Description
Our precision-engineered Quartz Boats are designed to meet the rigorous requirements of semiconductor and chemical processing applications. Crafted from ultra-pure fused quartz (SiO₂), these boats provide a stable and contamination-free environment for silicon wafers, substrates, and other delicate materials during high-temperature operations such as diffusion, oxidation, and chemical vapor deposition (CVD). Quartz’s superior thermal stability, chemical resistance, and minimal thermal expansion make it an ideal choice for cleanroom environments and high-performance manufacturing processes.
We offer a wide range of over 50 standard and custom quartz boat designs to suit diverse process needs. Customization options include specific dimensions, slot configurations, and hook placements for ease of use. Additionally, we provide repair services, including fire repair, to prolong the service life of your quartz components.
Quartz Material Specifications:
| Parameter | Value |
|---|---|
| Material | Fused quartz (SiO₂) |
| Purity | 99.99% |
| Max Working Temperature | Up to 1200°C |
| Melting Point | 1660–1710°C |
| Boiling Point | 4046°C |
| Density | 2.2 g/cm³ |
| Thermal Expansion | 0.55 × 10⁻⁶ /°C |
| Refractive Index | 1.46 |
| Thermal Conductivity | 1.3 W/m·K |
| Mechanical Strength | High, suitable for high-pressure processes |
| Chemical Resistance | Resistant to most chemicals, even at high temperatures |
| Transparency | High, for wafer alignment and process observation |
| Thermal Shock Resistance | Excellent, resists cracking from rapid temperature changes |
Key Features:
Ultra-Pure Material: Fused quartz with 99.99% purity ensures minimal contamination.
High Thermal Resistance: Operates safely up to 1200°C without deformation.
Chemical Inertness: Compatible with a wide range of chemical processes.
Low Thermal Expansion: Maintains dimensional stability during temperature fluctuations.
Customizable Designs: Options for standard or custom wafer sizes, hook features, and slot configurations.
Ease of Handling: Optional hooks for efficient insertion and removal in furnace systems.
Applications:
Semiconductor Manufacturing: Ideal for diffusion, oxidation, and CVD wafer processes.
Solar Cell Fabrication: Supports high-temperature processing in photovoltaic cell production.
R&D Laboratories: Perfect for high-purity, high-temperature experimental setups.
Chemical Processing Industries: Suitable for high-temperature, chemically demanding processes.
Design Options:
Slot Types: Grooved slots tailored to wafer thickness, customizable layouts available.
Shapes: U-shaped, V-shaped, or custom geometries to suit process requirements.
Hook Options: Designed for easy insertion and retrieval of wafers.
Sizes: Standard for 100mm, 150mm, 200mm, and 300mm wafers; custom sizes available.
Advantages:
Exceptional Thermal Stability: Maintains integrity above 1000°C.
High Purity: Minimizes contamination in sensitive semiconductor processes.
Dimensional Precision: Low thermal expansion ensures stable wafer alignment.
Versatility: Compatible with LPCVD, oxidation, annealing, and other processes.
Automation-Ready: Precisely engineered for robotic wafer handling systems.
Quartz Boat FAQ:
Q1: Can quartz boats be reused?
A: Yes, with appropriate cleaning and handling, they can be reused multiple times without performance loss.
Q2: How should quartz boats be cleaned?
A: Clean using acid baths or ultrasonic methods according to cleanroom standards. Avoid rapid temperature changes.
Q3: Are quartz boats compatible with all furnace types?
A: Yes, they work with most horizontal and vertical furnaces used in semiconductor and solar wafer processing.
Q4: Can custom sizes be ordered?
A: Standard sizes include 100mm, 150mm, 200mm, and 300mm wafers. Custom dimensions are available for specialized applications.
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