실리콘 카바이드 SiC 직사각형 기판 - 전력, RF 및 광전자 애플리케이션을 위한 고순도 단결정 SiC 플레이트

그리고 Silicon Carbide (SiC) Rectangle Substrate is a high-performance single-crystal semiconductor material designed for next-generation electronic and photonic devices. With its wide bandgap, excellent thermal conductivity, superior chemical resistance, and high mechanical strength

설명

그리고 Silicon Carbide (SiC) Rectangle Substrate is a high-performance single-crystal semiconductor material designed for next-generation electronic and photonic devices. With its wide bandgap, excellent thermal conductivity, superior chemical resistance, and high mechanical strength, SiC is widely regarded as one of the most advanced substrate materials for high-power, high-temperature, and high-frequency applications.

This rectangular SiC substrate offers flexible dimension customization, making it ideal for device R&D, prototype fabrication, optical components, epitaxy growth, and high-reliability industrial systems.

Key Features & Advantages

1. Wide Bandgap Semiconductor

  • Bandgap of ~3.2–3.3 eV, significantly higher than silicon

  • Supports high breakdown voltage and ultra-efficient switching performance

2. Excellent Thermal Conductivity

  • 3.0–4.9 W/cm·K, ensuring efficient heat dissipation

  • Suitable for high-density power modules and RF devices

3. High Mechanical Strength

  • Mohs hardness ~9.2, almost as hard as diamond

  • Resistant to wear during wire-sawing, CMP, and device process steps

4. High-Temperature Stability

  • Maintains electrical and structural integrity above 600°C

  • Ideal for aerospace, automotive, and extreme-environment electronics

5. Customizable Dimensions & Doping

  • Various rectangle sizes available

  • N-type, P-type, semi-insulating options

  • Surface finish available in single / double polished, epi-ready

Manufacturing Process (PVT Growth)

  1. Raw Material Loading
    Ultra-high-purity SiC powders are placed inside a graphite crucible.

  2. Crystal Growth (>2000°C)
    Using Physical Vapor Transport (PVT), SiC sublimates and recondenses on a seed crystal.

  3. Ingot Processing
    The crystal boule is ground and oriented (C-plane, 0° or 4° off-axis).

  4. High-Precision Slicing
    Diamond wire saws cut the crystal into rectangle plates or wafers.

  5. Lapping & Grinding
    Ensures flatness, uniform thickness, and removes slicing marks.

  6. 화학적 기계적 연마(CMP)
    Produces a mirror-grade surface suitable for epitaxial deposition.

  7. Optional Doping
    Nitrogen (N-type), Aluminum/Boron (P-type), or SI/HPSI for RF & detector applications.

  8. 품질 검사
    Micropipe density, warp, bow, Ra value, and TTV are fully tested.

애플리케이션

전력 전자

  • SiC MOSFET

  • Schottky barrier diodes (SBD)

  • EV traction inverters

  • High-voltage rectifiers

RF & Microwave Devices

  • Radar transmitters

  • 5G base station modules

  • Satellite communication systems

Optoelectronics

  • UV lasers

  • UV photodetectors

  • High-power LED substrates

Extreme-Environment Electronics

  • Aerospace & defense

  • 고온 센서

  • High-radiation equipment

R&D and Prototype Development

  • Material characterization

  • Epitaxial testing

  • Device structure optimization

기술 사양

1. General Specifications

항목사양
재료Single-crystal Silicon Carbide (SiC)
ShapeRectangle substrate / plate
Available Polytypes4H-SiC, 6H-SiC
오리엔테이션C-plane (0001), Off-axis 0° / 4°
두께330–500 μm (customizable)
표면 마감SSP / DSP / Epi-ready polished
DopingN-type, P-type, Semi-insulating HPSI
결함 밀도< 0.5 cm⁻² (4H standard), optional lower
등급Research-grade / device-grade

2. Physical & Electrical Properties

속성4H-SiC6H-SiC
밴드갭~3.26 eV~3.02 eV
열 전도성4.9 W/cm·K4.9 W/cm·K
밀도3.21 g/cm³3.21 g/cm³
Breakdown Electric Field2.2–2.8 MV/cm2.2–2.8 MV/cm
Electron Mobility~800 cm²/V·s~400 cm²/V·s
모스 경도~9.2~9.2
유전체 상수9.69.66

3. Surface & Quality Parameters

매개변수일반 값
표면 거칠기(Ra)≤ 0.2 nm (polished)
TTV< 5 μm
Bow< 10 μm
Warp< 15 μm
Particle Level< 15 @ ≥0.3 μm
평탄도λ/10 @ 632.8 nm (optional)

4. Customization Options

Customizable ItemOptions
DimensionsAny rectangular size available
두께0.33–0.50 mm standard; others on request
Polytype4H-SiC / 6H-SiC
오리엔테이션0° or 4° off-axis
연마SSP / DSP / Epi-ready
DopingN-type, P-type, SI / HPSI
Edge ShapeSquare edge / chamfered edge

자주 묻는 질문

Q1: Can the rectangle substrate be made in any size?
Yes. Fully customizable rectangular dimensions are available based on your design.

Q2: Do you provide epitaxy services?
We offer epi-ready polishing, and epitaxial layers can be added upon request.

Q3: What’s the typical lead time?
Standard production lead time is about 30 days.

Q4: Is research-grade and device-grade quality available?
Yes. Both grades are produced according to customer requirements.

Packaging & Delivery

  • 포장: Custom anti-static boxes, vacuum-sealed or nitrogen-filled

  • Shipping: Protective cushioning for safe transport

  • Lead Time: 2-4 weeks

  • Supply Capability: Flexible based on order volume

상품평

아직 상품평이 없습니다.

“Silicon Carbide SiC Rectangle Substrate – High-Purity Single-Crystal SiC Plate for Power, RF & Optoelectronic Applications”의 첫 상품평을 남겨 주세요

이메일 주소는 공개되지 않습니다. 필수 필드는 *로 표시됩니다