Siliziumkarbid-SiC-Rechteck-Substrat - Hochreine einkristalline SiC-Platte für Leistungs-, RF- und optoelektronische Anwendungen

Die Silicon Carbide (SiC) Rectangle Substrate is a high-performance single-crystal semiconductor material designed for next-generation electronic and photonic devices. With its wide bandgap, excellent thermal conductivity, superior chemical resistance, and high mechanical strength

描述

Die Silicon Carbide (SiC) Rectangle Substrate is a high-performance single-crystal semiconductor material designed for next-generation electronic and photonic devices. With its wide bandgap, excellent thermal conductivity, superior chemical resistance, and high mechanical strength, SiC is widely regarded as one of the most advanced substrate materials for high-power, high-temperature, and high-frequency applications.

This rectangular SiC substrate offers flexible dimension customization, making it ideal for device R&D, prototype fabrication, optical components, epitaxy growth, and high-reliability industrial systems.

Key Features & Advantages

1. Wide Bandgap Semiconductor

  • Bandgap of ~3.2–3.3 eV, significantly higher than silicon

  • Supports high breakdown voltage and ultra-efficient switching performance

2. Excellent Thermal Conductivity

  • 3.0–4.9 W/cm·K, ensuring efficient heat dissipation

  • Suitable for high-density power modules and RF devices

3. High Mechanical Strength

  • Mohs hardness ~9.2, almost as hard as diamond

  • Resistant to wear during wire-sawing, CMP, and device process steps

4. High-Temperature Stability

  • Maintains electrical and structural integrity above 600°C

  • Ideal for aerospace, automotive, and extreme-environment electronics

5. Customizable Dimensions & Doping

  • Various rectangle sizes available

  • N-type, P-type, semi-insulating options

  • Surface finish available in single / double polished, epi-ready

Manufacturing Process (PVT Growth)

  1. Raw Material Loading
    Ultra-high-purity SiC powders are placed inside a graphite crucible.

  2. Crystal Growth (>2000°C)
    Using Physical Vapor Transport (PVT), SiC sublimates and recondenses on a seed crystal.

  3. Ingot Processing
    The crystal boule is ground and oriented (C-plane, 0° or 4° off-axis).

  4. High-Precision Slicing
    Diamond wire saws cut the crystal into rectangle plates or wafers.

  5. Lapping & Grinding
    Ensures flatness, uniform thickness, and removes slicing marks.

  6. Chemisch-mechanisches Polieren (CMP)
    Produces a mirror-grade surface suitable for epitaxial deposition.

  7. Optional Doping
    Nitrogen (N-type), Aluminum/Boron (P-type), or SI/HPSI for RF & detector applications.

  8. Qualitätskontrolle
    Micropipe density, warp, bow, Ra value, and TTV are fully tested.

Anwendungen

Leistungselektronik

  • SiC-MOSFETs

  • Schottky barrier diodes (SBD)

  • EV traction inverters

  • High-voltage rectifiers

RF & Microwave Devices

  • Radar transmitters

  • 5G base station modules

  • Satellite communication systems

Optoelektronik

  • UV lasers

  • UV photodetectors

  • High-power LED substrates

Extreme-Environment Electronics

  • Aerospace & defense

  • Hochtemperatursensoren

  • High-radiation equipment

R&D and Prototype Development

  • Material characterization

  • Epitaxial testing

  • Device structure optimization

Technische Daten

1. General Specifications

ArtikelSpezifikation
MaterialSingle-crystal Silicon Carbide (SiC)
ShapeRectangle substrate / plate
Available Polytypes4H-SiC, 6H-SiC
OrientierungC-plane (0001), Off-axis 0° / 4°
Dicke330–500 μm (customizable)
OberflächenbehandlungSSP / DSP / Epi-ready polished
DopingN-type, P-type, Semi-insulating HPSI
Defekt-Dichte< 0.5 cm⁻² (4H standard), optional lower
KlasseResearch-grade / device-grade

2. Physical & Electrical Properties

Eigentum4H-SiC6H-SiC
Bandlücke~3.26 eV~3.02 eV
Wärmeleitfähigkeit4.9 W/cm·K4.9 W/cm·K
Dichte3.21 g/cm³3.21 g/cm³
Breakdown Electric Field2.2–2.8 MV/cm2.2–2.8 MV/cm
Electron Mobility~800 cm²/V·s~400 cm²/V·s
Mohs-Härte~9.2~9.2
Dielektrizitätskonstante9.69.66

3. Surface & Quality Parameters

ParameterTypischer Wert
Oberflächenrauhigkeit (Ra)≤ 0.2 nm (polished)
TTV< 5 μm
Bow< 10 μm
Warp< 15 μm
Particle Level< 15 @ ≥0.3 μm
Ebenheitλ/10 @ 632.8 nm (optional)

4. Customization Options

Customizable ItemOptions
DimensionsAny rectangular size available
Dicke0.33–0.50 mm standard; others on request
Polytype4H-SiC / 6H-SiC
Orientierung0° or 4° off-axis
PolierenSSP / DSP / Epi-ready
DopingN-type, P-type, SI / HPSI
Edge ShapeSquare edge / chamfered edge

FAQ

Q1: Can the rectangle substrate be made in any size?
Yes. Fully customizable rectangular dimensions are available based on your design.

Q2: Do you provide epitaxy services?
We offer epi-ready polishing, and epitaxial layers can be added upon request.

Q3: What’s the typical lead time?
Standard production lead time is about 30 days.

Q4: Is research-grade and device-grade quality available?
Yes. Both grades are produced according to customer requirements.

Packaging & Delivery

  • Packaging: Custom anti-static boxes, vacuum-sealed or nitrogen-filled

  • Shipping: Protective cushioning for safe transport

  • Lead Time: 2-4 weeks

  • Supply Capability: Flexible based on order volume

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