{"id":8884,"date":"2026-05-14T14:49:25","date_gmt":"2026-05-14T06:49:25","guid":{"rendered":"https:\/\/www.sic-wafers.com\/?p=8884"},"modified":"2026-05-15T11:19:56","modified_gmt":"2026-05-15T03:19:56","slug":"common-defects-in-sic-wafers-and-inspection-methods","status":"publish","type":"post","link":"https:\/\/www.sic-wafers.com\/ko\/common-defects-in-sic-wafers-and-inspection-methods\/","title":{"rendered":"SiC \uc6e8\uc774\ud37c\uc758 \uc77c\ubc18\uc801\uc778 \uacb0\ud568 \ubc0f \uac80\uc0ac \ubc29\ubc95"},"content":{"rendered":"
<\/div>\n

\uace0\ud6a8\uc728 \uc804\ub825 \uc804\uc790\uae30\uae30\uc5d0 \ub300\ud55c \uc218\uc694\uac00 \uacc4\uc18d \uc99d\uac00\ud568\uc5d0 \ub530\ub77c \ud0c4\ud654\uaddc\uc18c(SiC) \uc6e8\uc774\ud37c\ub294 \ucc28\uc138\ub300 \ubc18\ub3c4\uccb4 \uae30\uae30\uc758 \uae30\ubcf8 \uc7ac\ub8cc\ub85c \uc790\ub9ac \uc7a1\uc558\uc2b5\ub2c8\ub2e4. \uae30\uc874 \uc2e4\ub9ac\ucf58 \uae30\ud310\uacfc \ube44\uad50\ud558\uc5ec SiC\ub294 \ub354 \ub113\uc740 \ubc34\ub4dc\uac2d, \ub354 \ub192\uc740 \uc784\uacc4 \uc804\uae30\uc7a5 \uac15\ub3c4, \uc6b0\uc218\ud55c \uc5f4 \uc804\ub3c4\uc131, \ub354 \ub098\uc740 \uace0\uc628 \uc131\ub2a5\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud2b9\uc131\uc73c\ub85c \uc778\ud574 \uc804\uae30 \uc790\ub3d9\ucc28, \uc7ac\uc0dd \uc5d0\ub108\uc9c0 \uc2dc\uc2a4\ud15c, \uc0b0\uc5c5\uc6a9 \uc804\ub825 \ubaa8\ub4c8 \ubc0f \uace0\uc8fc\ud30c \ud1b5\uc2e0 \uc7a5\uce58\uc5d0\uc11c SiC\ub294 \ud544\uc218 \ubd88\uac00\uacb0\ud55c \uc18c\uc7ac\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n

\uadf8\ub7ec\ub098 SiC\uc758 \uc7a5\uc810\uc740 \uc81c\uc870 \uacfc\uc815\uc5d0\uc11c \uc0c1\ub2f9\ud55c \uc5b4\ub824\uc6c0\uc744 \uc218\ubc18\ud569\ub2c8\ub2e4. \ub9e4\uc6b0 \ub192\uc740 \uacb0\uc815 \uc131\uc7a5 \uc628\ub3c4\uc640 \ubcf5\uc7a1\ud55c \uaca9\uc790 \uad6c\uc870\ub85c \uc778\ud574 SiC \uc6e8\uc774\ud37c\ub294 \uacb0\uc815 \uc131\uc7a5, \uc2ac\ub77c\uc774\uc2f1, \uc5f0\ub9c8 \ubc0f \uc5d0\ud53c\ud0dd\uc15c \ucc98\ub9ac \uacfc\uc815\uc5d0\uc11c \ub2e4\uc591\ud55c \uad6c\uc870\uc801 \ubc0f \ud45c\uba74 \uacb0\ud568\uc774 \ubc1c\uc0dd\ud558\uae30 \uc27d\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uacb0\ud568\uc740 \ub514\ubc14\uc774\uc2a4\uc758 \uc2e0\ub8b0\uc131, \uc218\uc728, \uc804\uae30\uc801 \uc131\ub2a5\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n\n\n\n

\uc774 \ubb38\uc11c\uc5d0\uc11c\ub294 SiC \uc6e8\uc774\ud37c\uc5d0\uc11c \ubc1c\uacac\ub418\ub294 \uc77c\ubc18\uc801\uc778 \uacb0\ud568\uacfc \uc774\ub97c \uc2dd\ubcc4\ud558\uace0 \ud2b9\uc131\ud654\ud558\ub294 \ub370 \uc0ac\uc6a9\ub418\ub294 \uac80\uc0ac \ubc29\ubc95\uc5d0 \ub300\ud55c \ud559\uc220\uc801 \uac1c\uc694\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

SiC \uc6e8\uc774\ud37c\uc5d0\uc11c \uacb0\ud568 \uad00\ub9ac\uac00 \uc911\uc694\ud55c \uc774\uc720<\/h2>\n\n\n\n

SiC \ub2e8\uacb0\uc815\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \ubb3c\ub9ac\uc801 \uc99d\uae30 \uc218\uc1a1(PVT) \ubc29\ubc95\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc0dd\uc0b0\ub429\ub2c8\ub2e4. \uacb0\uc815\uc774 \uc131\uc7a5\ud558\ub294 \ub3d9\uc548 \uc628\ub3c4 \uad6c\ubc30, \uacfc\ud3ec\ud654, \uc751\ub825 \ubd84\ud3ec \ubc0f \ubd88\uc21c\ubb3c \ud63c\uc785\uc758 \ubcc0\ub3d9\uc73c\ub85c \uc778\ud574 \uacb0\uc815\ud559\uc801 \ubd88\uc644\uc804\uc131\uc774 \ubc1c\uc0dd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

\uc0c1\ub300\uc801\uc73c\ub85c \ub0ae\uc740 \uacb0\ud568 \ubc00\ub3c4\ub77c\ub3c4 \uc804\ub825 \ub514\ubc14\uc774\uc2a4\uc5d0\uc11c\ub294 \ub2e4\uc74c\uacfc \uac19\uc740 \uc2ec\uac01\ud55c \ubb38\uc81c\ub97c \uc77c\uc73c\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n

    \n
  • \ub204\uc124 \uc804\ub958 \uc99d\uac00<\/li>\n\n\n\n
  • \ud56d\ubcf5 \uc804\uc555 \uac10\uc18c<\/li>\n\n\n\n
  • \ud5a5\uc0c1\ub41c \uc628\uc800\ud56d<\/li>\n\n\n\n
  • \uc791\ub3d9 \uc911 \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5 \uc800\ud558<\/li>\n\n\n\n
  • \ub0ae\uc740 \uc81c\uc870 \uc218\uc728<\/li>\n<\/ul>\n\n\n\n

    \uace0\uc804\uc555 \ubc0f \uace0\uc804\ub825 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0, \uacb0\ud568 \ubc00\ub3c4\ub294 SiC \uae30\ud310 \uac80\uc99d\uc5d0\uc11c \uac00\uc7a5 \uc911\uc694\ud55c \ud30c\ub77c\ubbf8\ud130 \uc911 \ud558\ub098\uac00 \ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

    SiC \uc6e8\uc774\ud37c\uc758 \uc77c\ubc18\uc801\uc778 \uacb0\ud568<\/h2>\n\n\n\n

    1. \ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504<\/h3>\n\n\n\n

    \ub9c8\uc774\ud06c\ub85c \ud30c\uc774\ud504\ub294 \ub098\uc0ac \uc804\uc704\uc640 \uad00\ub828\ub41c \uc911\uacf5 \ucf54\uc5b4 \uacb0\uc815\ud559\uc801 \uacb0\ud568\uc73c\ub85c, \uc5ed\uc0ac\uc801\uc73c\ub85c SiC \uae30\ud310\uc5d0\uc11c \uac00\uc7a5 \uc2ec\uac01\ud55c \uacb0\ud568 \uc911 \ud558\ub098\ub85c \uac04\uc8fc\ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

    \ud2b9\uc131:<\/p>\n\n\n\n

      \n
    • \ud29c\ube0c\ud615 \uc911\uacf5 \uad6c\uc870<\/li>\n\n\n\n
    • \uc9c1\uacbd\uc740 \uc77c\ubc18\uc801\uc73c\ub85c 0.1-10 \u03bcm \ubc94\uc704\uc785\ub2c8\ub2e4.<\/li>\n\n\n\n
    • \uacb0\uc815 \uc131\uc7a5 \ubc29\ud5a5\uc744 \ud1b5\ud574 \ud655\uc7a5<\/li>\n\n\n\n
    • \uace0\uc804\uc555 \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uc5d0 \uac15\ub825\ud55c \uc601\ud5a5<\/li>\n<\/ul>\n\n\n\n

      \ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504\ub294 \uad6d\ubd80\uc801\uc778 \uc804\uae30\uc7a5 \ub18d\ub3c4\ub97c \uc0dd\uc131\ud558\uae30 \ub54c\ubb38\uc5d0 \ud56d\ubcf5 \uc804\uc555\uc744 \ud06c\uac8c \uc904\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ucd5c\uc2e0 4\uc778\uce58 \ubc0f 6\uc778\uce58 SiC \uc6e8\uc774\ud37c\uc5d0\uc11c \ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504 \ubc00\ub3c4\ub97c \uc904\uc774\ub294 \ub370 \uc0c1\ub2f9\ud55c \uc9c4\uc804\uc774 \uc788\uc5c8\uc9c0\ub9cc, \uace0\uae09 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0 \uc5c4\uaca9\ud55c \uc81c\uc5b4\uac00 \uc5ec\uc804\ud788 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

      2. \uc2a4\ub808\ub529 \ub098\uc0ac \ud0c8\uad6c(TSD)<\/h3>\n\n\n\n

      \ub098\uc0ac\uc0b0 \ub098\uc0ac \ud0c8\uad6c\ub294 \uacb0\uc815 \uc131\uc7a5 \ucd95\uc744 \ub530\ub77c \uc804\ud30c\ub418\uba70 \ub098\uc120\ud615 \uc131\uc7a5 \uba54\ucee4\ub2c8\uc998\uacfc \uad00\ub828\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

      \uc7a0\uc7ac\uc801\uc778 \uc601\ud5a5\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n

        \n
      • \ud45c\uba74 \ud615\ud0dc \ubd88\uaddc\uce59\uc131<\/li>\n\n\n\n
      • \uc5d0\ud53c\ud0dd\uc15c \uc2a4\ud15d \uc65c\uace1<\/li>\n\n\n\n
      • \uad6d\ubd80\uc801\uc778 \uc804\uae30\uc801 \ubd88\uade0\uc77c\uc131<\/li>\n<\/ul>\n\n\n\n

        \uc774\ub7ec\ud55c \uacb0\ud568\uc740 \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5 \ud488\uc9c8\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\uace0 \ub514\ubc14\uc774\uc2a4 \ud2b9\uc131\uc5d0 \ubcc0\ub3d9\uc131\uc744 \ucd08\ub798\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

        3. \uae30\uc800\uba74 \ud0c8\uad6c(BPD)<\/h3>\n\n\n\n

        \uae30\uc800\uba74 \uc804\uc704\ub294 SiC \uc804\ub825 \uc18c\uc790 \uae30\uc220\uc5d0\uc11c \uac00\uc7a5 \uad11\ubc94\uc704\ud558\uac8c \uc5f0\uad6c\ub41c \uacb0\ud568 \uc911 \ud558\ub098\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n

        \ud2b9\uc131:<\/p>\n\n\n\n

          \n
        • \ud06c\ub9ac\uc2a4\ud0c8\uc758 \uae30\uc800\uba74 \ub0b4\uc5d0 \uc874\uc7ac\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n
        • \uae30\uae30 \uc791\ub3d9 \uc911 \ubcc0\ud615 \uac00\ub2a5<\/li>\n\n\n\n
        • \ud2b9\ud788 \uc591\uadf9\uc131 \uc7a5\uce58\uc5d0 \ubb38\uc81c\uac00 \uc788\ub294 \uacbd\uc6b0<\/li>\n<\/ul>\n\n\n\n

          BPD\ub294 \uce90\ub9ac\uc5b4 \uc8fc\uc785\uc5d0 \ub530\ub978 \uc2a4\ud0dd \uacb0\ud568 \ud655\uc7a5\uc774 \uc810\ucc28\uc801\uc73c\ub85c \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uc744 \uc800\ud558\uc2dc\ud0a4\ub294 \uc591\uadf9\uc131 \uc800\ud558 \ud604\uc0c1\uacfc \uad00\ub828\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

          \uacb0\uacfc\uc5d0\ub294 \ub2e4\uc74c\uc774 \ud3ec\ud568\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n

            \n
          • \uc21c\ubc29\ud5a5 \uc804\uc555 \ub4dc\ub9ac\ud504\ud2b8<\/li>\n\n\n\n
          • \ub514\ubc14\uc774\uc2a4 \uc218\uba85 \ub2e8\ucd95<\/li>\n\n\n\n
          • \uc131\ub2a5 \ubd88\uc548\uc815\uc131<\/li>\n<\/ul>\n\n\n\n

            4. \uc2a4\ud0dd \uacb0\ud568<\/h3>\n\n\n\n

            \uc2a4\ud0dc\ud0b9 \uacb0\ud568\uc740 \uc6d0\uc790\uce35 \uc2a4\ud0dc\ud0b9\uc758 \uc815\uc0c1\uc801\uc778 \uc21c\uc11c\uac00 \uc911\ub2e8\ub420 \ub54c \ubc1c\uc0dd\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

            SiC \uc18c\uc7ac\uc758 \uacbd\uc6b0 \uc2a4\ud0dd \uacb0\ud568\uc774 \ubc1c\uc0dd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n

              \n
            • \ub85c\uceec \uc804\uc790 \uad6c\uc870 \ubcc0\uacbd<\/li>\n\n\n\n
            • \uce90\ub9ac\uc5b4 \uc6b4\uc1a1\uc5d0 \uc601\ud5a5<\/li>\n\n\n\n
            • \uad11\ud559 \ub610\ub294 \uc804\uae30\uc801 \ud2b9\uc131 \uc800\ud558<\/li>\n<\/ul>\n\n\n\n

              \ud2b9\uc815 \uc2a4\ud0dc\ud0b9 \uacb0\ud568\uc740 \uc804\uae30\uc801 \uc2a4\ud2b8\ub808\uc2a4\ub97c \ubc1b\uc73c\uba74 \ud655\uc7a5\ub420 \uc218 \uc788\uc73c\ubbc0\ub85c \uc7a5\uae30\uc801\uc778 \uc2e0\ub8b0\uc131 \uc5f0\uad6c\uc5d0 \ud2b9\ud788 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

              5. \ud45c\uba74 \uc2a4\ud06c\ub798\uce58<\/h3>\n\n\n\n

              \uc5f0\uc0ad, \ub798\ud551, \ud654\ud559\uc801 \uae30\uacc4 \uc5f0\ub9c8(CMP), \uc6e8\uc774\ud37c \ucde8\uae09\uacfc \uac19\uc740 \uae30\uacc4\uc801 \ucc98\ub9ac \ub2e8\uacc4\uc5d0\uc11c\ub294 \uc2a4\ud06c\ub798\uce58\uac00 \ubc1c\uc0dd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

              \uc77c\ubc18\uc801\uc778 \ud2b9\uc131:<\/p>\n\n\n\n

                \n
              • \uc120\ud615 \ud45c\uba74 \ub9c8\ud06c<\/li>\n\n\n\n
              • \uad6d\ubd80\uc801\uc778 \uac70\uce60\uae30 \ubcc0\ud654<\/li>\n\n\n\n
              • \ud45c\uba74 \ubc18\uc0ac\uc728 \ucc28\uc774<\/li>\n<\/ul>\n\n\n\n

                \uc595\uc740 \uc2a4\ud06c\ub798\uce58\ub3c4 \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c\uc640 \uc5d0\ud53c\ud0dd\uc15c \uade0\uc77c\uc131\uc744 \ubc29\ud574\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

                6. \uc785\uc790 \uc624\uc5fc<\/h3>\n\n\n\n

                \ud30c\ud2f0\ud074\uc758 \ucd9c\ucc98\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n

                  \n
                • \uc5f0\ub9c8 \uc794\uc5ec\ubb3c<\/li>\n\n\n\n
                • \ud658\uacbd \uc624\uc5fc<\/li>\n\n\n\n
                • \uc7a5\ube44 \ub9c8\ubaa8<\/li>\n\n\n\n
                • \uc6e8\uc774\ud37c \uc6b4\uc1a1 \ud504\ub85c\uc138\uc2a4<\/li>\n<\/ul>\n\n\n\n

                  \ud45c\uba74 \uc785\uc790\uac00 \uc6d0\uc778\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n

                    \n
                  • \ud328\ud130\ub2dd \uacb0\ud568<\/li>\n\n\n\n
                  • \uc5d0\ud53c\ud0dd\uc15c \uc774\uc0c1<\/li>\n\n\n\n
                  • \uc218\uc728 \uac10\uc18c<\/li>\n<\/ul>\n\n\n\n

                    \uc774\ub7ec\ud55c \uc704\ud5d8 \ub54c\ubb38\uc5d0 SiC \uc6e8\uc774\ud37c \uc0dd\uc0b0\uc5d0\ub294 \uc5c4\uaca9\ud55c \ud074\ub9b0\ub8f8 \uad00\ub9ac\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

                    7. \uac00\uc7a5\uc790\ub9ac \uce58\ud551 \ubc0f \ubbf8\uc138 \uade0\uc5f4<\/h3>\n\n\n\n

                    \uc6e8\uc774\ud37c \uc2ac\ub77c\uc774\uc2f1 \ub610\ub294 \uc5e3\uc9c0 \uc5f0\uc0ad \uc911\uc5d0 \uae30\uacc4\uc801 \uc751\ub825\uc73c\ub85c \uc778\ud574 \uc5e3\uc9c0\uac00 \uc190\uc0c1\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

                    \uc608\ub97c \ub4e4\uba74 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n

                      \n
                    • \uac00\uc7a5\uc790\ub9ac \uace8\uc808<\/li>\n\n\n\n
                    • \uc791\uc740 \uce69<\/li>\n\n\n\n
                    • \ubbf8\uc138 \uade0\uc5f4 \ud615\uc131<\/li>\n<\/ul>\n\n\n\n

                      \uc774\ub7ec\ud55c \uacb0\ud568\uc740 \uc790\ub3d9\ud654 \ucc98\ub9ac \uc911\uc5d0 \uae30\uacc4\uc801 \uac15\ub3c4\ub97c \uac10\uc18c\uc2dc\ud0a4\uace0 \uc6e8\uc774\ud37c \ud30c\uc190 \uc704\ud5d8\uc744 \uc99d\uac00\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

                      SiC \uc6e8\uc774\ud37c \uacb0\ud568 \uac80\uc0ac \ubc29\ubc95<\/h2>\n\n\n\n

                      \uacb0\ud568 \uc720\ud615\uc5d0 \ub530\ub77c \ubb3c\ub9ac\uc801 \ud2b9\uc131\uc774 \ub2e4\ub974\uae30 \ub54c\ubb38\uc5d0 \uc5ec\ub7ec \ud2b9\uc131\ud654 \uae30\ubc95\uc744 \ud568\uaed8 \uc0ac\uc6a9\ud558\ub294 \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

                      \uac80\uc0ac \ubc29\ubc95<\/th>\uc8fc\uc694 \uae30\ub2a5<\/th>\uc77c\ubc18\uc801\uc778 \uac10\uc9c0 \uac00\ub2a5\ud55c \uacb0\ud568<\/th><\/tr><\/thead>
                      \uad11\ud559 \ud604\ubbf8\uacbd<\/td>\ud45c\uba74 \uad00\uce21<\/td>\uc2a4\ud06c\ub798\uce58, \uc785\uc790, \uac00\uc7a5\uc790\ub9ac \uacb0\ud568<\/td><\/tr>
                      \uc6d0\uc790\ub825 \ud604\ubbf8\uacbd(AFM)<\/td>\ub098\ub178\ubbf8\ud130 \uaddc\ubaa8\uc758 \uc9c0\ud615<\/td>\ud45c\uba74 \uac70\uce60\uae30<\/td><\/tr>
                      X\uc120 \ud68c\uc808(XRD)<\/td>\uacb0\uc815 \uad6c\uc870 \ubd84\uc11d<\/td>\uaca9\uc790 \uc65c\uace1<\/td><\/tr>
                      KOH \uc5d0\uce6d<\/td>\ud0c8\uad6c \ubd80\uc704 \ud45c\uc2dc<\/td>BPD, TSD<\/td><\/tr>
                      \uad11\ubc1c\uad11(PL) \ub9e4\ud551<\/td>\uacb0\ud568 \uc774\ubbf8\uc9d5<\/td>\ud0c8\uad6c, \ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504<\/td><\/tr>
                      X-\uc120 \uc9c0\ud615(XRT)<\/td>\ub0b4\ubd80 \uc218\uc815 \uac80\uc0ac<\/td>\ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504, \uc2a4\ud0dc\ud0b9 \uacb0\ud568<\/td><\/tr>
                      \ub77c\ub9cc \ubd84\uad11\ud559<\/td>\uc2a4\ud2b8\ub808\uc2a4 \ubc0f \uaca9\uc790 \ud3c9\uac00<\/td>\uad6c\uc870\uc801 \uc774\uc0c1<\/td><\/tr>
                      \uc790\ub3d9 \uad11\ud559 \uac80\uc0ac(AOI)<\/td>\ub300\uaddc\ubaa8 \ud45c\uba74 \uac80\uc0ac<\/td>\ud45c\uba74 \uacb0\ud568<\/td><\/tr>
                      \ub808\uc774\uc800 \uc0b0\ub780 \uac80\uc0ac<\/td>\uc785\uc790 \uac10\uc9c0<\/td>\ud45c\uba74 \uc624\uc5fc<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

                      \uc774\ub7ec\ud55c \uae30\uc220 \uc911 PL \ub9e4\ud551\uacfc X-\uc120 \uc9c0\ud615\ub3c4\ub294 \ub300\uba74\uc801 \uacb0\ud568 \ud3c9\uac00\ub97c \uc704\ud55c \uc5c5\uacc4 \ud45c\uc900 \uc811\uadfc \ubc29\uc2dd\uc774 \ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

                      \uc77c\ubc18\uc801\uc778 SiC \uc6e8\uc774\ud37c \uac80\uc0ac \uc6cc\ud06c\ud50c\ub85c<\/h2>\n\n\n\n

                      \ud3ec\uad04\uc801\uc778 SiC \ud488\uc9c8 \uad00\ub9ac \ud504\ub85c\uc138\uc2a4\uc5d0\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uc5ec\ub7ec \uac80\uc0ac \ub2e8\uacc4\uac00 \ud3ec\ud568\ub429\ub2c8\ub2e4:<\/p>\n\n\n\n

                      \uc785\uace0 \uae30\ud310 \uac80\uc0ac \u2192 \ud45c\uba74 \ud2b9\uc131 \u2192 \uacb0\ud568 \ub9e4\ud551 \u2192 \uacb0\uc815 \ud488\uc9c8 \ubd84\uc11d \u2192 \uc5d0\ud53c\ud0dd\uc2dc \uac80\uc99d \u2192 \ucd5c\uc885 \uac80\uc0ac<\/p>\n\n\n\n

                      \uace0\uae09 \ub514\ubc14\uc774\uc2a4 \uc81c\uc791\uc758 \uacbd\uc6b0 \ucd94\uac00 \ud3c9\uac00\uac00 \ud3ec\ud568\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n

                        \n
                      • \ud480 \uc6e8\uc774\ud37c PL \ub9e4\ud551<\/li>\n\n\n\n
                      • \uacb0\ud568 \ubc00\ub3c4 \ud1b5\uacc4<\/li>\n\n\n\n
                      • \uacb0\uc815 \ubc30\ud5a5 \ubd84\uc11d<\/li>\n\n\n\n
                      • \uc790\ub3d9\ud654\ub41c \uacb0\ud568 \ubd84\ub958<\/li>\n<\/ul>\n\n\n\n

                        \uc774\ub7ec\ud55c \ub2e8\uacc4\ub294 \ud504\ub85c\uc138\uc2a4 \uc77c\uad00\uc131\uc744 \uac1c\uc120\ud558\uace0 \ub2e4\uc6b4\uc2a4\ud2b8\ub9bc \uc81c\uc870\ub97c \ucd5c\uc801\ud654\ud558\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub429\ub2c8\ub2e4.<\/p>\n\n\n\n

                        \uc0c8\ub85c\uc6b4 \ud2b8\ub80c\ub4dc: AI \uae30\ubc18 \uacb0\ud568 \ubd84\uc11d<\/h2>\n\n\n\n

                        SiC \uae30\uc220\uc774 8\uc778\uce58 \uae30\ud310\uacfc \uac19\uc774 \ub354 \ud070 \uc6e8\uc774\ud37c \uc9c1\uacbd\uc73c\ub85c \uc774\ub3d9\ud568\uc5d0 \ub530\ub77c \uae30\uc874 \uac80\uc0ac \ubc29\uc2dd\uc740 \ucc98\ub9ac\ub7c9\uacfc \ubcf5\uc7a1\uc131\uc5d0\uc11c \ud55c\uacc4\uc5d0 \uc9c1\uba74\ud588\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

                        \ucd5c\uadfc \uac1c\ubc1c\uc740 \uc810\uc810 \ub354 \ud1b5\ud569\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n

                          \n
                        • \uc778\uacf5 \uc9c0\ub2a5 \uc774\ubbf8\uc9c0 \uc778\uc2dd<\/li>\n\n\n\n
                        • \uba38\uc2e0 \ub7ec\ub2dd \uacb0\ud568 \ubd84\ub958<\/li>\n\n\n\n
                        • \uc790\ub3d9\ud654\ub41c \uacb0\ud568 \uc608\uce21<\/li>\n\n\n\n
                        • \uc804\uccb4 \ud504\ub85c\uc138\uc2a4 \ub370\uc774\ud130 \uc0c1\uad00\uad00\uacc4 \uc2dc\uc2a4\ud15c<\/li>\n<\/ul>\n\n\n\n

                          \ud5a5\ud6c4 \uac80\uc0ac \uc804\ub7b5\uc740 \uacb0\ud568 \ud0d0\uc9c0\uc5d0\uc11c \uc608\uce21\uc801 \ud488\uc9c8 \uad00\ub9ac\ub85c \uc9c4\ud654\ud560 \uac83\uc73c\ub85c \uc608\uc0c1\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n

                          \uacb0\ub860<\/h2>\n\n\n\n

                          \uacb0\ud568 \uad00\ub9ac\ub294 SiC \uc6e8\uc774\ud37c \uae30\uc220\uc5d0\uc11c \uc5ec\uc804\ud788 \ud575\uc2ec \uacfc\uc81c \uc911 \ud558\ub098\uc785\ub2c8\ub2e4. \ud45c\uba74 \uacb0\ud568 \ubc0f \uc624\uc5fc\uacfc \ud568\uaed8 \ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504, \uc2a4\ub808\ub529 \uc804\uc704, \uae30\uc800\uba74 \uc804\uc704, \uc801\uce35 \uacb0\ud568 \ub4f1\uc758 \uad6c\uc870\uc801 \uacb0\ud568\uc740 \ubc18\ub3c4\uccb4 \uc18c\uc790 \uc131\ub2a5\uc5d0 \ud070 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n\n\n\n

                          \uc81c\uc870\uc5c5\uccb4\ub294 PL \ub9e4\ud551, X-\uc120 \ud1a0\ud3ec\uadf8\ub798\ud53c, KOH \uc5d0\uce6d, \uc790\ub3d9 \uad11\ud559 \uac80\uc0ac\uc640 \uac19\uc740 \uace0\uae09 \ud2b9\uc131\ud654 \uae30\uc220\uc744 \ud1b5\ud574 \uae30\ud310 \ud488\uc9c8\uc744 \ub354 \uc798 \ud3c9\uac00\ud558\uace0 \ub514\ubc14\uc774\uc2a4 \uc218\uc728\uc744 \uac1c\uc120\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. SiC\uac00 \uace0\uc804\ub825 \ubc0f \uace0\uc2e0\ub8b0\uc131 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc73c\ub85c \uacc4\uc18d \ud655\uc7a5\ub428\uc5d0 \ub530\ub77c \ub354\uc6b1 \uc9c0\ub2a5\uc801\uc774\uace0 \uc815\ubc00\ud55c \uac80\uc0ac \uae30\uc220\uc740 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0\uc11c \uc810\uc810 \ub354 \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud558\uac8c \ub420 \uac83\uc785\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"

                          As the demand for high-efficiency power electronics continues to grow, Silicon Carbide (SiC) wafers have become a foundational material for next-generation semiconductor devices. Compared with conventional silicon substrates, SiC offers a wider bandgap, higher critical electric field strength, superior thermal conductivity, and better high-temperature performance. These characteristics make SiC indispensable in electric vehicles, renewable energy […]<\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_uag_custom_page_level_css":"","footnotes":""},"categories":[12,27],"tags":[1663],"class_list":["post-8884","post","type-post","status-publish","format-standard","hentry","category-news","category-companynews","tag-sic-wafers"],"acf":[],"uagb_featured_image_src":{"full":false,"thumbnail":false,"medium":false,"medium_large":false,"large":false,"1536x1536":false,"2048x2048":false,"trp-custom-language-flag":false,"woocommerce_thumbnail":false,"woocommerce_single":false,"woocommerce_gallery_thumbnail":false},"uagb_author_info":{"display_name":"lydia","author_link":"https:\/\/www.sic-wafers.com\/ko\/author\/lydia\/"},"uagb_comment_info":3,"uagb_excerpt":"As the demand for high-efficiency power electronics continues to grow, Silicon Carbide (SiC) wafers have become a foundational material for next-generation semiconductor devices. Compared with conventional silicon substrates, SiC offers a wider bandgap, higher critical electric field strength, superior thermal conductivity, and better high-temperature performance. These characteristics make SiC indispensable in electric vehicles, renewable energy…","_links":{"self":[{"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/posts\/8884","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/comments?post=8884"}],"version-history":[{"count":1,"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/posts\/8884\/revisions"}],"predecessor-version":[{"id":8886,"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/posts\/8884\/revisions\/8886"}],"wp:attachment":[{"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/media?parent=8884"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/categories?post=8884"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sic-wafers.com\/ko\/wp-json\/wp\/v2\/tags?post=8884"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}