e\u6210\u9577\u3092\u63a2\u6c42\u3059\u308b\u3002.<\/li>\n\n\n\n
    5. \u73fe\u5834\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0<\/strong>:\u30ec\u30fc\u30b6\u30fc\u5e72\u6e09\u8a08\u3001\u30aa\u30d7\u30c6\u30a3\u30ab\u30eb\u30fb\u30d1\u30a4\u30ed\u30e1\u30c8\u30ea\u30fc\u3001\u30a8\u30ea\u30d7\u30bd\u30e1\u30c8\u30ea\u30fc\u3067\u6210\u9577\u3092\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u3067\u30e2\u30cb\u30bf\u30fc\u3002.<\/li>\n\n\n\n
    6. \u591a\u5c64\u69cb\u9020<\/strong>:MOSFET\u3084IGBT\u306e\u3088\u3046\u306a\u8907\u96d1\u306a\u30c7\u30d0\u30a4\u30b9\u306e\u305f\u3081\u306eN+\/N-\/P-well\/N+\u5c64\u306e\u7cbe\u5bc6\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u3002.<\/li>\n<\/ol>\n\n\n\n

      6.\u7d50\u8ad6<\/h2>\n\n\n\n

      4H-SiC Si\u9762\u30aa\u30d5\u30a2\u30af\u30b7\u30b9\u57fa\u677f\u4e0a\u3078\u306eSiC\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u306f\u3001\u9ad8\u6027\u80fd\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u306e\u57fa\u76e4\u3092\u5f62\u6210\u3059\u308b\u3002\u4f4e\u6b20\u9665\u3001\u5747\u4e00\u3001\u9ad8\u54c1\u8cea\u306e\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u5c64\u3092\u5b9f\u73fe\u3059\u308b\u305f\u3081\u306b\u306f\u3001\u57fa\u677f\u914d\u5411\u3001\u30aa\u30d5\u30a2\u30af\u30b7\u30b9\u8a2d\u8a08\u3001\u30b9\u30c6\u30c3\u30d7\u30d5\u30ed\u30fc\u6210\u9577\u3001CVD\u30d1\u30e9\u30e1\u30fc\u30bf\u306e\u7cbe\u5bc6\u5236\u5fa1\u3092\u30de\u30b9\u30bf\u30fc\u3059\u308b\u3053\u3068\u304c\u4e0d\u53ef\u6b20\u3067\u3042\u308b\u3002\u30a6\u30a7\u30fc\u30cf\u30b5\u30a4\u30ba\u3001\u6210\u9577\u901f\u5ea6\u3001\u6b20\u9665\u5236\u5fa1\u3001\u304a\u3088\u3073in-situ\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u306e\u7d99\u7d9a\u7684\u306a\u9032\u6b69\u306b\u3088\u308a\u3001SiC\u30c7\u30d0\u30a4\u30b9\u306f\u9ad8\u6027\u80fd\u5316\u3001\u4f4e\u30b3\u30b9\u30c8\u5316\u3001\u304a\u3088\u3073\u30a8\u30cd\u30eb\u30ae\u30fc\u52b9\u7387\u306e\u9ad8\u3044\u96fb\u5b50\u6a5f\u5668\u3078\u306e\u5e83\u7bc4\u306a\u5fdc\u7528\u306b\u5411\u3051\u3066\u524d\u9032\u3057\u7d9a\u3051\u308b\u3060\u308d\u3046\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

      Silicon carbide (SiC) has emerged as a critical material in high-performance power semiconductor devices due to its wide bandgap, high thermal conductivity, high breakdown field, and high electron drift velocity. These properties make SiC power devices ideal for electric vehicles, energy storage systems, and renewable energy inverters, offering lower conduction losses and higher efficiency compared to traditional silicon devices. This article provides a detailed, technical overview of SiC power device fabrication, focusing on substrates, epitaxial growth, doping control, defect management, and current trends in the industry. 1. Core Material: 4H-SiC Single Crystal Substrate 4H-SiC is the most commonly used polytype in power device manufacturing. The \u201c4H\u201d denotes a stacking sequence […]<\/p>\n","protected":false},"author":2,"featured_media":8803,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_uag_custom_page_level_css":"","footnotes":""},"categories":[12,27],"tags":[1166,2175,2173,2178,1305,1306,1819,1313,1240,1048,2185,2183,2184,1338,1781,2182,2181,1340,2177,1807,2176,2180,2170,2171,1056,1776,1111,2174,2172,2179],"class_list":["post-8802","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news","category-companynews","tag-4h-sic","tag-atomic-steps","tag-c-face","tag-carrot-defects","tag-chemical-vapor-deposition","tag-cvd","tag-defect-control","tag-doping-control","tag-epitaxial-growth","tag-epitaxy","tag-high-performance-semiconductor","tag-high-temperature-growth","tag-igbt","tag-jbs-diode","tag-large-diameter-wafer-2","tag-layer-uniformity","tag-low-pressure-growth","tag-mosfet","tag-n-type-doping","tag-off-axis-substrate","tag-p-type-doping","tag-polytype-inclusion","tag-power-device","tag-si-face","tag-sic","tag-sic-power-device","tag-silicon-carbide","tag-step-flow-growth","tag-substrate-preparation","tag-triangular-defects"],"acf":[],"uagb_featured_image_src":{"full":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/04\/12inch-Sic-wafer-1.webp",600,600,false],"thumbnail":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/04\/12inch-Sic-wafer-1-150x150.webp",150,150,true],"medium":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/04\/12inch-Sic-wafer-1-300x300.webp",300,300,true],"medium_large":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/04\/12inch-Sic-wafer-1.webp",600,600,false],"large":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/04\/12inch-Sic-wafer-1.webp",600,600,false],"1536x1536":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/04\/12inch-Sic-wafer-1.webp",600,600,false],"2048x2048":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/04\/12inch-Sic-wafer-1.webp",600,600,false],"trp-custom-language-flag":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/04\/12inch-Sic-wafer-1-12x12.webp",12,12,true],"woocommerce_thumbnail":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/04\/12inch-Sic-wafer-1-300x300.webp",300,300,true],"woocommerce_single":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/04\/12inch-Sic-wafer-1.webp",600,600,false],"woocommerce_gallery_thumbnail":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/04\/12inch-Sic-wafer-1-100x100.webp",100,100,true]},"uagb_author_info":{"display_name":"lydia","author_link":"https:\/\/www.sic-wafers.com\/ja\/author\/lydia\/"},"uagb_comment_info":0,"uagb_excerpt":"Silicon carbide (SiC) has emerged as a critical material in high-performance power semiconductor devices due to its wide bandgap, high thermal conductivity, high breakdown field, and high electron drift velocity. These properties make SiC power devices ideal for electric vehicles, energy storage systems, and renewable energy inverters, offering lower conduction losses and higher efficiency compared…","_links":{"self":[{"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/posts\/8802","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/comments?post=8802"}],"version-history":[{"count":1,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/posts\/8802\/revisions"}],"predecessor-version":[{"id":8804,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/posts\/8802\/revisions\/8804"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/media\/8803"}],"wp:attachment":[{"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/media?parent=8802"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/categories?post=8802"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/tags?post=8802"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}