{"id":8884,"date":"2026-05-14T14:49:25","date_gmt":"2026-05-14T06:49:25","guid":{"rendered":"https:\/\/www.sic-wafers.com\/?p=8884"},"modified":"2026-05-15T11:19:56","modified_gmt":"2026-05-15T03:19:56","slug":"common-defects-in-sic-wafers-and-inspection-methods","status":"publish","type":"post","link":"https:\/\/www.sic-wafers.com\/ja\/common-defects-in-sic-wafers-and-inspection-methods\/","title":{"rendered":"SiC\u30a6\u30a7\u30fc\u30cf\u306e\u4e00\u822c\u7684\u6b20\u9665\u3068\u691c\u67fb\u65b9\u6cd5"},"content":{"rendered":"
<\/div>\n

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\u3057\u304b\u3057\u3001SiC\u306e\u9577\u6240\u306b\u306f\u88fd\u9020\u4e0a\u306e\u5927\u304d\u306a\u8ab2\u984c\u304c\u4f34\u3046\u3002\u6975\u3081\u3066\u9ad8\u3044\u7d50\u6676\u6210\u9577\u6e29\u5ea6\u3068\u8907\u96d1\u306a\u683c\u5b50\u69cb\u9020\u306e\u305f\u3081\u3001SiC\u30a6\u30a7\u30fc\u30cf\u306f\u7d50\u6676\u6210\u9577\u3001\u30b9\u30e9\u30a4\u30b9\u3001\u7814\u78e8\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u51e6\u7406\u4e2d\u306b\u3055\u307e\u3056\u307e\u306a\u69cb\u9020\u6b20\u9665\u3084\u8868\u9762\u6b20\u9665\u304c\u767a\u751f\u3057\u3084\u3059\u3044\u3002\u3053\u308c\u3089\u306e\u6b20\u9665\u306f\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u4fe1\u983c\u6027\u3001\u6b69\u7559\u307e\u308a\u3001\u96fb\u6c17\u7684\u6027\u80fd\u306b\u76f4\u63a5\u5f71\u97ff\u3057\u307e\u3059\u3002.<\/p>\n\n\n\n

\u3053\u306e\u8ad6\u6587\u3067\u306f\u3001SiC\u30a6\u30a7\u30cf\u30fc\u306b\u898b\u3089\u308c\u308b\u4e00\u822c\u7684\u306a\u6b20\u9665\u3068\u3001\u305d\u306e\u8b58\u5225\u3068\u7279\u6027\u8a55\u4fa1\u306b\u7528\u3044\u3089\u308c\u308b\u691c\u67fb\u65b9\u6cd5\u306b\u3064\u3044\u3066\u5b66\u8853\u7684\u306a\u6982\u8981\u3092\u8aac\u660e\u3059\u308b\u3002.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

SiC\u30a6\u30a7\u30cf\u30fc\u3067\u6b20\u9665\u7ba1\u7406\u304c\u91cd\u8981\u306a\u7406\u7531<\/h2>\n\n\n\n

SiC\u5358\u7d50\u6676\u306f\u3001\u4e00\u822c\u7684\u306b\u7269\u7406\u7684\u6c17\u76f8\u6210\u9577\u6cd5\uff08PVT\u6cd5\uff09\u3092\u7528\u3044\u3066\u88fd\u9020\u3055\u308c\u308b\u3002\u7d50\u6676\u6210\u9577\u4e2d\u3001\u6e29\u5ea6\u52fe\u914d\u3001\u904e\u98fd\u548c\u5ea6\u3001\u5fdc\u529b\u5206\u5e03\u3001\u4e0d\u7d14\u7269\u306e\u6df7\u5165\u306a\u3069\u306e\u5909\u52d5\u306b\u3088\u308a\u3001\u7d50\u6676\u5b66\u7684\u306a\u6b20\u9665\u304c\u751f\u3058\u308b\u3053\u3068\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n\n\n\n

\u6bd4\u8f03\u7684\u4f4e\u3044\u6b20\u9665\u5bc6\u5ea6\u3067\u3042\u3063\u3066\u3082\u3001\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u3067\u306f\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u91cd\u5927\u306a\u554f\u984c\u3092\u5f15\u304d\u8d77\u3053\u3059\u53ef\u80fd\u6027\u304c\u3042\u308b\uff1a<\/p>\n\n\n\n

    \n
  • \u30ea\u30fc\u30af\u96fb\u6d41\u306e\u5897\u52a0<\/li>\n\n\n\n
  • \u964d\u4f0f\u96fb\u5727\u306e\u4f4e\u6e1b<\/li>\n\n\n\n
  • \u30aa\u30f3\u62b5\u6297\u306e\u4e0a\u6607<\/li>\n\n\n\n
  • \u52d5\u4f5c\u4e2d\u306e\u30c7\u30d0\u30a4\u30b9\u306e\u52a3\u5316<\/li>\n\n\n\n
  • \u88fd\u9020\u6b69\u7559\u307e\u308a\u306e\u4f4e\u4e0b<\/li>\n<\/ul>\n\n\n\n

    \u9ad8\u96fb\u5727\u30fb\u9ad8\u51fa\u529b\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u306f\u3001\u6b20\u9665\u5bc6\u5ea6\u306fSiC\u57fa\u677f\u306e\u8a8d\u5b9a\u306b\u304a\u3044\u3066\u6700\u3082\u91cd\u8981\u306a\u30d1\u30e9\u30e1\u30fc\u30bf\u306e\u4e00\u3064\u3068\u306a\u3063\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n

    SiC\u30a6\u30a7\u30cf\u30fc\u306e\u4e00\u822c\u7684\u306a\u6b20\u9665<\/h2>\n\n\n\n

    1.\u30de\u30a4\u30af\u30ed\u30d1\u30a4\u30d7<\/h3>\n\n\n\n

    \u30de\u30a4\u30af\u30ed\u30d1\u30a4\u30d7\u306f\u3001\u306d\u3058\u8ee2\u4f4d\u306b\u95a2\u9023\u3059\u308b\u4e2d\u7a7a\u30b3\u30a2\u306e\u7d50\u6676\u5b66\u7684\u6b20\u9665\u3067\u3042\u308a\u3001\u6b74\u53f2\u7684\u306bSiC\u57fa\u677f\u306b\u304a\u3051\u308b\u6700\u3082\u6df1\u523b\u306a\u6b20\u9665\u306e\u3072\u3068\u3064\u3068\u8003\u3048\u3089\u308c\u3066\u304d\u305f\u3002.<\/p>\n\n\n\n

    \u7279\u5fb4<\/p>\n\n\n\n

      \n
    • \u30c1\u30e5\u30fc\u30d6\u72b6\u306e\u4e2d\u7a7a\u69cb\u9020<\/li>\n\n\n\n
    • \u76f4\u5f84\u306f\u901a\u5e380.1\uff5e10\u03bcm<\/li>\n\n\n\n
    • \u7d50\u6676\u6210\u9577\u65b9\u5411\u3092\u8cab\u304f<\/li>\n\n\n\n
    • \u9ad8\u96fb\u5727\u30c7\u30d0\u30a4\u30b9\u306e\u6027\u80fd\u306b\u5f37\u3044\u5f71\u97ff<\/li>\n<\/ul>\n\n\n\n

      \u30de\u30a4\u30af\u30ed\u30d1\u30a4\u30d7\u306f\u5c40\u6240\u7684\u306a\u96fb\u754c\u96c6\u4e2d\u3092\u5f15\u304d\u8d77\u3053\u3059\u305f\u3081\u3001\u8010\u5727\u3092\u8457\u3057\u304f\u4f4e\u4e0b\u3055\u305b\u308b\u3002\u6700\u8fd1\u306e4\u30a4\u30f3\u30c1\u304a\u3088\u30736\u30a4\u30f3\u30c1SiC\u30a6\u30a7\u30cf\u3067\u306f\u3001\u30de\u30a4\u30af\u30ed\u30d1\u30a4\u30d7\u5bc6\u5ea6\u306e\u4f4e\u6e1b\u304c\u304b\u306a\u308a\u9032\u3093\u3067\u3044\u308b\u304c\u3001\u9ad8\u5ea6\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u306f\u4f9d\u7136\u3068\u3057\u3066\u53b3\u3057\u3044\u5236\u5fa1\u304c\u5fc5\u8981\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n

      2.\u306d\u3058\u5207\u308a\u30b9\u30af\u30ea\u30e5\u30fc\u8ee2\u4f4d\uff08TSD\uff09<\/h3>\n\n\n\n

      \u306d\u3058\u8ee2\u4f4d\u306f\u7d50\u6676\u6210\u9577\u8ef8\u306b\u6cbf\u3063\u3066\u4f1d\u64ad\u3057\u3001\u3089\u305b\u3093\u72b6\u306e\u6210\u9577\u6a5f\u69cb\u3068\u95a2\u9023\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n

      \u60f3\u5b9a\u3055\u308c\u308b\u5f71\u97ff\u306b\u306f\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u3082\u306e\u304c\u3042\u308b\uff1a<\/p>\n\n\n\n

        \n
      • \u8868\u9762\u306e\u51f9\u51f8<\/li>\n\n\n\n
      • \u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u30b9\u30c6\u30c3\u30d7\u6b6a\u307f<\/li>\n\n\n\n
      • \u5c40\u6240\u7684\u306a\u96fb\u6c17\u7684\u4e0d\u5747\u4e00\u6027<\/li>\n<\/ul>\n\n\n\n

        \u3053\u308c\u3089\u306e\u6b20\u9665\u306f\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u306e\u54c1\u8cea\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u3001\u30c7\u30d0\u30a4\u30b9\u7279\u6027\u306b\u3070\u3089\u3064\u304d\u3092\u3082\u305f\u3089\u3059\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/p>\n\n\n\n

        3.\u57fa\u5e95\u9762\u8131\u81fc\uff08BPD\uff09<\/h3>\n\n\n\n

        \u57fa\u5e95\u9762\u8ee2\u4f4d\u306f\u3001SiC\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u6280\u8853\u306b\u304a\u3044\u3066\u6700\u3082\u5e83\u304f\u7814\u7a76\u3055\u308c\u3066\u3044\u308b\u6b20\u9665\u306e\u4e00\u3064\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n

        \u7279\u5fb4<\/p>\n\n\n\n

          \n
        • \u7d50\u6676\u306e\u57fa\u5e95\u9762\u5185\u306b\u5b58\u5728\u3059\u308b<\/li>\n\n\n\n
        • \u88c5\u7f6e\u306e\u52d5\u4f5c\u4e2d\u306b\u5909\u5f62\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b<\/li>\n\n\n\n
        • \u30d0\u30a4\u30dd\u30fc\u30e9\u30fb\u30c7\u30d0\u30a4\u30b9\u3067\u7279\u306b\u554f\u984c<\/li>\n<\/ul>\n\n\n\n

          BPD\u306f\u30d0\u30a4\u30dd\u30fc\u30e9\u52a3\u5316\u3068\u547c\u3070\u308c\u308b\u73fe\u8c61\u306b\u95a2\u9023\u3057\u3066\u304a\u308a\u3001\u30ad\u30e3\u30ea\u30a2\u6ce8\u5165\u4e0b\u3067\u306e\u7a4d\u5c64\u6b20\u9665\u306e\u62e1\u5927\u304c\u30c7\u30d0\u30a4\u30b9\u306e\u6027\u80fd\u3092\u5f90\u3005\u306b\u4f4e\u4e0b\u3055\u305b\u308b\u3002.<\/p>\n\n\n\n

          \u7d50\u679c\u306b\u306f\u4ee5\u4e0b\u304c\u542b\u307e\u308c\u308b\uff1a<\/p>\n\n\n\n

            \n
          • \u9806\u96fb\u5727\u30c9\u30ea\u30d5\u30c8<\/li>\n\n\n\n
          • \u30c7\u30d0\u30a4\u30b9\u5bff\u547d\u306e\u77ed\u7e2e<\/li>\n\n\n\n
          • \u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u306e\u4e0d\u5b89\u5b9a\u3055<\/li>\n<\/ul>\n\n\n\n

            4.\u30b9\u30bf\u30c3\u30ad\u30f3\u30b0\u969c\u5bb3<\/h3>\n\n\n\n

            \u7a4d\u5c64\u6b20\u9665\u306f\u3001\u539f\u5b50\u5c64\u306e\u6b63\u5e38\u306a\u7a4d\u5c64\u9806\u5e8f\u304c\u4e71\u308c\u305f\u3068\u304d\u306b\u767a\u751f\u3059\u308b\u3002.<\/p>\n\n\n\n

            SiC\u6750\u6599\u3067\u306f\u3001\u7a4d\u5c64\u6b20\u9665\u304c\u767a\u751f\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\uff1a<\/p>\n\n\n\n

              \n
            • \u5c40\u6240\u7684\u306a\u96fb\u5b50\u69cb\u9020\u306e\u5909\u5316<\/li>\n\n\n\n
            • \u30ad\u30e3\u30ea\u30a2\u8f38\u9001\u3078\u306e\u5f71\u97ff<\/li>\n\n\n\n
            • \u5149\u5b66\u7684\u307e\u305f\u306f\u96fb\u6c17\u7684\u7279\u6027\u306e\u52a3\u5316<\/li>\n<\/ul>\n\n\n\n

              \u3042\u308b\u7a2e\u306e\u7a4d\u5c64\u6b20\u9665\u306f\u96fb\u6c17\u7684\u30b9\u30c8\u30ec\u30b9\u3067\u62e1\u5927\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u3001\u9577\u671f\u4fe1\u983c\u6027\u7814\u7a76\u306b\u3068\u3063\u3066\u7279\u306b\u91cd\u8981\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n

              5.\u8868\u9762\u306e\u50b7<\/h3>\n\n\n\n

              \u30b0\u30e9\u30a4\u30f3\u30c7\u30a3\u30f3\u30b0\u3001\u30e9\u30c3\u30d4\u30f3\u30b0\u3001\u30b1\u30df\u30ab\u30eb\u30fb\u30e1\u30ab\u30cb\u30ab\u30eb\u30fb\u30dd\u30ea\u30c3\u30b7\u30e5\uff08CMP\uff09\u3001\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u306a\u3069\u306e\u6a5f\u68b0\u7684\u51e6\u7406\u5de5\u7a0b\u306f\u3001\u30b9\u30af\u30e9\u30c3\u30c1\u3092\u5f15\u304d\u8d77\u3053\u3059\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n\n\n\n

              \u5178\u578b\u7684\u306a\u7279\u5fb4\uff1a<\/p>\n\n\n\n

                \n
              • \u7dda\u72b6\u306e\u8868\u9762\u30de\u30fc\u30af<\/li>\n\n\n\n
              • \u5c40\u6240\u7684\u306a\u7c97\u3055\u306e\u5909\u5316<\/li>\n\n\n\n
              • \u8868\u9762\u53cd\u5c04\u7387\u306e\u9055\u3044<\/li>\n<\/ul>\n\n\n\n

                \u6d45\u3044\u50b7\u3067\u3042\u3063\u3066\u3082\u3001\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u3084\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u306e\u5747\u4e00\u6027\u3092\u963b\u5bb3\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/p>\n\n\n\n

                6.\u7c92\u5b50\u6c5a\u67d3<\/h3>\n\n\n\n

                \u7c92\u5b50\u306e\u767a\u751f\u6e90\u306f\u4ee5\u4e0b\u306e\u901a\u308a\u3067\u3042\u308b\uff1a<\/p>\n\n\n\n

                  \n
                • \u7814\u78e8\u6b8b\u6e23<\/li>\n\n\n\n
                • \u74b0\u5883\u6c5a\u67d3<\/li>\n\n\n\n
                • \u6a5f\u5668\u306e\u6469\u8017<\/li>\n\n\n\n
                • \u30a6\u30a7\u30cf\u30fc\u642c\u9001\u30d7\u30ed\u30bb\u30b9<\/li>\n<\/ul>\n\n\n\n

                  \u8868\u9762\u306e\u7c92\u5b50\u304c\u539f\u56e0\u3068\u306a\u308b\u3053\u3068\u304c\u3042\u308b\uff1a<\/p>\n\n\n\n

                    \n
                  • \u30d1\u30bf\u30fc\u30f3\u6b20\u9665<\/li>\n\n\n\n
                  • \u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u7570\u5e38<\/li>\n\n\n\n
                  • \u53ce\u91cf\u306e\u6e1b\u5c11<\/li>\n<\/ul>\n\n\n\n

                    \u3053\u306e\u3088\u3046\u306a\u30ea\u30b9\u30af\u304c\u3042\u308b\u305f\u3081\u3001SiC\u30a6\u30a7\u30cf\u30fc\u88fd\u9020\u306b\u306f\u53b3\u683c\u306a\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u7ba1\u7406\u304c\u8981\u6c42\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n

                    7.\u30a8\u30c3\u30b8\u30fb\u30c1\u30c3\u30d4\u30f3\u30b0\u3068\u30de\u30a4\u30af\u30ed\u30af\u30e9\u30c3\u30af<\/h3>\n\n\n\n

                    \u30a6\u30a7\u30fc\u30cf\u306e\u30b9\u30e9\u30a4\u30b9\u3084\u30a8\u30c3\u30b8\u30b0\u30e9\u30a4\u30f3\u30c7\u30a3\u30f3\u30b0\u306e\u969b\u3001\u6a5f\u68b0\u7684\u30b9\u30c8\u30ec\u30b9\u304c\u30a8\u30c3\u30b8\u306b\u30c0\u30e1\u30fc\u30b8\u3092\u4e0e\u3048\u308b\u3053\u3068\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n\n\n\n

                    \u4f8b\u3092\u6319\u3052\u3088\u3046\uff1a<\/p>\n\n\n\n

                      \n
                    • \u30a8\u30c3\u30b8\u9aa8\u6298<\/li>\n\n\n\n
                    • \u5c0f\u3055\u306a\u6b20\u3051<\/li>\n\n\n\n
                    • \u30de\u30a4\u30af\u30ed\u30af\u30e9\u30c3\u30af\u306e\u5f62\u6210<\/li>\n<\/ul>\n\n\n\n

                      \u3053\u306e\u3088\u3046\u306a\u6b20\u9665\u306f\u6a5f\u68b0\u7684\u5f37\u5ea6\u3092\u4f4e\u4e0b\u3055\u305b\u3001\u81ea\u52d5\u5316\u51e6\u7406\u4e2d\u306e\u30a6\u30a7\u30cf\u7834\u640d\u30ea\u30b9\u30af\u3092\u5897\u5927\u3055\u305b\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/p>\n\n\n\n

                      SiC\u30a6\u30a7\u30cf\u306e\u6b20\u9665\u691c\u67fb\u65b9\u6cd5<\/h2>\n\n\n\n

                      \u6b20\u9665\u306e\u7a2e\u985e\u306b\u3088\u3063\u3066\u7269\u7406\u7684\u7279\u6027\u304c\u7570\u306a\u308b\u305f\u3081\u3001\u8907\u6570\u306e\u7279\u6027\u8a55\u4fa1\u6280\u8853\u304c\u4f75\u7528\u3055\u308c\u308b\u3053\u3068\u304c\u591a\u3044\u3002.<\/p>\n\n\n\n

                      \u691c\u67fb\u65b9\u6cd5<\/th>\u4e3b\u8981\u6a5f\u80fd<\/th>\u5178\u578b\u7684\u306a\u691c\u51fa\u53ef\u80fd\u6b20\u9665<\/th><\/tr><\/thead>
                      \u5149\u5b66\u9855\u5fae\u93e1<\/td>\u8868\u9762\u89b3\u5bdf<\/td>\u50b7\u3001\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u3001\u30a8\u30c3\u30b8\u306e\u6b20\u9665<\/td><\/tr>
                      \u539f\u5b50\u9593\u529b\u9855\u5fae\u93e1 (AFM)<\/td>\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30b9\u30b1\u30fc\u30eb\u306e\u30c8\u30dd\u30b0\u30e9\u30d5\u30a3\u30fc<\/td>\u8868\u9762\u7c97\u3055<\/td><\/tr>
                      X\u7dda\u56de\u6298(XRD)<\/td>\u7d50\u6676\u69cb\u9020\u89e3\u6790<\/td>\u683c\u5b50\u306e\u6b6a\u307f<\/td><\/tr>
                      KOH\u30a8\u30c3\u30c1\u30f3\u30b0<\/td>\u8131\u81fc\u90e8\u4f4d\u3092\u660e\u3089\u304b\u306b\u3059\u308b<\/td>BPD\u3001TSD<\/td><\/tr>
                      \u30d5\u30a9\u30c8\u30eb\u30df\u30cd\u30c3\u30bb\u30f3\u30b9\uff08PL\uff09\u30de\u30c3\u30d4\u30f3\u30b0<\/td>\u6b20\u9665\u753b\u50cf<\/td>\u8ee2\u4f4d\u3001\u30de\u30a4\u30af\u30ed\u30d1\u30a4\u30d7<\/td><\/tr>
                      X\u7dda\u30c8\u30dd\u30b0\u30e9\u30d5\u30a3\u30fc\uff08XRT\uff09<\/td>\u5185\u90e8\u7d50\u6676\u691c\u67fb<\/td>\u30de\u30a4\u30af\u30ed\u30d1\u30a4\u30d7\u3001\u7a4d\u5c64\u6b20\u9665<\/td><\/tr>
                      \u30e9\u30de\u30f3\u5206\u5149\u6cd5<\/td>\u5fdc\u529b\u3068\u683c\u5b50\u306e\u8a55\u4fa1<\/td>\u69cb\u9020\u7684\u7570\u5e38<\/td><\/tr>
                      \u81ea\u52d5\u5149\u5b66\u691c\u67fb (AOI)<\/td>\u5927\u898f\u6a21\u306a\u8868\u9762\u30b9\u30af\u30ea\u30fc\u30cb\u30f3\u30b0<\/td>\u8868\u9762\u306e\u6b20\u9665<\/td><\/tr>
                      \u30ec\u30fc\u30b6\u30fc\u6563\u4e71\u691c\u67fb<\/td>\u7c92\u5b50\u691c\u51fa<\/td>\u8868\u9762\u6c5a\u67d3<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

                      \u3053\u308c\u3089\u306e\u6280\u8853\u306e\u3046\u3061\u3001PL\u30de\u30c3\u30d4\u30f3\u30b0\u3068X\u7dda\u30c8\u30dd\u30b0\u30e9\u30d5\u30a3\u306f\u3001\u5927\u9762\u7a4d\u306e\u6b20\u9665\u8a55\u4fa1\u306e\u305f\u3081\u306e\u696d\u754c\u6a19\u6e96\u306e\u30a2\u30d7\u30ed\u30fc\u30c1\u3068\u306a\u3063\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n

                      \u5178\u578b\u7684\u306aSiC\u30a6\u30a7\u30cf\u691c\u67fb\u30ef\u30fc\u30af\u30d5\u30ed\u30fc<\/h2>\n\n\n\n

                      \u5305\u62ec\u7684\u306aSiC\u54c1\u8cea\u7ba1\u7406\u30d7\u30ed\u30bb\u30b9\u306b\u306f\u901a\u5e38\u3001\u3044\u304f\u3064\u304b\u306e\u691c\u67fb\u6bb5\u968e\u304c\u542b\u307e\u308c\u308b\uff1a<\/p>\n\n\n\n

                      \u57fa\u677f\u53d7\u3051\u5165\u308c\u691c\u67fb\u2192\u8868\u9762\u7279\u6027\u8a55\u4fa1\u2192\u6b20\u9665\u30de\u30c3\u30d4\u30f3\u30b0\u2192\u7d50\u6676\u54c1\u8cea\u5206\u6790\u2192\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u8a8d\u5b9a\u2192\u6700\u7d42\u691c\u67fb<\/p>\n\n\n\n

                      \u9ad8\u5ea6\u306a\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u306e\u5834\u5408\u3001\u8ffd\u52a0\u8a55\u4fa1\u306b\u306f\u4ee5\u4e0b\u304c\u542b\u307e\u308c\u308b\uff1a<\/p>\n\n\n\n

                        \n
                      • \u30d5\u30eb\u30a6\u30a7\u30fc\u30cfPL\u30de\u30c3\u30d4\u30f3\u30b0<\/li>\n\n\n\n
                      • \u6b20\u9665\u5bc6\u5ea6\u7d71\u8a08<\/li>\n\n\n\n
                      • \u7d50\u6676\u65b9\u4f4d\u89e3\u6790<\/li>\n\n\n\n
                      • \u81ea\u52d5\u6b20\u9665\u5206\u985e<\/li>\n<\/ul>\n\n\n\n

                        \u3053\u308c\u3089\u306e\u30b9\u30c6\u30c3\u30d7\u306f\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u4e00\u8cab\u6027\u3092\u5411\u4e0a\u3055\u305b\u3001\u4e0b\u6d41\u306e\u88fd\u9020\u3092\u6700\u9069\u5316\u3059\u308b\u306e\u306b\u5f79\u7acb\u3064\u3002.<\/p>\n\n\n\n

                        \u65b0\u305f\u306a\u30c8\u30ec\u30f3\u30c9AI\u306b\u3088\u308b\u6b20\u9665\u5206\u6790<\/h2>\n\n\n\n

                        SiC\u6280\u8853\u304c8\u30a4\u30f3\u30c1\u57fa\u677f\u306e\u3088\u3046\u306a\u5927\u53e3\u5f84\u30a6\u30a7\u30fc\u30cf\u306b\u79fb\u884c\u3059\u308b\u306b\u3064\u308c\u3001\u5f93\u6765\u306e\u691c\u67fb\u30a2\u30d7\u30ed\u30fc\u30c1\u3067\u306f\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u3068\u8907\u96d1\u3055\u306e\u70b9\u3067\u9650\u754c\u306b\u76f4\u9762\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n

                        \u6700\u8fd1\u306e\u52d5\u5411\u3067\u306f\u3001\u307e\u3059\u307e\u3059\u7d71\u5408\u304c\u9032\u3093\u3067\u3044\u308b\uff1a<\/p>\n\n\n\n

                          \n
                        • \u4eba\u5de5\u77e5\u80fd\u306b\u3088\u308b\u753b\u50cf\u8a8d\u8b58<\/li>\n\n\n\n
                        • \u6a5f\u68b0\u5b66\u7fd2\u306b\u3088\u308b\u6b20\u9665\u5206\u985e<\/li>\n\n\n\n
                        • \u81ea\u52d5\u6b20\u9665\u4e88\u6e2c<\/li>\n\n\n\n
                        • \u5168\u5de5\u7a0b\u30c7\u30fc\u30bf\u76f8\u95a2\u30b7\u30b9\u30c6\u30e0<\/li>\n<\/ul>\n\n\n\n

                          \u4eca\u5f8c\u306e\u691c\u67fb\u6226\u7565\u306f\u3001\u6b20\u9665\u691c\u51fa\u304b\u3089\u4e88\u6e2c\u7684\u54c1\u8cea\u7ba1\u7406\u3078\u3068\u9032\u5316\u3057\u3066\u3044\u304f\u3053\u3068\u304c\u4e88\u60f3\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n

                          \u7d50\u8ad6<\/h2>\n\n\n\n

                          \u6b20\u9665\u5236\u5fa1\u306f\u3001SiC \u30a6\u30a7\u30cf\u30fc\u6280\u8853\u306b\u304a\u3051\u308b\u4e2d\u5fc3\u7684\u306a\u8ab2\u984c\u306e\u4e00\u3064\u3067\u3042\u308b\u3002\u30de\u30a4\u30af\u30ed\u30d1\u30a4\u30d7\u3001\u306d\u3058\u308c\u8ee2\u4f4d\u3001\u57fa\u5e95\u9762\u8ee2\u4f4d\u3001\u7a4d\u5c64\u6b20\u9665\u306a\u3069\u306e\u69cb\u9020\u6b20\u9665\u306f\u3001\u8868\u9762\u306e\u6b20\u9665\u3084\u6c5a\u67d3\u3068\u3068\u3082\u306b\u3001\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u6027\u80fd\u306b\u5927\u304d\u304f\u5f71\u97ff\u3057\u307e\u3059\u3002.<\/p>\n\n\n\n

                          PL\u30de\u30c3\u30d4\u30f3\u30b0\u3001X\u7dda\u30c8\u30dd\u30b0\u30e9\u30d5\u30a3\u3001KOH\u30a8\u30c3\u30c1\u30f3\u30b0\u3001\u81ea\u52d5\u5149\u5b66\u691c\u67fb\u306a\u3069\u306e\u9ad8\u5ea6\u306a\u7279\u6027\u8a55\u4fa1\u6280\u8853\u306b\u3088\u308a\u3001\u30e1\u30fc\u30ab\u30fc\u306f\u57fa\u677f\u306e\u54c1\u8cea\u3092\u3088\u308a\u9069\u5207\u306b\u8a55\u4fa1\u3057\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u6b69\u7559\u307e\u308a\u3092\u5411\u4e0a\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002SiC\u304c\u9ad8\u51fa\u529b\u30fb\u9ad8\u4fe1\u983c\u6027\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3078\u3068\u62e1\u5927\u3057\u7d9a\u3051\u308b\u4e2d\u3001\u3088\u308a\u30a4\u30f3\u30c6\u30ea\u30b8\u30a7\u30f3\u30c8\u3067\u7cbe\u5bc6\u306a\u691c\u67fb\u6280\u8853\u306f\u3001\u534a\u5c0e\u4f53\u7523\u696d\u306b\u304a\u3044\u3066\u307e\u3059\u307e\u3059\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3059\u3053\u3068\u306b\u306a\u308b\u3067\u3057\u3087\u3046\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

                          As the demand for high-efficiency power electronics continues to grow, Silicon Carbide (SiC) wafers have become a foundational material for next-generation semiconductor devices. Compared with conventional silicon substrates, SiC offers a wider bandgap, higher critical electric field strength, superior thermal conductivity, and better high-temperature performance. These characteristics make SiC indispensable in electric vehicles, renewable energy systems, industrial power modules, and high-frequency communication devices. However, the advantages of SiC come with significant manufacturing challenges. Due to the extremely high crystal growth temperatures and complex lattice structure, SiC wafers are prone to various structural and surface defects during crystal growth, slicing, polishing, and epitaxial processing. These defects directly affect device reliability, yield, […]<\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_uag_custom_page_level_css":"","footnotes":""},"categories":[12,27],"tags":[1663],"class_list":["post-8884","post","type-post","status-publish","format-standard","hentry","category-news","category-companynews","tag-sic-wafers"],"acf":[],"uagb_featured_image_src":{"full":false,"thumbnail":false,"medium":false,"medium_large":false,"large":false,"1536x1536":false,"2048x2048":false,"trp-custom-language-flag":false,"woocommerce_thumbnail":false,"woocommerce_single":false,"woocommerce_gallery_thumbnail":false},"uagb_author_info":{"display_name":"lydia","author_link":"https:\/\/www.sic-wafers.com\/ja\/author\/lydia\/"},"uagb_comment_info":0,"uagb_excerpt":"As the demand for high-efficiency power electronics continues to grow, Silicon Carbide (SiC) wafers have become a foundational material for next-generation semiconductor devices. Compared with conventional silicon substrates, SiC offers a wider bandgap, higher critical electric field strength, superior thermal conductivity, and better high-temperature performance. These characteristics make SiC indispensable in electric vehicles, renewable energy…","_links":{"self":[{"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/posts\/8884","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/comments?post=8884"}],"version-history":[{"count":1,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/posts\/8884\/revisions"}],"predecessor-version":[{"id":8886,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/posts\/8884\/revisions\/8886"}],"wp:attachment":[{"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/media?parent=8884"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/categories?post=8884"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ja\/wp-json\/wp\/v2\/tags?post=8884"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}