Ceramic Wafers for Semiconductor Manufacturing: Alumina vs AlN vs SiC, Flatness, Surface Finish and Thermal Performance
Advanced ceramic wafers and precision ceramic plates are increasingly used throughout semiconductor manufacturing. Unlike conventional silicon wafers, which normally become part of the semiconductor device itself, ceramic wafers are often used as functional substrates, carriers, insulating plates, thermal management components, wafer chucks, process fixtures or precision equipment components. Among the most important ceramic materials are: […]