{"id":8762,"date":"2026-03-20T16:01:07","date_gmt":"2026-03-20T08:01:07","guid":{"rendered":"https:\/\/www.sic-wafers.com\/?p=8762"},"modified":"2026-03-20T16:05:52","modified_gmt":"2026-03-20T08:05:52","slug":"a-novel-hf-free-cleaning-method-for-silicon-carbide-wafers-mechanism-and-performance-evaluation","status":"publish","type":"post","link":"https:\/\/www.sic-wafers.com\/ko\/a-novel-hf-free-cleaning-method-for-silicon-carbide-wafers-mechanism-and-performance-evaluation\/","title":{"rendered":"\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc6e8\uc774\ud37c\ub97c \uc704\ud55c \uc0c8\ub85c\uc6b4 HF-free \uc138\ucc99 \ubc29\ubc95: \uba54\ucee4\ub2c8\uc998 \ubc0f \uc131\ub2a5 \ud3c9\uac00"},"content":{"rendered":"
<\/div>\n

\uc804\ub825 \uc804\uc790\uc81c\ud488\uc758 \uae09\uc18d\ud55c \ubc1c\uc804\uacfc \ud568\uaed8, \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC)<\/strong> \ub294 \ub113\uc740 \ubc34\ub4dc\uac2d, \ub192\uc740 \uc5f4\uc804\ub3c4\uc728, \ub6f0\uc5b4\ub09c \uc804\uae30\uc801 \uc131\ub2a5\uc73c\ub85c \ucc28\uc138\ub300 \ub514\ubc14\uc774\uc2a4\uc758 \uc720\ub9dd \uc18c\uc7ac\ub85c \ub5a0\uc624\ub974\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uae30\uc874 \uc2e4\ub9ac\ucf58\uc5d0 \ube44\ud574 SiC\ub294 \ub354 \ub192\uc740 \uc804\uc555 \ud5c8\uc6a9 \uc624\ucc28, \ub354 \ub0ae\uc740 \uc2a4\uc704\uce6d \uc190\uc2e4, \ub354 \ub098\uc740 \uace0\uc628 \uc548\uc815\uc131\uc744 \uac16\ucd98 \ub514\ubc14\uc774\uc2a4\ub97c \uad6c\ud604\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

\uadf8\ub7ec\ub098 SiC \uc6e8\uc774\ud37c<\/a> \ub294 \uc5ec\uc804\ud788 \uc911\uc694\ud55c \uacfc\uc81c\ub85c \ub0a8\uc544 \uc788\uc2b5\ub2c8\ub2e4. \uc6d0\ub798 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\uc6a9\uc73c\ub85c \uac1c\ubc1c\ub41c \ub110\ub9ac \uc0ac\uc6a9\ub418\ub294 RCA \uc138\uc815 \uacf5\uc815\uc740 \ud45c\uba74 \ud654\ud559 \ubc0f \uacb0\ud569 \uad6c\uc870\uc758 \uadfc\ubcf8\uc801\uc778 \ucc28\uc774\ub85c \uc778\ud574 SiC\uc5d0 \uc9c1\uc811 \uc801\uc6a9\ud558\uae30 \uc5b4\ub824\uc6b8 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

\uc774 \uc5f0\uad6c\uc5d0\uc11c\ub294 SiC\uc5d0 \ub300\ud55c RCA \uc138\ucc99\uc758 \ud55c\uacc4\ub97c \uc870\uc0ac\ud558\uace0 \uc804\uc774 \uae08\uc18d \ubcf5\ud569\uccb4 \ud65c\uc131\ud654 \uacfc\uc0b0\ud654\uc218\uc18c\uc5d0 \uae30\ubc18\ud55c \uc0c8\ub85c\uc6b4 HF-free \uc138\ucc99 \ubc29\ubc95\uc744 \uc18c\uac1c\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

SiC\uc6a9 RCA \ud074\ub9ac\ub2dd\uc758 \ud55c\uacc4<\/strong><\/h2>\n\n\n\n

RCA \uc138\ucc99 \uacf5\uc815\uc5d0\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uc2e4\ub9ac\ucf58 \ud45c\uba74\uc5d0\uc11c \ub124\uc774\ud2f0\ube0c \uc0b0\ud654\ubb3c\uacfc \uc624\uc5fc \ubb3c\uc9c8\uc744 \uc81c\uac70\ud558\uae30 \uc704\ud574 \ubd88\uc0b0(HF)\uc774 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \ud558\uc9c0\ub9cc SiC\uc5d0 \uc801\uc6a9\ud558\uba74<\/p>\n\n\n\n

    \n
  • X-\uc120 \uad11\uc804\uc790 \ubd84\uad11\ubc95(XPS) \ubd84\uc11d \uacb0\uacfc \ubd88\uc18c\uac00 SiC\uc758 \ud0c4\uc18c \uc6d0\uc790\uc640 \ubc18\uc751\ud558\uc5ec \ubc14\ub78c\uc9c1\ud558\uc9c0 \uc54a\uc740 \ud654\ud559 \uacb0\ud569\uc744 \ud615\uc131\ud558\ub294 \uac83\uc73c\ub85c \ub098\ud0c0\ub0ac\uc2b5\ub2c8\ub2e4.<\/li>\n\n\n\n
  • \ucef4\ud4e8\ud130 \uc2dc\ubbac\ub808\uc774\uc158\uc5d0 \ub530\ub974\uba74 \uc774\ub7ec\ud55c \uc0c1\ud638\uc791\uc6a9\uc740 SiC\uc758 \ubc34\ub4dc\uac2d\uc744 \uc881\ud600\uc11c \uc7a0\uc7ac\uc801\uc73c\ub85c \uc804\uc790 \ud2b9\uc131\uc744 \uc800\ud558\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n\n\n\n

    \uc774\ub7ec\ud55c \uacb0\uacfc\ub294 HF \uae30\ubc18 \ucc98\ub9ac\uac00 SiC\uc758 \uace0\uc720\ud55c \ud2b9\uc131\uc744 \uc190\uc0c1\uc2dc\ucf1c \uae30\uc874\uc758 RCA \uc138\ucc99\uc774 \uace0\uc131\ub2a5 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc801\ud569\ud558\uc9c0 \uc54a\uc744 \uc218 \uc788\uc74c\uc744 \uc2dc\uc0ac\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

    \"\"<\/figure>\n\n\n\n

    \uc0c8\ub85c\uc6b4 \uccad\uc18c \ubc29\ubc95 \uac1c\ubc1c<\/strong><\/h2>\n\n\n\n

    \uc774\ub7ec\ud55c \ud55c\uacc4\ub97c \ud574\uacb0\ud558\uae30 \uc704\ud574 \ub2e4\uc74c\uacfc \uac19\uc740 \ud2b9\uc9d5\uc744 \uac00\uc9c4 \uc0c8\ub85c\uc6b4 \uccad\uc18c \ubc29\uc2dd\uc774 \uac1c\ubc1c\ub418\uc5c8\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n

      \n
    • \ubd88\uc18c\ub85c \uc778\ud55c \uc190\uc0c1\uc744 \uc81c\uac70\ud558\ub294 HF \ud504\ub9ac \uacf5\uc815<\/li>\n\n\n\n
    • \uc804\uc774 \uae08\uc18d \ucc29\uccb4 \uc0ac\uc6a9(\uc608: \uad6c\ub9ac \ucc29\uccb4)<\/li>\n\n\n\n
    • \uacfc\uc0b0\ud654\uc218\uc18c(H\u2082O\u2082)\ub97c \ud65c\uc131\ud654\ud558\uc5ec \ubc18\uc751\uc131 \ub77c\ub514\uce7c \uc0dd\uc131<\/li>\n\n\n\n
    • \uccad\uc18c \ub2e8\uacc4\uac00 3\ub2e8\uacc4\ub85c \uac04\uc18c\ud654\ub428<\/li>\n<\/ul>\n\n\n\n

      \uae08\uc18d\uc744 \ud53c\ud558\ub294 \uae30\uc874 \ubc29\uc2dd\uacfc \ub2ec\ub9ac, \uc774 \ubc29\ubc95\uc740 \uc758\ub3c4\uc801\uc73c\ub85c \uc81c\uc5b4\ub41c \uae08\uc18d \ubcf5\ud569\uccb4\ub97c \ub3c4\uc785\ud558\uc5ec \ub77c\ub514\uce7c \ud615\uc131\uc744 \ucd09\ub9e4\ud568\uc73c\ub85c\uc368 \uc624\uc5fc \ubb3c\uc9c8 \uc81c\uac70 \ud6a8\uc728\uc744 \ub192\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n

      \"\"<\/figure>\n\n\n\n

      \uc2e4\ud5d8\uc801 \ud3c9\uac00 \ubc29\ubc95<\/strong><\/h2>\n\n\n\n

      \uccad\uc18c \uc131\ub2a5\uc744 \ud3c9\uac00\ud558\uae30 \uc704\ud574 \uc5ec\ub7ec \uac00\uc9c0 \ud2b9\uc131\ud654 \uae30\ubc95\uc744 \uc0ac\uc6a9\ud588\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n

        \n
      • \uc6d0\uc790 \ud604\ubbf8\uacbd(AFM):<\/strong> \ud45c\uba74 \ud615\ud0dc \ubc0f \uc785\uc790 \uac10\uc9c0<\/li>\n\n\n\n
      • \ubb3c \uc811\ucd09\uac01 \uce21\uc815:<\/strong> \ud45c\uba74 \uc2b5\uc724\uc131 \ubc0f \uc720\uae30 \uc794\ub958\ubb3c \ud3c9\uac00<\/li>\n\n\n\n
      • \uce78\ub378\ub77c \ud45c\uba74 \uac80\uc0ac \uc2dc\uc2a4\ud15c:<\/strong> 3\uc778\uce58 \uc6e8\uc774\ud37c\uc758 \uacb0\ud568 \uac80\uc0ac<\/li>\n\n\n\n
      • \ucd1d\ubc18\uc0ac X-\uc120 \ud615\uad11(TXRF):<\/strong> \ubbf8\ub7c9 \uae08\uc18d \uc624\uc5fc \ubd84\uc11d<\/li>\n<\/ul>\n\n\n\n

        \uacb0\uacfc \ubc0f \ud1a0\ub860<\/strong><\/h2>\n\n\n\n

        \ud45c\uba74 \ud615\ud0dc \ubc0f \uccad\uacb0\ub3c4<\/strong><\/h3>\n\n\n\n

        AFM \uc774\ubbf8\uc9c0\uac00 \uc774\ub97c \ubcf4\uc5ec\uc90d\ub2c8\ub2e4:<\/p>\n\n\n\n

          \n
        • \uccad\uc18c\ud558\uae30 \uc804\uc5d0 SiC \ud45c\uba74\uc5d0\ub294 \uc218\ub9ce\uc740 \uc785\uc790\uc640 \uc720\uae30 \uc794\ub958\ubb3c(\uc18c\uc218\uc131 \uc624\uc5fc\uc744 \ub098\ud0c0\ub0b4\ub294 \uc811\ucd09\uac01 ~70\u00b0)\uc774 \ud3ec\ud568\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n\n\n\n
        • RCA \uccad\uc18c \ud6c4\uc5d0\ub3c4 \ud45c\uba74\uc5d0 \uc794\uc5ec \uc785\uc790\uac00 \ub0a8\uc544 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n\n\n\n
        • \uc0c8\ub85c\uc6b4 \uc138\ucc99 \ubc29\ubc95 \uc774\ud6c4\uc5d0\ub294 \ub208\uc5d0 \ubcf4\uc774\ub294 \uc785\uc790\uac00 \uac10\uc9c0\ub418\uc9c0 \uc54a\uc73c\uba70 \uc811\ucd09\uac01\uc774 ~42\u00b0\ub85c \uac10\uc18c\ud558\uc5ec \ud45c\uba74 \uce5c\uc218\uc131\uc774 \uac1c\uc120\ub418\uc5c8\uc74c\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4.<\/li>\n<\/ul>\n\n\n\n

          \uc774\ub7ec\ud55c \uacb0\uacfc\ub294 \uc785\uc790\uc640 \uc720\uae30 \uc624\uc5fc\ubb3c\uc9c8(\uc608: \uc641\uc2a4 \uc794\uc5ec\ubb3c)\uc744 \ubaa8\ub450 \ud6a8\uacfc\uc801\uc73c\ub85c \uc81c\uac70\ud558\ub294 \uac83\uc744 \ud655\uc778\uc2dc\ucf1c \uc90d\ub2c8\ub2e4.<\/p>\n\n\n\n

          \uc6e8\uc774\ud37c\uc758 \uacb0\ud568 \uac10\uc18c <\/strong><\/h3>\n\n\n\n

          3\uc778\uce58 SiC \uc6e8\uc774\ud37c\uc758 \uce78\ub378\ub77c \uac80\uc0ac\uc5d0\uc11c \uc0c8\ub85c\uc6b4 \ubc29\ubc95\uc744 \uc801\uc6a9\ud55c \ud6c4 \uc785\uc790 \uc218\uac00 \ud604\uc800\ud788 \uac10\uc18c\ud55c \uac83\uc73c\ub85c \ub098\ud0c0\ub0ac\uc2b5\ub2c8\ub2e4. \uc774 \uad00\ucc30\uc740 AFM \uacb0\uacfc\uc640 \uc77c\uce58\ud558\uba70 \uc6e8\uc774\ud37c \uaddc\ubaa8\uc5d0\uc11c \uacf5\uc815\uc744 \uac80\uc99d\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

          \uc774 \uba54\ucee4\ub2c8\uc998\uc758 \uc6d0\uc778\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n

            \n
          • \uad6c\ub9ac \ubcf5\ud569\uccb4\uc758 \ucd09\ub9e4 \uc791\uc6a9<\/li>\n\n\n\n
          • \uacfc\uc0b0\ud654\uc218\uc18c\ub85c \uc778\ud55c \ud65c\uc131 \uc0b0\uc18c \ub77c\ub514\uce7c \uc0dd\uc131 \uc81c\uc5b4<\/li>\n\n\n\n
          • \uc0b0\ud654 \ubc18\uc751\uc744 \ud1b5\ud55c \ud45c\uba74 \uc785\uc790 \uc81c\uac70 \uac15\ud654<\/li>\n<\/ul>\n\n\n\n

            \uae08\uc18d \uc624\uc5fc \ubd84\uc11d<\/strong><\/h3>\n\n\n\n

            \uad6c\ub9ac \ubcf5\ud569\uccb4\ub97c \uc0ac\uc6a9\ud588\uc74c\uc5d0\ub3c4 \ubd88\uad6c\ud558\uace0:<\/p>\n\n\n\n

              \n
            • TXRF \ubd84\uc11d\uc73c\ub85c \uc6e8\uc774\ud37c \ud45c\uba74\uc5d0 \uc794\ub958 \uad6c\ub9ac\ub97c \uac10\uc9c0\ud558\uc9c0 \ubabb\ud568<\/li>\n\n\n\n
            • \uc138\ucc99 \ud6c4 \ub2e4\ub978 \uae08\uc18d \uc624\uc5fc \ubb3c\uc9c8\uc774 \uad00\ucc30\ub418\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n\n\n\n

              \uc774\ub294 \uc774 \uacf5\uc815\uc774 2\ucc28 \uc624\uc5fc \uc5c6\uc774 \ub192\uc740 \uc138\ucc99 \ud6a8\uc728\uc744 \ub2ec\uc131\ud558\uc5ec \ubc18\ub3c4\uccb4 \uacf5\uc815\uc758 \uc8fc\uc694 \uad00\uc2ec\uc0ac\ub97c \ud574\uacb0\ud55c\ub2e4\ub294 \uac83\uc744 \uc758\ubbf8\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

              \uc0c8\ub85c\uc6b4 \uccad\uc18c \ubc29\ubc95\uc758 \uc7a5\uc810<\/strong><\/h2>\n\n\n\n
                \n
              • HF\ub85c \uc778\ud55c SiC \uc190\uc0c1 \uc81c\uac70<\/li>\n\n\n\n
              • \ub0ae\uc740 \uacb0\ud568 \ubc00\ub3c4\uc640 \ub192\uc740 \ud45c\uba74 \uccad\uacb0\ub3c4 \ub2ec\uc131<\/li>\n\n\n\n
              • \uc785\uc790\uc640 \uc720\uae30 \uc794\uc5ec\ubb3c\uc744 \ubaa8\ub450 \uc81c\uac70\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n
              • \ud504\ub85c\uc138\uc2a4 \ubcf5\uc7a1\uc131 \uac10\uc18c(\ub2e8\uacc4 \uc218 \uac10\uc18c)<\/li>\n\n\n\n
              • \uc794\ub958 \uae08\uc18d \uc624\uc5fc \ubc29\uc9c0<\/li>\n\n\n\n
              • \uc0b0\uc5c5\uc6a9 \uc6e8\uc774\ud37c \uaddc\ubaa8 \ud504\ub85c\uc138\uc2f1\uacfc \ud638\ud658<\/li>\n<\/ul>\n\n\n\n
                \"\"<\/figure>\n\n\n\n

                \uacb0\ub860<\/strong><\/h2>\n\n\n\n

                \uc774 \uc5f0\uad6c\ub294 HF\uac00 \uc7ac\ub8cc\uc758 \ud45c\uba74\uacfc \uc804\uc790 \ud2b9\uc131\uc5d0 \ubbf8\uce58\ub294 \uc190\uc0c1 \ud6a8\uacfc\ub85c \uc778\ud574 \uae30\uc874\uc758 RCA \uc138\ucc99\uc774 SiC \uc6e8\uc774\ud37c\uc5d0 \uc644\uc804\ud788 \uc801\ud569\ud558\uc9c0 \uc54a\ub2e4\ub294 \uac83\uc744 \ubcf4\uc5ec\uc90d\ub2c8\ub2e4.<\/p>\n\n\n\n

                \"\"<\/figure>\n\n\n\n

                \uc804\uc774 \uae08\uc18d \ubcf5\ud569\uccb4 \ud65c\uc131\ud654 \uacfc\uc0b0\ud654\uc218\uc18c\ub97c \uae30\ubc18\uc73c\ub85c \ud558\ub294 \uc81c\uc548\ub41c HF-free \uc138\ucc99 \ubc29\ubc95\uc740 \ud6a8\uacfc\uc801\uc778 \ub300\uc548\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \uc774\ub97c \ud1b5\ud574<\/p>\n\n\n\n

                  \n
                • \ud6a8\uc728\uc801\uc778 \uc785\uc790 \ubc0f \uc624\uc5fc \ubb3c\uc9c8 \uc81c\uac70<\/li>\n\n\n\n
                • SiC \uc7ac\ub8cc \ud2b9\uc131 \ubcf4\uc874<\/li>\n\n\n\n
                • \ud45c\uba74 \uc2b5\uc724\uc131 \ubc0f \uccad\uacb0\ub3c4 \uac1c\uc120<\/li>\n\n\n\n
                • \ubc18\ub3c4\uccb4 \uc81c\uc870\ub97c \uc704\ud55c \ud655\uc7a5 \uac00\ub2a5\ud55c \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/li>\n<\/ul>\n\n\n\n

                  \uc774 \uc811\uadfc \ubc29\uc2dd\uc740 \uace0\uc131\ub2a5 \uc804\ub825 \ubc0f RF \ub514\ubc14\uc774\uc2a4\uc758 \uc9c0\uc18d\uc801\uc778 \uac1c\ubc1c\uc744 \uc9c0\uc6d0\ud558\ub294 \ucca8\ub2e8 SiC \uc6e8\uc774\ud37c \ud504\ub85c\uc138\uc2f1\uc744 \uc704\ud55c \uc720\ub9dd\ud55c \uacbd\ub85c\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

                  <\/p>","protected":false},"excerpt":{"rendered":"

                  With the rapid development of power electronics, silicon carbide (SiC) has emerged as a promising material for next-generation devices due to its wide bandgap, high thermal conductivity, and excellent electrical performance. Compared with traditional silicon, SiC enables devices with higher voltage tolerance, lower switching losses, and better high-temperature stability. However, the surface preparation of SiC […]<\/p>\n","protected":false},"author":2,"featured_media":8765,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_uag_custom_page_level_css":"","footnotes":""},"categories":[12,27],"tags":[2095,2090,2091,2093,2097,2092,2088,2094,2089,2096],"class_list":["post-8762","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news","category-companynews","tag-afm-wafer-analysis","tag-hf-free-cleaning","tag-rca-cleaning-sic","tag-semiconductor-wafer-cleaning","tag-sic-defect-reduction","tag-sic-surface-treatment","tag-sic-wafer-cleaning","tag-sic-wafer-process","tag-silicon-carbide-cleaning-method","tag-txrf-contamination-analysis"],"acf":[],"uagb_featured_image_src":{"full":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3.webp",1080,526,false],"thumbnail":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-150x150.webp",150,150,true],"medium":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-300x146.webp",300,146,true],"medium_large":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-768x374.webp",768,374,true],"large":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-1024x499.webp",800,390,true],"1536x1536":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3.webp",1080,526,false],"2048x2048":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3.webp",1080,526,false],"trp-custom-language-flag":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-18x9.webp",18,9,true],"woocommerce_thumbnail":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-300x300.webp",300,300,true],"woocommerce_single":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-600x292.webp",600,292,true],"woocommerce_gallery_thumbnail":["https:\/\/www.sic-wafers.com\/wp-content\/uploads\/2026\/03\/A-Novel-HF-Free-Cleaning-Method-for-Silicon-Carbide-Wafers-Mechanism-and-Performance-Evaluation3-100x100.webp",100,100,true]},"uagb_author_info":{"display_name":"lydia","author_link":"https:\/\/www.sic-wafers.com\/ko\/author\/lydia\/"},"uagb_comment_info":0,"uagb_excerpt":"With the rapid development of power electronics, silicon carbide (SiC) has emerged as a promising material for next-generation devices due to its wide bandgap, high thermal conductivity, and excellent electrical performance. Compared with traditional silicon, SiC enables devices with higher voltage tolerance, lower switching losses, and better high-temperature stability. However, the surface preparation of SiC…","_links":{"self":[{"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/posts\/8762","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/comments?post=8762"}],"version-history":[{"count":3,"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/posts\/8762\/revisions"}],"predecessor-version":[{"id":8769,"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/posts\/8762\/revisions\/8769"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/media\/8765"}],"wp:attachment":[{"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/media?parent=8762"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/categories?post=8762"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/tags?post=8762"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}