説明
The 310 × 310 × 1 mm Large-Area Square Sapphire Substrate is a precision-engineered sapphire plate produced from high-purity single-crystal aluminum oxide (Al₂O₃). Designed for applications that exceed the dimensional limits of conventional sapphire wafers, this ultra-large substrate provides excellent flatness, thermal endurance, and mechanical integrity across a square geometry.
This product is not a standard semiconductor wafer. Instead, it is optimized as a functional sapphire substrate or carrier plate for semiconductor processing, optical systems, and aerospace environments where large surface area, dimensional stability, and resistance to extreme conditions are required.
代表的な使用例
Carrier and support substrates for semiconductor processing
GaN-on-Sapphire epitaxial carrier plates
Large-area optical and laser windows
High-temperature or vacuum viewports
Structural sapphire base plates
Research and custom industrial platforms
技術仕様
| パラメータ | 仕様 |
|---|---|
| 素材 | Single Crystal Sapphire (Al₂O₃) |
| Crystal Purity | ≥ 99.99% |
| Geometry | Square |
| Overall Dimensions | 310 × 310 mm |
| Nominal Thickness | 1.0 mm |
| 厚さ公差 | ± 0.02 mm |
| Total Thickness Variation (TTV) | < 10 μm |
| クリスタルの向き | Cプレーン (0001) |
| Surface Processing | Double-Side Polished (DSP) |
| 表面粗さ | Ra < 0.2 nm |
| 表面の平坦度 | λ/10 @ 633 nm |
| Edge Treatment | Chamfered / Radius Corners |
| Optical Grade | High Optical Quality |
| 硬度 | モース9 |
| 密度 | 3.98 g/cm³ |
| 熱伝導率 | ~35 W/m·K (25 °C) |
| Maximum Service Temperature | > 1600 °C |
| 化学的安定性 | Excellent resistance to acids and alkalis |
Performance Advantages
Large-Area Dimensional Stability
Maintains high flatness and tight thickness control across a 310 mm square surface, enabling reliable use in large-format systems.
高い機械的強度
The intrinsic hardness and strength of sapphire reduce the risk of surface damage and deformation during handling and operation.
Thermal Endurance
Capable of sustaining high-temperature cycles typical of epitaxial growth, thermal processing, and aerospace environments.
Optical-Grade Surface Finish
Sub-nanometer surface roughness enables use in optical transmission, bonding, and precision alignment applications.
化学的不活性
Superior resistance to corrosive gases, acids, and alkalis compared with glass or fused quartz substrates.
Manufacturing & Inspection
Synthetic sapphire crystal growth
Precision cutting and stress-relief processing
Large-format double-side polishing
Interferometric flatness measurement
Full dimensional and visual inspection prior to shipment
Frequently Asked Questions
Q1: How should this product be classified?
This product is classified as a large-area sapphire substrate or carrier plate, not a standard semiconductor wafer.
Q2: Are other sizes or thicknesses available?
Yes. Custom square or rectangular dimensions from 250 mm to 310 mm per side and various thicknesses are available upon request.
Q3: Is this suitable for GaN epitaxial processing?
Yes. It is commonly used as a GaN-on-Sapphire carrier substrate in MOCVD and related epitaxial systems.
Q4: How is surface flatness verified?
Each substrate is measured using laser interferometry to ensure λ/10 flatness at 633 nm.
Q5: How is the substrate protected during shipping?
Products are packed in custom shock-absorbing, clean-grade packaging designed specifically for ultra-large sapphire components.
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