{"id":8884,"date":"2026-05-14T14:49:25","date_gmt":"2026-05-14T06:49:25","guid":{"rendered":"https:\/\/www.sic-wafers.com\/?p=8884"},"modified":"2026-05-15T11:19:56","modified_gmt":"2026-05-15T03:19:56","slug":"common-defects-in-sic-wafers-and-inspection-methods","status":"publish","type":"post","link":"https:\/\/www.sic-wafers.com\/vi\/common-defects-in-sic-wafers-and-inspection-methods\/","title":{"rendered":"C\u00e1c khuy\u1ebft t\u1eadt th\u01b0\u1eddng g\u1eb7p tr\u00ean t\u1ea5m wafer SiC v\u00e0 c\u00e1c ph\u01b0\u01a1ng ph\u00e1p ki\u1ec3m tra"},"content":{"rendered":"
<\/div>\n

Khi nhu c\u1ea7u v\u1ec1 c\u00e1c thi\u1ebft b\u1ecb \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t hi\u1ec7u su\u1ea5t cao ng\u00e0y c\u00e0ng gia t\u0103ng, c\u00e1c t\u1ea5m wafer cacbua silic (SiC) \u0111\u00e3 tr\u1edf th\u00e0nh v\u1eadt li\u1ec7u n\u1ec1n t\u1ea3ng cho c\u00e1c thi\u1ebft b\u1ecb b\u00e1n d\u1eabn th\u1ebf h\u1ec7 m\u1edbi. So v\u1edbi c\u00e1c ch\u1ea5t n\u1ec1n silicon truy\u1ec1n th\u1ed1ng, SiC c\u00f3 kho\u1ea3ng c\u00e1ch d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng h\u01a1n, c\u01b0\u1eddng \u0111\u1ed9 \u0111i\u1ec7n tr\u01b0\u1eddng gi\u1edbi h\u1ea1n cao h\u01a1n, \u0111\u1ed9 d\u1eabn nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i v\u00e0 hi\u1ec7u su\u1ea5t ho\u1ea1t \u0111\u1ed9ng \u1edf nhi\u1ec7t \u0111\u1ed9 cao t\u1ed1t h\u01a1n. Nh\u1eefng \u0111\u1eb7c t\u00ednh n\u00e0y khi\u1ebfn SiC tr\u1edf th\u00e0nh v\u1eadt li\u1ec7u kh\u00f4ng th\u1ec3 thi\u1ebfu trong c\u00e1c ph\u01b0\u01a1ng ti\u1ec7n \u0111i\u1ec7n, h\u1ec7 th\u1ed1ng n\u0103ng l\u01b0\u1ee3ng t\u00e1i t\u1ea1o, m\u00f4-\u0111un c\u00f4ng su\u1ea5t c\u00f4ng nghi\u1ec7p v\u00e0 c\u00e1c thi\u1ebft b\u1ecb truy\u1ec1n th\u00f4ng t\u1ea7n s\u1ed1 cao.<\/p>\n\n\n\n

Tuy nhi\u00ean, nh\u1eefng \u01b0u \u0111i\u1ec3m c\u1ee7a SiC \u0111i k\u00e8m v\u1edbi nh\u1eefng th\u00e1ch th\u1ee9c l\u1edbn trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t. Do nhi\u1ec7t \u0111\u1ed9 k\u1ebft tinh c\u1ef1c cao v\u00e0 c\u1ea5u tr\u00fac m\u1ea1ng tinh th\u1ec3 ph\u1ee9c t\u1ea1p, c\u00e1c t\u1ea5m wafer SiC d\u1ec5 b\u1ecb xu\u1ea5t hi\u1ec7n c\u00e1c khuy\u1ebft t\u1eadt v\u1ec1 c\u1ea5u tr\u00fac v\u00e0 b\u1ec1 m\u1eb7t trong qu\u00e1 tr\u00ecnh k\u1ebft tinh, c\u1eaft l\u00e1t, \u0111\u00e1nh b\u00f3ng v\u00e0 x\u1eed l\u00fd epitactic. Nh\u1eefng khuy\u1ebft t\u1eadt n\u00e0y \u1ea3nh h\u01b0\u1edfng tr\u1ef1c ti\u1ebfp \u0111\u1ebfn \u0111\u1ed9 tin c\u1eady, hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t v\u00e0 hi\u1ec7u su\u1ea5t \u0111i\u1ec7n c\u1ee7a thi\u1ebft b\u1ecb.<\/p>\n\n\n\n

B\u00e0i vi\u1ebft n\u00e0y cung c\u1ea5p m\u1ed9t c\u00e1i nh\u00ecn t\u1ed5ng quan v\u1ec1 m\u1eb7t h\u1ecdc thu\u1eadt v\u1ec1 c\u00e1c khuy\u1ebft t\u1eadt th\u01b0\u1eddng g\u1eb7p tr\u00ean c\u00e1c t\u1ea5m wafer SiC c\u0169ng nh\u01b0 c\u00e1c ph\u01b0\u01a1ng ph\u00e1p ki\u1ec3m tra \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 x\u00e1c \u0111\u1ecbnh v\u00e0 ph\u00e2n t\u00edch \u0111\u1eb7c t\u00ednh c\u1ee7a ch\u00fang.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

T\u1ea1i sao vi\u1ec7c ki\u1ec3m so\u00e1t khuy\u1ebft t\u1eadt l\u1ea1i quan tr\u1ecdng \u0111\u1ed1i v\u1edbi c\u00e1c t\u1ea5m wafer SiC<\/h2>\n\n\n\n

Tinh th\u1ec3 \u0111\u01a1n tinh th\u1ec3 SiC th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p v\u1eadn chuy\u1ec3n h\u01a1i v\u1eadt l\u00fd (PVT). Trong qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n tinh th\u1ec3, nh\u1eefng dao \u0111\u1ed9ng v\u1ec1 \u0111\u1ed9 d\u1ed1c nhi\u1ec7t \u0111\u1ed9, t\u00ecnh tr\u1ea1ng b\u00e3o h\u00f2a qu\u00e1 m\u1ee9c, ph\u00e2n b\u1ed1 \u1ee9ng su\u1ea5t v\u00e0 s\u1ef1 x\u00e2m nh\u1eadp c\u1ee7a t\u1ea1p ch\u1ea5t c\u00f3 th\u1ec3 g\u00e2y ra c\u00e1c khuy\u1ebft t\u1eadt tinh th\u1ec3.<\/p>\n\n\n\n

Ngay c\u1ea3 m\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt t\u01b0\u01a1ng \u0111\u1ed1i th\u1ea5p c\u0169ng c\u00f3 th\u1ec3 g\u00e2y ra c\u00e1c v\u1ea5n \u0111\u1ec1 nghi\u00eam tr\u1ecdng \u0111\u1ed1i v\u1edbi c\u00e1c thi\u1ebft b\u1ecb \u0111i\u1ec7n, bao g\u1ed3m:<\/p>\n\n\n\n

    \n
  • D\u00f2ng r\u00f2 t\u0103ng<\/li>\n\n\n\n
  • \u0110i\u1ec7n \u00e1p \u0111\u1ee9t m\u1ea1ch gi\u1ea3m<\/li>\n\n\n\n
  • \u0110i\u1ec7n tr\u1edf khi \u0111\u00f3ng cao<\/li>\n\n\n\n
  • S\u1ef1 suy gi\u1ea3m hi\u1ec7u su\u1ea5t c\u1ee7a thi\u1ebft b\u1ecb trong qu\u00e1 tr\u00ecnh v\u1eadn h\u00e0nh<\/li>\n\n\n\n
  • Hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t th\u1ea5p h\u01a1n<\/li>\n<\/ul>\n\n\n\n

    \u0110\u1ed1i v\u1edbi c\u00e1c \u1ee9ng d\u1ee5ng \u0111i\u1ec7n \u00e1p cao v\u00e0 c\u00f4ng su\u1ea5t l\u1edbn, m\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt \u0111\u00e3 tr\u1edf th\u00e0nh m\u1ed9t trong nh\u1eefng th\u00f4ng s\u1ed1 quan tr\u1ecdng nh\u1ea5t trong qu\u00e1 tr\u00ecnh \u0111\u00e1nh gi\u00e1 ch\u1ea5t l\u01b0\u1ee3ng \u0111\u1ebf SiC.<\/p>\n\n\n\n

    C\u00e1c khuy\u1ebft t\u1eadt th\u01b0\u1eddng g\u1eb7p tr\u00ean t\u1ea5m wafer SiC<\/h2>\n\n\n\n

    1. \u1ed0ng si\u00eau nh\u1ecf<\/h3>\n\n\n\n

    C\u00e1c \u1ed1ng vi m\u00f4 l\u00e0 nh\u1eefng khuy\u1ebft t\u1eadt tinh th\u1ec3 c\u00f3 l\u00f5i r\u1ed7ng li\u00ean quan \u0111\u1ebfn c\u00e1c khuy\u1ebft t\u1eadt tr\u01b0\u1ee3t xo\u1eafn, v\u00e0 tr\u01b0\u1edbc \u0111\u00e2y \u0111\u01b0\u1ee3c coi l\u00e0 m\u1ed9t trong nh\u1eefng khuy\u1ebft t\u1eadt nghi\u00eam tr\u1ecdng nh\u1ea5t tr\u00ean c\u00e1c ch\u1ea5t n\u1ec1n SiC.<\/p>\n\n\n\n

    \u0110\u1eb7c \u0111i\u1ec3m:<\/p>\n\n\n\n

      \n
    • C\u1ea5u tr\u00fac r\u1ed7ng d\u1ea1ng \u1ed1ng<\/li>\n\n\n\n
    • \u0110\u01b0\u1eddng k\u00ednh th\u01b0\u1eddng dao \u0111\u1ed9ng trong kho\u1ea3ng t\u1eeb 0,1\u201310 \u03bcm<\/li>\n\n\n\n
    • N\u1eb1m d\u1ecdc theo h\u01b0\u1edbng ph\u00e1t tri\u1ec3n c\u1ee7a tinh th\u1ec3<\/li>\n\n\n\n
    • \u1ea2nh h\u01b0\u1edfng l\u1edbn \u0111\u1ebfn hi\u1ec7u su\u1ea5t c\u1ee7a thi\u1ebft b\u1ecb cao \u00e1p<\/li>\n<\/ul>\n\n\n\n

      C\u00e1c \u1ed1ng si\u00eau nh\u1ecf c\u00f3 th\u1ec3 l\u00e0m gi\u1ea3m \u0111\u00e1ng k\u1ec3 \u0111i\u1ec7n \u00e1p ph\u00e1 h\u1ee7y do ch\u00fang t\u1ea1o ra s\u1ef1 t\u1eadp trung tr\u01b0\u1eddng \u0111i\u1ec7n c\u1ee5c b\u1ed9. \u0110\u00e3 c\u00f3 nh\u1eefng ti\u1ebfn b\u1ed9 \u0111\u00e1ng k\u1ec3 trong vi\u1ec7c gi\u1ea3m m\u1eadt \u0111\u1ed9 \u1ed1ng si\u00eau nh\u1ecf tr\u00ean c\u00e1c t\u1ea5m wafer SiC 4 inch v\u00e0 6 inch hi\u1ec7n \u0111\u1ea1i, m\u1eb7c d\u00f9 vi\u1ec7c ki\u1ec3m so\u00e1t ch\u1eb7t ch\u1ebd v\u1eabn l\u00e0 \u0111i\u1ec1u c\u1ea7n thi\u1ebft \u0111\u1ed1i v\u1edbi c\u00e1c \u1ee9ng d\u1ee5ng ti\u00ean ti\u1ebfn.<\/p>\n\n\n\n

      2. Dislocation theo \u0111\u01b0\u1eddng ren (TSD)<\/h3>\n\n\n\n

      S\u1ef1 d\u1ecbch chuy\u1ec3n c\u1ee7a c\u00e1c v\u00edt xo\u1eafn lan truy\u1ec1n d\u1ecdc theo tr\u1ee5c ph\u00e1t tri\u1ec3n tinh th\u1ec3 v\u00e0 c\u00f3 li\u00ean quan \u0111\u1ebfn c\u00e1c c\u01a1 ch\u1ebf ph\u00e1t tri\u1ec3n xo\u1eafn \u1ed1c.<\/p>\n\n\n\n

      C\u00e1c t\u00e1c \u0111\u1ed9ng ti\u1ec1m t\u00e0ng bao g\u1ed3m:<\/p>\n\n\n\n

        \n
      • S\u1ef1 kh\u00f4ng \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 h\u00ecnh th\u00e1i b\u1ec1 m\u1eb7t<\/li>\n\n\n\n
      • S\u1ef1 bi\u1ebfn d\u1ea1ng b\u1eadc l\u1edbp ph\u1ee7<\/li>\n\n\n\n
      • S\u1ef1 kh\u00f4ng \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111i\u1ec7n t\u1ea1i \u0111\u1ecba ph\u01b0\u01a1ng<\/li>\n<\/ul>\n\n\n\n

        Nh\u1eefng khuy\u1ebft t\u1eadt n\u00e0y c\u00f3 th\u1ec3 \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn ch\u1ea5t l\u01b0\u1ee3ng qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 v\u00e0 g\u00e2y ra s\u1ef1 bi\u1ebfn \u0111\u1ed9ng trong c\u00e1c \u0111\u1eb7c t\u00ednh c\u1ee7a thi\u1ebft b\u1ecb.<\/p>\n\n\n\n

        3. Tr\u1eadt kh\u1edbp m\u1eb7t n\u1ec1n (BPD)<\/h3>\n\n\n\n

        C\u00e1c khuy\u1ebft t\u1eadt m\u1eb7t ph\u1eb3ng c\u01a1 s\u1edf l\u00e0 m\u1ed9t trong nh\u1eefng khuy\u1ebft t\u1eadt \u0111\u01b0\u1ee3c nghi\u00ean c\u1ee9u r\u1ed9ng r\u00e3i nh\u1ea5t trong c\u00f4ng ngh\u1ec7 thi\u1ebft b\u1ecb \u0111i\u1ec7n SiC.<\/p>\n\n\n\n

        \u0110\u1eb7c \u0111i\u1ec3m:<\/p>\n\n\n\n

          \n
        • N\u1eb1m trong m\u1eb7t ph\u1eb3ng \u0111\u00e1y c\u1ee7a tinh th\u1ec3<\/li>\n\n\n\n
        • C\u00f3 th\u1ec3 chuy\u1ec3n \u0111\u1ed5i trong qu\u00e1 tr\u00ecnh thi\u1ebft b\u1ecb ho\u1ea1t \u0111\u1ed9ng<\/li>\n\n\n\n
        • \u0110i\u1ec1u n\u00e0y \u0111\u1eb7c bi\u1ec7t g\u00e2y kh\u00f3 kh\u0103n cho c\u00e1c thi\u1ebft b\u1ecb l\u01b0\u1ee1ng c\u1ef1c<\/li>\n<\/ul>\n\n\n\n

          C\u00e1c thi\u1ebft b\u1ecb BPD c\u00f3 li\u00ean quan \u0111\u1ebfn m\u1ed9t hi\u1ec7n t\u01b0\u1ee3ng \u0111\u01b0\u1ee3c g\u1ecdi l\u00e0 suy gi\u1ea3m l\u01b0\u1ee1ng c\u1ef1c, trong \u0111\u00f3 s\u1ef1 m\u1edf r\u1ed9ng c\u1ee7a khuy\u1ebft t\u1eadt x\u1ebfp ch\u1ed3ng d\u01b0\u1edbi t\u00e1c \u0111\u1ed9ng c\u1ee7a d\u00f2ng \u0111i\u1ec7n mang \u0111i\u1ec7n t\u00edch d\u1ea7n d\u1ea7n l\u00e0m gi\u1ea3m hi\u1ec7u su\u1ea5t c\u1ee7a thi\u1ebft b\u1ecb.<\/p>\n\n\n\n

          C\u00e1c h\u1eadu qu\u1ea3 c\u00f3 th\u1ec3 bao g\u1ed3m:<\/p>\n\n\n\n

            \n
          • S\u1ef1 thay \u0111\u1ed5i \u0111i\u1ec7n \u00e1p thu\u1eadn<\/li>\n\n\n\n
          • Tu\u1ed5i th\u1ecd thi\u1ebft b\u1ecb b\u1ecb gi\u1ea3m<\/li>\n\n\n\n
          • S\u1ef1 kh\u00f4ng \u1ed5n \u0111\u1ecbnh v\u1ec1 hi\u1ec7u su\u1ea5t<\/li>\n<\/ul>\n\n\n\n

            4. L\u1ed7i ch\u1ed3ng ch\u00e9o<\/h3>\n\n\n\n

            L\u1ed7i x\u1ebfp ch\u1ed3ng x\u1ea3y ra khi tr\u00ecnh t\u1ef1 x\u1ebfp ch\u1ed3ng b\u00ecnh th\u01b0\u1eddng c\u1ee7a c\u00e1c l\u1edbp nguy\u00ean t\u1eed b\u1ecb gi\u00e1n \u0111o\u1ea1n.<\/p>\n\n\n\n

            Trong v\u1eadt li\u1ec7u SiC, c\u00e1c khuy\u1ebft t\u1eadt x\u1ebfp ch\u1ed3ng c\u00f3 th\u1ec3:<\/p>\n\n\n\n

              \n
            • Thay \u0111\u1ed5i c\u1ea5u tr\u00fac \u0111i\u1ec7n t\u1eed c\u1ee5c b\u1ed9<\/li>\n\n\n\n
            • \u1ea2nh h\u01b0\u1edfng \u0111\u1ebfn qu\u00e1 tr\u00ecnh v\u1eadn chuy\u1ec3n ch\u1ea5t mang<\/li>\n\n\n\n
            • L\u00e0m suy gi\u1ea3m c\u00e1c t\u00ednh ch\u1ea5t quang h\u1ecdc ho\u1eb7c \u0111i\u1ec7n<\/li>\n<\/ul>\n\n\n\n

              M\u1ed9t s\u1ed1 khuy\u1ebft t\u1eadt x\u1ebfp l\u1edbp c\u00f3 th\u1ec3 m\u1edf r\u1ed9ng d\u01b0\u1edbi t\u00e1c \u0111\u1ed9ng c\u1ee7a \u1ee9ng su\u1ea5t \u0111i\u1ec7n, do \u0111\u00f3 ch\u00fang \u0111\u1eb7c bi\u1ec7t quan tr\u1ecdng \u0111\u1ed1i v\u1edbi c\u00e1c nghi\u00ean c\u1ee9u v\u1ec1 \u0111\u1ed9 tin c\u1eady l\u00e2u d\u00e0i.<\/p>\n\n\n\n

              5. V\u1ebft x\u01b0\u1edbc tr\u00ean b\u1ec1 m\u1eb7t<\/h3>\n\n\n\n

              C\u00e1c c\u00f4ng \u0111o\u1ea1n gia c\u00f4ng c\u01a1 h\u1ecdc nh\u01b0 m\u00e0i, \u0111\u00e1nh b\u00f3ng, \u0111\u00e1nh b\u00f3ng c\u01a1 h\u00f3a h\u1ecdc (CMP) v\u00e0 x\u1eed l\u00fd t\u1ea5m wafer c\u00f3 th\u1ec3 g\u00e2y ra c\u00e1c v\u1ebft x\u01b0\u1edbc.<\/p>\n\n\n\n

              C\u00e1c \u0111\u1eb7c \u0111i\u1ec3m \u0111i\u1ec3n h\u00ecnh:<\/p>\n\n\n\n

                \n
              • C\u00e1c v\u1ebft tr\u1ea7y x\u01b0\u1edbc tr\u00ean b\u1ec1 m\u1eb7t<\/li>\n\n\n\n
              • S\u1ef1 bi\u1ebfn \u0111\u1ed5i \u0111\u1ed9 nh\u00e1m c\u1ee5c b\u1ed9<\/li>\n\n\n\n
              • S\u1ef1 kh\u00e1c bi\u1ec7t v\u1ec1 \u0111\u1ed9 ph\u1ea3n x\u1ea1 b\u1ec1 m\u1eb7t<\/li>\n<\/ul>\n\n\n\n

                Ngay c\u1ea3 nh\u1eefng v\u1ebft x\u01b0\u1edbc nh\u1ecf c\u0169ng c\u00f3 th\u1ec3 \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn qu\u00e1 tr\u00ecnh quang kh\u1eafc v\u00e0 \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a l\u1edbp epitaxial.<\/p>\n\n\n\n

                6. \u00d4 nhi\u1ec5m do h\u1ea1t b\u1ee5i<\/h3>\n\n\n\n

                C\u00e1c h\u1ea1t c\u00f3 th\u1ec3 c\u00f3 ngu\u1ed3n g\u1ed1c t\u1eeb:<\/p>\n\n\n\n

                  \n
                • C\u1eb7n b\u00e1m sau khi \u0111\u00e1nh b\u00f3ng<\/li>\n\n\n\n
                • \u00d4 nhi\u1ec5m m\u00f4i tr\u01b0\u1eddng<\/li>\n\n\n\n
                • S\u1ef1 hao m\u00f2n c\u1ee7a thi\u1ebft b\u1ecb<\/li>\n\n\n\n
                • C\u00e1c quy tr\u00ecnh v\u1eadn chuy\u1ec3n t\u1ea5m wafer<\/li>\n<\/ul>\n\n\n\n

                  C\u00e1c h\u1ea1t b\u1ee5i tr\u00ean b\u1ec1 m\u1eb7t c\u00f3 th\u1ec3 g\u00e2y ra:<\/p>\n\n\n\n

                    \n
                  • C\u00e1c khuy\u1ebft t\u1eadt v\u1ec1 c\u1ea5u tr\u00fac<\/li>\n\n\n\n
                  • C\u00e1c b\u1ea5t th\u01b0\u1eddng trong qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7<\/li>\n\n\n\n
                  • Gi\u1ea3m n\u0103ng su\u1ea5t<\/li>\n<\/ul>\n\n\n\n

                    Do nh\u1eefng r\u1ee7i ro n\u00e0y, qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t t\u1ea5m wafer SiC \u0111\u00f2i h\u1ecfi ph\u1ea3i c\u00f3 c\u00e1c bi\u1ec7n ph\u00e1p ki\u1ec3m so\u00e1t nghi\u00eam ng\u1eb7t trong ph\u00f2ng s\u1ea1ch.<\/p>\n\n\n\n

                    7. M\u1ebb c\u1ea1nh v\u00e0 v\u1ebft n\u1ee9t nh\u1ecf<\/h3>\n\n\n\n

                    Trong qu\u00e1 tr\u00ecnh c\u1eaft l\u00e1t wafer ho\u1eb7c m\u00e0i c\u1ea1nh, \u1ee9ng su\u1ea5t c\u01a1 h\u1ecdc c\u00f3 th\u1ec3 g\u00e2y ra h\u01b0 h\u1ecfng \u1edf c\u00e1c c\u1ea1nh.<\/p>\n\n\n\n

                    V\u00ed d\u1ee5 nh\u01b0:<\/p>\n\n\n\n

                      \n
                    • V\u1ebft n\u1ee9t \u1edf m\u00e9p<\/li>\n\n\n\n
                    • C\u00e1c m\u1ea3nh nh\u1ecf<\/li>\n\n\n\n
                    • S\u1ef1 h\u00ecnh th\u00e0nh c\u00e1c v\u1ebft n\u1ee9t vi m\u00f4<\/li>\n<\/ul>\n\n\n\n

                      Nh\u1eefng khuy\u1ebft t\u1eadt n\u00e0y c\u00f3 th\u1ec3 l\u00e0m gi\u1ea3m \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc v\u00e0 t\u0103ng nguy c\u01a1 v\u1ee1 t\u1ea5m wafer trong qu\u00e1 tr\u00ecnh gia c\u00f4ng t\u1ef1 \u0111\u1ed9ng.<\/p>\n\n\n\n

                      C\u00e1c ph\u01b0\u01a1ng ph\u00e1p ki\u1ec3m tra khuy\u1ebft t\u1eadt tr\u00ean t\u1ea5m wafer SiC<\/h2>\n\n\n\n

                      Do c\u00e1c lo\u1ea1i khuy\u1ebft t\u1eadt kh\u00e1c nhau c\u00f3 c\u00e1c \u0111\u1eb7c t\u00ednh v\u1eadt l\u00fd kh\u00e1c nhau, n\u00ean th\u01b0\u1eddng ng\u01b0\u1eddi ta k\u1ebft h\u1ee3p s\u1eed d\u1ee5ng nhi\u1ec1u k\u1ef9 thu\u1eadt \u0111\u1eb7c tr\u01b0ng h\u00f3a v\u1edbi nhau.<\/p>\n\n\n\n

                      Ph\u01b0\u01a1ng ph\u00e1p ki\u1ec3m tra<\/th>Ch\u1ee9c n\u0103ng ch\u00ednh<\/th>C\u00e1c khuy\u1ebft t\u1eadt th\u01b0\u1eddng g\u1eb7p c\u00f3 th\u1ec3 ph\u00e1t hi\u1ec7n \u0111\u01b0\u1ee3c<\/th><\/tr><\/thead>
                      K\u00ednh hi\u1ec3n vi quang h\u1ecdc<\/td>Quan s\u00e1t b\u1ec1 m\u1eb7t<\/td>V\u1ebft x\u01b0\u1edbc, h\u1ea1t b\u1ee5i, khuy\u1ebft t\u1eadt \u1edf m\u00e9p<\/td><\/tr>
                      K\u00ednh hi\u1ec3n vi l\u1ef1c nguy\u00ean t\u1eed (AFM)<\/td>\u0110\u1ecba h\u00ecnh \u1edf quy m\u00f4 nanomet<\/td>\u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t<\/td><\/tr>
                      Ph\u00e2n t\u00e1n tia X (XRD)<\/td>Ph\u00e2n t\u00edch c\u1ea5u tr\u00fac tinh th\u1ec3<\/td>S\u1ef1 bi\u1ebfn d\u1ea1ng m\u1ea1ng tinh th\u1ec3<\/td><\/tr>
                      Ph\u01b0\u01a1ng ph\u00e1p \u0103n m\u00f2n KOH<\/td>X\u00e1c \u0111\u1ecbnh c\u00e1c v\u1ecb tr\u00ed tr\u1eadt kh\u1edbp<\/td>R\u1ed1i lo\u1ea1n nh\u00e2n c\u00e1ch ranh gi\u1edbi (BPD), R\u1ed1i lo\u1ea1n c\u0103ng th\u1eb3ng sau sang ch\u1ea5n (TSD)<\/td><\/tr>
                      L\u1eadp b\u1ea3n \u0111\u1ed3 quang ph\u00e1t quang (PL)<\/td>Ch\u1ee5p \u1ea3nh khuy\u1ebft t\u1eadt<\/td>S\u1ef1 d\u1ecbch chuy\u1ec3n, \u1ed1ng vi m\u00f4<\/td><\/tr>
                      Ch\u1ee5p c\u1eaft l\u1edbp tia X (XRT)<\/td>Ki\u1ec3m tra tinh th\u1ec3 b\u00ean trong<\/td>\u1ed0ng vi m\u00f4, khuy\u1ebft t\u1eadt x\u1ebfp ch\u1ed3ng<\/td><\/tr>
                      Ph\u1ed5 Raman<\/td>\u0110\u00e1nh gi\u00e1 \u1ee9ng su\u1ea5t v\u00e0 m\u1ea1ng tinh th\u1ec3<\/td>C\u00e1c b\u1ea5t th\u01b0\u1eddng v\u1ec1 c\u1ea5u tr\u00fac<\/td><\/tr>
                      Ki\u1ec3m tra quang h\u1ecdc t\u1ef1 \u0111\u1ed9ng (AOI)<\/td>Ki\u1ec3m tra b\u1ec1 m\u1eb7t quy m\u00f4 l\u1edbn<\/td>C\u00e1c khuy\u1ebft t\u1eadt b\u1ec1 m\u1eb7t<\/td><\/tr>
                      Ki\u1ec3m tra t\u00e1n x\u1ea1 laser<\/td>Ph\u00e1t hi\u1ec7n h\u1ea1t<\/td>\u00d4 nhi\u1ec5m b\u1ec1 m\u1eb7t<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

                      Trong s\u1ed1 c\u00e1c k\u1ef9 thu\u1eadt n\u00e0y, ph\u01b0\u01a1ng ph\u00e1p l\u1eadp b\u1ea3n \u0111\u1ed3 PL v\u00e0 \u0111o \u0111\u1ecba h\u00ecnh tia X \u0111\u00e3 tr\u1edf th\u00e0nh c\u00e1c ph\u01b0\u01a1ng ph\u00e1p ti\u00eau chu\u1ea9n trong ng\u00e0nh \u0111\u1ec3 \u0111\u00e1nh gi\u00e1 khuy\u1ebft t\u1eadt tr\u00ean di\u1ec7n t\u00edch l\u1edbn.<\/p>\n\n\n\n

                      Quy tr\u00ecnh ki\u1ec3m tra t\u1ea5m wafer SiC ti\u00eau chu\u1ea9n<\/h2>\n\n\n\n

                      M\u1ed9t quy tr\u00ecnh ki\u1ec3m so\u00e1t ch\u1ea5t l\u01b0\u1ee3ng SiC to\u00e0n di\u1ec7n th\u01b0\u1eddng bao g\u1ed3m m\u1ed9t s\u1ed1 giai \u0111o\u1ea1n ki\u1ec3m tra:<\/p>\n\n\n\n

                      Ki\u1ec3m tra v\u1eadt li\u1ec7u n\u1ec1n \u0111\u1ea7u v\u00e0o \u2192 Ph\u00e2n t\u00edch \u0111\u1eb7c t\u00ednh b\u1ec1 m\u1eb7t \u2192 L\u1eadp b\u1ea3n \u0111\u1ed3 khuy\u1ebft t\u1eadt \u2192 Ph\u00e2n t\u00edch ch\u1ea5t l\u01b0\u1ee3ng tinh th\u1ec3 \u2192 \u0110\u00e1nh gi\u00e1 qu\u00e1 tr\u00ecnh epitaxy \u2192 Ki\u1ec3m tra cu\u1ed1i c\u00f9ng<\/p>\n\n\n\n

                      \u0110\u1ed1i v\u1edbi qu\u00e1 tr\u00ecnh ch\u1ebf t\u1ea1o thi\u1ebft b\u1ecb ti\u00ean ti\u1ebfn, c\u00e1c \u0111\u00e1nh gi\u00e1 b\u1ed5 sung c\u00f3 th\u1ec3 bao g\u1ed3m:<\/p>\n\n\n\n

                        \n
                      • L\u1eadp b\u1ea3n \u0111\u1ed3 PL tr\u00ean to\u00e0n t\u1ea5m wafer<\/li>\n\n\n\n
                      • Th\u1ed1ng k\u00ea m\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt<\/li>\n\n\n\n
                      • Ph\u00e2n t\u00edch h\u01b0\u1edbng tinh th\u1ec3<\/li>\n\n\n\n
                      • Ph\u00e2n lo\u1ea1i l\u1ed7i t\u1ef1 \u0111\u1ed9ng<\/li>\n<\/ul>\n\n\n\n

                        C\u00e1c b\u01b0\u1edbc n\u00e0y gi\u00fap n\u00e2ng cao t\u00ednh nh\u1ea5t qu\u00e1n c\u1ee7a quy tr\u00ecnh v\u00e0 t\u1ed1i \u01b0u h\u00f3a c\u00e1c c\u00f4ng \u0111o\u1ea1n s\u1ea3n xu\u1ea5t ti\u1ebfp theo.<\/p>\n\n\n\n

                        C\u00e1c xu h\u01b0\u1edbng m\u1edbi n\u1ed5i: Ph\u00e2n t\u00edch l\u1ed7i d\u1ef1a tr\u00ean tr\u00ed tu\u1ec7 nh\u00e2n t\u1ea1o<\/h2>\n\n\n\n

                        Khi c\u00f4ng ngh\u1ec7 SiC ng\u00e0y c\u00e0ng h\u01b0\u1edbng t\u1edbi vi\u1ec7c s\u1eed d\u1ee5ng c\u00e1c t\u1ea5m wafer c\u00f3 \u0111\u01b0\u1eddng k\u00ednh l\u1edbn h\u01a1n, ch\u1eb3ng h\u1ea1n nh\u01b0 t\u1ea5m n\u1ec1n 8 inch, c\u00e1c ph\u01b0\u01a1ng ph\u00e1p ki\u1ec3m tra truy\u1ec1n th\u1ed1ng \u0111ang g\u1eb7p ph\u1ea3i nh\u1eefng h\u1ea1n ch\u1ebf v\u1ec1 n\u0103ng su\u1ea5t v\u00e0 \u0111\u1ed9 ph\u1ee9c t\u1ea1p.<\/p>\n\n\n\n

                        C\u00e1c xu h\u01b0\u1edbng g\u1ea7n \u0111\u00e2y ng\u00e0y c\u00e0ng t\u00edch h\u1ee3p:<\/p>\n\n\n\n

                          \n
                        • Nh\u1eadn di\u1ec7n h\u00ecnh \u1ea3nh b\u1eb1ng tr\u00ed tu\u1ec7 nh\u00e2n t\u1ea1o<\/li>\n\n\n\n
                        • Ph\u00e2n lo\u1ea1i l\u1ed7i b\u1eb1ng h\u1ecdc m\u00e1y<\/li>\n\n\n\n
                        • D\u1ef1 \u0111o\u00e1n l\u1ed7i t\u1ef1 \u0111\u1ed9ng<\/li>\n\n\n\n
                        • H\u1ec7 th\u1ed1ng t\u01b0\u01a1ng quan d\u1eef li\u1ec7u to\u00e0n quy tr\u00ecnh<\/li>\n<\/ul>\n\n\n\n

                          C\u00e1c chi\u1ebfn l\u01b0\u1ee3c ki\u1ec3m tra trong t\u01b0\u01a1ng lai \u0111\u01b0\u1ee3c k\u1ef3 v\u1ecdng s\u1ebd chuy\u1ec3n t\u1eeb vi\u1ec7c ph\u00e1t hi\u1ec7n l\u1ed7i sang ki\u1ec3m so\u00e1t ch\u1ea5t l\u01b0\u1ee3ng d\u1ef1 b\u00e1o.<\/p>\n\n\n\n

                          K\u1ebft lu\u1eadn<\/h2>\n\n\n\n

                          Vi\u1ec7c ki\u1ec3m so\u00e1t khuy\u1ebft t\u1eadt v\u1eabn l\u00e0 m\u1ed9t trong nh\u1eefng th\u00e1ch th\u1ee9c ch\u00ednh trong c\u00f4ng ngh\u1ec7 t\u1ea5m wafer SiC. C\u00e1c khuy\u1ebft t\u1eadt c\u1ea5u tr\u00fac nh\u01b0 \u1ed1ng vi m\u00f4, khuy\u1ebft t\u1eadt tr\u01b0\u1ee3t d\u1ecdc, khuy\u1ebft t\u1eadt m\u1eb7t \u0111\u00e1y v\u00e0 khuy\u1ebft t\u1eadt x\u1ebfp ch\u1ed3ng, c\u00f9ng v\u1edbi c\u00e1c khuy\u1ebft t\u1eadt b\u1ec1 m\u1eb7t v\u00e0 \u00f4 nhi\u1ec5m, \u1ea3nh h\u01b0\u1edfng \u0111\u00e1ng k\u1ec3 \u0111\u1ebfn hi\u1ec7u su\u1ea5t c\u1ee7a thi\u1ebft b\u1ecb b\u00e1n d\u1eabn.<\/p>\n\n\n\n

                          Th\u00f4ng qua c\u00e1c k\u1ef9 thu\u1eadt ph\u00e2n t\u00edch ti\u00ean ti\u1ebfn nh\u01b0 l\u1eadp b\u1ea3n \u0111\u1ed3 ph\u00e1t quang (PL mapping), \u0111o \u0111\u1ecba h\u00ecnh tia X, \u0103n m\u00f2n b\u1eb1ng KOH v\u00e0 ki\u1ec3m tra quang h\u1ecdc t\u1ef1 \u0111\u1ed9ng, c\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t c\u00f3 th\u1ec3 \u0111\u00e1nh gi\u00e1 ch\u1ea5t l\u01b0\u1ee3ng ch\u1ea5t n\u1ec1n m\u1ed9t c\u00e1ch ch\u00ednh x\u00e1c h\u01a1n v\u00e0 n\u00e2ng cao hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb. Khi SiC ti\u1ebfp t\u1ee5c \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c l\u0129nh v\u1ef1c \u0111\u00f2i h\u1ecfi c\u00f4ng su\u1ea5t cao v\u00e0 \u0111\u1ed9 tin c\u1eady cao, c\u00e1c c\u00f4ng ngh\u1ec7 ki\u1ec3m tra th\u00f4ng minh v\u00e0 ch\u00ednh x\u00e1c h\u01a1n s\u1ebd \u0111\u00f3ng vai tr\u00f2 ng\u00e0y c\u00e0ng quan tr\u1ecdng trong ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn.<\/p>","protected":false},"excerpt":{"rendered":"

                          As the demand for high-efficiency power electronics continues to grow, Silicon Carbide (SiC) wafers have become a foundational material for next-generation semiconductor devices. Compared with conventional silicon substrates, SiC offers a wider bandgap, higher critical electric field strength, superior thermal conductivity, and better high-temperature performance. These characteristics make SiC indispensable in electric vehicles, renewable energy […]<\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_uag_custom_page_level_css":"","footnotes":""},"categories":[12,27],"tags":[1663],"class_list":["post-8884","post","type-post","status-publish","format-standard","hentry","category-news","category-companynews","tag-sic-wafers"],"acf":[],"uagb_featured_image_src":{"full":false,"thumbnail":false,"medium":false,"medium_large":false,"large":false,"1536x1536":false,"2048x2048":false,"trp-custom-language-flag":false,"woocommerce_thumbnail":false,"woocommerce_single":false,"woocommerce_gallery_thumbnail":false},"uagb_author_info":{"display_name":"lydia","author_link":"https:\/\/www.sic-wafers.com\/vi\/author\/lydia\/"},"uagb_comment_info":3,"uagb_excerpt":"As the demand for high-efficiency power electronics continues to grow, Silicon Carbide (SiC) wafers have become a foundational material for next-generation semiconductor devices. Compared with conventional silicon substrates, SiC offers a wider bandgap, higher critical electric field strength, superior thermal conductivity, and better high-temperature performance. These characteristics make SiC indispensable in electric vehicles, renewable energy…","_links":{"self":[{"href":"https:\/\/www.sic-wafers.com\/vi\/wp-json\/wp\/v2\/posts\/8884","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sic-wafers.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sic-wafers.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sic-wafers.com\/vi\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sic-wafers.com\/vi\/wp-json\/wp\/v2\/comments?post=8884"}],"version-history":[{"count":1,"href":"https:\/\/www.sic-wafers.com\/vi\/wp-json\/wp\/v2\/posts\/8884\/revisions"}],"predecessor-version":[{"id":8886,"href":"https:\/\/www.sic-wafers.com\/vi\/wp-json\/wp\/v2\/posts\/8884\/revisions\/8886"}],"wp:attachment":[{"href":"https:\/\/www.sic-wafers.com\/vi\/wp-json\/wp\/v2\/media?parent=8884"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sic-wafers.com\/vi\/wp-json\/wp\/v2\/categories?post=8884"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sic-wafers.com\/vi\/wp-json\/wp\/v2\/tags?post=8884"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}